AU2018374514B2 - X-ray source and method for generating x-ray radiation - Google Patents

X-ray source and method for generating x-ray radiation Download PDF

Info

Publication number
AU2018374514B2
AU2018374514B2 AU2018374514A AU2018374514A AU2018374514B2 AU 2018374514 B2 AU2018374514 B2 AU 2018374514B2 AU 2018374514 A AU2018374514 A AU 2018374514A AU 2018374514 A AU2018374514 A AU 2018374514A AU 2018374514 B2 AU2018374514 B2 AU 2018374514B2
Authority
AU
Australia
Prior art keywords
liquid target
electron beam
impact portion
ray
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
AU2018374514A
Other languages
English (en)
Other versions
AU2018374514A1 (en
Inventor
Björn HANSSON
Per TAKMAN
Shiho Tanaka
Yuli Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Excillum AB
Original Assignee
Excillum AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Excillum AB filed Critical Excillum AB
Publication of AU2018374514A1 publication Critical patent/AU2018374514A1/en
Application granted granted Critical
Publication of AU2018374514B2 publication Critical patent/AU2018374514B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/002—Supply of the plasma generating material
    • H05G2/0027—Arrangements for controlling the supply; Arrangements for measurements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
AU2018374514A 2017-12-01 2018-11-30 X-ray source and method for generating x-ray radiation Active AU2018374514B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP17204949.6 2017-12-01
EP17204949.6A EP3493239A1 (en) 2017-12-01 2017-12-01 X-ray source and method for generating x-ray radiation
PCT/EP2018/083138 WO2019106145A1 (en) 2017-12-01 2018-11-30 X-ray source and method for generating x-ray radiation

Publications (2)

Publication Number Publication Date
AU2018374514A1 AU2018374514A1 (en) 2020-07-16
AU2018374514B2 true AU2018374514B2 (en) 2021-11-11

Family

ID=60569730

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2018374514A Active AU2018374514B2 (en) 2017-12-01 2018-11-30 X-ray source and method for generating x-ray radiation

Country Status (8)

Country Link
US (2) US11342154B2 (cg-RX-API-DMAC7.html)
EP (2) EP3493239A1 (cg-RX-API-DMAC7.html)
JP (2) JP7195648B2 (cg-RX-API-DMAC7.html)
KR (2) KR102714936B1 (cg-RX-API-DMAC7.html)
CN (2) CN111542906B (cg-RX-API-DMAC7.html)
AU (1) AU2018374514B2 (cg-RX-API-DMAC7.html)
TW (1) TWI687959B (cg-RX-API-DMAC7.html)
WO (1) WO2019106145A1 (cg-RX-API-DMAC7.html)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3493239A1 (en) 2017-12-01 2019-06-05 Excillum AB X-ray source and method for generating x-ray radiation
EP3579664A1 (en) * 2018-06-08 2019-12-11 Excillum AB Method for controlling an x-ray source
EP3648135A1 (en) * 2018-11-05 2020-05-06 Excillum AB Mechanical alignment of x-ray sources
EP4123680A1 (en) * 2020-04-03 2023-01-25 Hamamatsu Photonics K.K. X-ray generation device
EP4075474A1 (en) 2021-04-15 2022-10-19 Excillum AB Liquid jet target x-ray source
CN118974869A (zh) * 2022-03-31 2024-11-15 佳能安内华股份有限公司 X射线产生装置、x射线成像装置以及x射线产生装置的调整方法
CN114945237B (zh) * 2022-04-25 2025-12-05 上海科技大学 桌面型飞秒硬x射线脉冲源装置及脉冲产生方法
SE2351080A1 (en) * 2023-09-18 2025-03-19 Northvolt Ab A battery cell imaging apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5052034A (en) * 1989-10-30 1991-09-24 Siemens Aktiengesellschaft X-ray generator

