AU8035675A - Improved defination control of polycrystalline silicon - Google Patents

Improved defination control of polycrystalline silicon

Info

Publication number
AU8035675A
AU8035675A AU80356/75A AU8035675A AU8035675A AU 8035675 A AU8035675 A AU 8035675A AU 80356/75 A AU80356/75 A AU 80356/75A AU 8035675 A AU8035675 A AU 8035675A AU 8035675 A AU8035675 A AU 8035675A
Authority
AU
Australia
Prior art keywords
defination
improved
control
polycrystalline silicon
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU80356/75A
Other versions
AU486792B2 (en
Inventor
Raymond Carley Donald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Application granted granted Critical
Publication of AU486792B2 publication Critical patent/AU486792B2/en
Publication of AU8035675A publication Critical patent/AU8035675A/en
Expired legal-status Critical Current

Links

AU80356/75A 1974-04-25 1975-04-21 Improved defination control of polycrystalline silicon Expired AU486792B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB18165/74 1974-04-25

Publications (2)

Publication Number Publication Date
AU486792B2 AU486792B2 (en) 1976-10-28
AU8035675A true AU8035675A (en) 1976-10-28

Family

ID=

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