AU488740B2 - Method of growing epitaxial layers of silicon - Google Patents

Method of growing epitaxial layers of silicon

Info

Publication number
AU488740B2
AU488740B2 AU81423/75A AU8142375A AU488740B2 AU 488740 B2 AU488740 B2 AU 488740B2 AU 81423/75 A AU81423/75 A AU 81423/75A AU 8142375 A AU8142375 A AU 8142375A AU 488740 B2 AU488740 B2 AU 488740B2
Authority
AU
Australia
Prior art keywords
silicon
epitaxial layers
growing epitaxial
growing
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU81423/75A
Other versions
AU8142375A (en
Inventor
Goldsmith And Paul Harvey Robinson Norman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/473,766 external-priority patent/US3945864A/en
Application filed by RCA Corp filed Critical RCA Corp
Application granted granted Critical
Publication of AU8142375A publication Critical patent/AU8142375A/en
Publication of AU488740B2 publication Critical patent/AU488740B2/en
Expired legal-status Critical Current

Links

AU81423/75A 1974-05-28 1975-05-22 Method of growing epitaxial layers of silicon Expired AU488740B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
USUS473,766 1974-05-28
US05/473,766 US3945864A (en) 1974-05-28 1974-05-28 Method of growing thick expitaxial layers of silicon

Publications (2)

Publication Number Publication Date
AU8142375A AU8142375A (en) 1976-11-25
AU488740B2 true AU488740B2 (en) 1976-11-25

Family

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