SU513575A1 - Method of cleaning surface of silicon-alloyed epitaxial layers - Google Patents

Method of cleaning surface of silicon-alloyed epitaxial layers

Info

Publication number
SU513575A1
SU513575A1 SU7402009979A SU2009979A SU513575A1 SU 513575 A1 SU513575 A1 SU 513575A1 SU 7402009979 A SU7402009979 A SU 7402009979A SU 2009979 A SU2009979 A SU 2009979A SU 513575 A1 SU513575 A1 SU 513575A1
Authority
SU
USSR - Soviet Union
Prior art keywords
alloyed
silicon
epitaxial layers
cleaning surface
epitaxial
Prior art date
Application number
SU7402009979A
Other languages
Russian (ru)
Inventor
И.Е. Марончук
Б.И. Сушко
Ю.Г. Пухов
Ю.Е. Марончук
Original Assignee
Институт Физики Полупроводников Со Ан Ссср
Завод Чистых Металлов Имени 50-Летия Ссср
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Институт Физики Полупроводников Со Ан Ссср, Завод Чистых Металлов Имени 50-Летия Ссср filed Critical Институт Физики Полупроводников Со Ан Ссср
Priority to SU7402009979A priority Critical patent/SU513575A1/en
Application granted granted Critical
Publication of SU513575A1 publication Critical patent/SU513575A1/en

Links

SU7402009979A 1974-03-28 1974-03-28 Method of cleaning surface of silicon-alloyed epitaxial layers SU513575A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU7402009979A SU513575A1 (en) 1974-03-28 1974-03-28 Method of cleaning surface of silicon-alloyed epitaxial layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU7402009979A SU513575A1 (en) 1974-03-28 1974-03-28 Method of cleaning surface of silicon-alloyed epitaxial layers

Publications (1)

Publication Number Publication Date
SU513575A1 true SU513575A1 (en) 1977-12-05

Family

ID=20580076

Family Applications (1)

Application Number Title Priority Date Filing Date
SU7402009979A SU513575A1 (en) 1974-03-28 1974-03-28 Method of cleaning surface of silicon-alloyed epitaxial layers

Country Status (1)

Country Link
SU (1) SU513575A1 (en)

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