AU454548B2 - Method of producing a planar arrangement - Google Patents

Method of producing a planar arrangement

Info

Publication number
AU454548B2
AU454548B2 AU33430/71A AU3343071A AU454548B2 AU 454548 B2 AU454548 B2 AU 454548B2 AU 33430/71 A AU33430/71 A AU 33430/71A AU 3343071 A AU3343071 A AU 3343071A AU 454548 B2 AU454548 B2 AU 454548B2
Authority
AU
Australia
Prior art keywords
producing
planar arrangement
planar
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU33430/71A
Other languages
English (en)
Other versions
AU3343071A (en
Inventor
MRUCZEK and WERNER SCHERBER WERNER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Licentia Patent Verwaltungs GmbH
Original Assignee
Licentia Patent Verwaltungs GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Licentia Patent Verwaltungs GmbH filed Critical Licentia Patent Verwaltungs GmbH
Publication of AU3343071A publication Critical patent/AU3343071A/en
Application granted granted Critical
Publication of AU454548B2 publication Critical patent/AU454548B2/en
Expired legal-status Critical Current

Links

Classifications

    • H10P14/69433—
    • H10P14/6334—
    • H10P14/6504—
    • H10P14/6512—
    • H10P14/662—
    • H10P14/6682—
    • H10P14/69215—
    • H10W74/40—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/113—Nitrides of boron or aluminum or gallium
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/114—Nitrides of silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/906—Cleaning of wafer as interim step
AU33430/71A 1970-09-30 1971-09-14 Method of producing a planar arrangement Expired AU454548B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEDE820479 1970-09-30
DE19702047998 DE2047998A1 (de) 1970-09-30 1970-09-30 Verfahren zum Herstellen einer Planaranordnung

Publications (2)

Publication Number Publication Date
AU3343071A AU3343071A (en) 1973-03-22
AU454548B2 true AU454548B2 (en) 1974-10-31

Family

ID=5783765

Family Applications (1)

Application Number Title Priority Date Filing Date
AU33430/71A Expired AU454548B2 (en) 1970-09-30 1971-09-14 Method of producing a planar arrangement

Country Status (5)

Country Link
US (1) US3798062A (enExample)
AU (1) AU454548B2 (enExample)
DE (1) DE2047998A1 (enExample)
FR (1) FR2108122B1 (enExample)
GB (1) GB1339293A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635024B2 (enExample) * 1973-12-14 1981-08-14
JPS5922381B2 (ja) * 1975-12-03 1984-05-26 株式会社東芝 ハンドウタイソシノ セイゾウホウホウ
DE2836911C2 (de) * 1978-08-23 1986-11-06 Siemens AG, 1000 Berlin und 8000 München Passivierungsschicht für Halbleiterbauelemente
FR3125770B1 (fr) 2021-07-27 2023-10-06 Psa Automobiles Sa Procédé d’ouverture d’un véhicule et clef mains libres associée.

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3281915A (en) * 1963-04-02 1966-11-01 Rca Corp Method of fabricating a semiconductor device
US3503813A (en) * 1965-12-15 1970-03-31 Hitachi Ltd Method of making a semiconductor device
US3438873A (en) * 1966-05-11 1969-04-15 Bell Telephone Labor Inc Anodic treatment to alter solubility of dielectric films
US3455020A (en) * 1966-10-13 1969-07-15 Rca Corp Method of fabricating insulated-gate field-effect devices
NL162250C (nl) * 1967-11-21 1980-04-15 Philips Nv Halfgeleiderinrichting met een halfgeleiderlichaam, waarvan aan een hoofdoppervlak het halfgeleideroppervlak plaatselijk met een oxydelaag is bedekt, en werkwijze voor het vervaardigen van planaire halfgeleider- inrichtingen.
US3607697A (en) * 1968-04-18 1971-09-21 Sprague Electric Co Sputtering process for making a film of silica and silicon nitride
US3658678A (en) * 1969-11-26 1972-04-25 Ibm Glass-annealing process for encapsulating and stabilizing fet devices

Also Published As

Publication number Publication date
DE2047998A1 (de) 1972-04-06
AU3343071A (en) 1973-03-22
US3798062A (en) 1974-03-19
FR2108122B1 (enExample) 1974-06-07
GB1339293A (en) 1973-11-28
FR2108122A1 (enExample) 1972-05-12

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