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4608543A (en) 1984-12-17 1986-08-26 Advanced Micro Devices, Inc. Controllable effective resistance and phase lock loop with controllable filter
US4953191A (en) * 1989-07-24 1990-08-28 The United States Of America As Represented By The United States Department Of Energy High intensity x-ray source using liquid gallium target
JPH05258692A (ja) 1992-03-10 1993-10-08 Nikon Corp Ｘ線発生方法およびｘ線発生装置
US6324255B1 (en) * 1998-08-13 2001-11-27 Nikon Technologies, Inc. X-ray irradiation apparatus and x-ray exposure apparatus
GB9906886D0 (en) * 1999-03-26 1999-05-19 Bede Scient Instr Ltd Method and apparatus for prolonging the life of an X-ray target
EP1155419B1 (en) * 1999-12-20 2007-02-14 Koninklijke Philips Electronics N.V. "x-ray microscope having an x-ray source for soft x-rays
EP1305984B1 (en) * 2000-07-28 2010-11-24 Jettec AB Method and apparatus for generating x-ray radiation
EP1573774A2 (en) * 2002-12-11 2005-09-14 Koninklijke Philips Electronics N.V. X-ray source for generating monochromatic x-rays
DE10326279A1 (de) * 2003-06-11 2005-01-05 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Plasma-basierte Erzeugung von Röntgenstrahlung mit einem schichtförmigen Targetmaterial
DE102004013620B4 (de) * 2004-03-19 2008-12-04 GE Homeland Protection, Inc., Newark Elektronenfenster für eine Flüssigmetallanode, Flüssigmetallanode, Röntgenstrahler und Verfahren zum Betrieb eines solchen Röntgenstrahlers
US7208746B2 (en) * 2004-07-14 2007-04-24 Asml Netherlands B.V. Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
US8213576B2 (en) * 2007-08-09 2012-07-03 Shimadzu Corporation X-ray tube apparatus
DE102008026938A1 (de) * 2008-06-05 2009-12-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Strahlungsquelle und Verfahren zum Erzeugen von Röntgenstrahlung
WO2010083854A1 (en) * 2009-01-26 2010-07-29 Excillum Ab X-ray window
EP2415065A1 (en) * 2009-04-03 2012-02-08 Excillum AB Supply of a liquid-metal target in x-ray generation
HUP1000635A2 (en) * 2010-11-26 2012-05-29 Ge Hungary Kft Liquid anode x-ray source
KR101898047B1 (ko) * 2010-12-22 2018-09-12 엑실룸 에이비 X선 소스에서 전자빔을 정렬하고 집속하는 방법
WO2013020130A1 (en) 2011-08-04 2013-02-07 John Lewellen Bremstrahlung target for intensity modulated x-ray radiation therapy and stereotactic x-ray therapy
NL2009359A (en) * 2011-09-23 2013-03-26 Asml Netherlands Bv Radiation source.
EP2862182B1 (en) * 2012-06-14 2018-01-31 Excillum AB Limiting migration of target material
JP5976208B2 (ja) * 2012-06-15 2016-08-23 シーメンス アクチエンゲゼルシヤフトＳｉｅｍｅｎｓ Ａｋｔｉｅｎｇｅｓｅｌｌｓｃｈａｆｔ Ｘ線源、ｘ線源の使用およびｘ線を発生させる方法
CN103543298B (zh) 2012-07-13 2016-03-23 旺矽科技股份有限公司 探针固持结构及其光学检测装置
US20140161233A1 (en) * 2012-12-06 2014-06-12 Bruker Axs Gmbh X-ray apparatus with deflectable electron beam
US20140219424A1 (en) * 2013-02-04 2014-08-07 Moxtek, Inc. Electron Beam Focusing and Centering
US9232623B2 (en) * 2014-01-22 2016-01-05 Asml Netherlands B.V. Extreme ultraviolet light source
EP3493239A1 (en) 2017-12-01 2019-06-05 Excillum AB X-ray source and method for generating x-ray radiation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5052034A (en) * 1989-10-30 1991-09-24 Siemens Aktiengesellschaft X-ray generator

Also Published As

Publication number Publication date
JP2023027189A (ja) 2023-03-01
JP7195648B2 (ja) 2022-12-26
CN111542906A (zh) 2020-08-14
WO2019106145A1 (en) 2019-06-06
JP7488600B2 (ja) 2024-05-22
KR102714936B1 (ko) 2024-10-07
US11342154B2 (en) 2022-05-24
KR20240150529A (ko) 2024-10-15
EP3718127B1 (en) 2023-12-20
US20220254595A1 (en) 2022-08-11
TWI687959B (zh) 2020-03-11
JP2021504906A (ja) 2021-02-15
CN111542906B (zh) 2023-06-30
US20210027974A1 (en) 2021-01-28
KR102997859B1 (ko) 2026-07-29
EP3493239A1 (en) 2019-06-05
US11963286B2 (en) 2024-04-16
CN116504601A (zh) 2023-07-28
AU2018374514A1 (en) 2020-07-16
TW201926396A (zh) 2019-07-01
KR20200090885A (ko) 2020-07-29
EP3718127A1 (en) 2020-10-07

Similar Documents

Publication Publication Date Title
US11963286B2 (en) X-ray source and method for generating X-ray radiation
US10049850B2 (en) X-ray apparatus with deflectable electron beam
EP1090285B1 (en) X-ray diffractometer with adjustable image distance
KR102065158B1 (ko) 가변 각도 시준기
EP3141889B1 (en) X-ray small angle optical system with multilayer mirror
JP4278108B2 (ja) 超小角ｘ線散乱測定装置
Zhirnov et al. Evaporation-induced gas-phase flows at selective laser melting
Zhou et al. Impulse of planar and sphere target by nanosecond laser ablation in a large beam spot
US7214948B2 (en) Neutron optical component for the small angle neutron scattering measuring technique
TW202006777A (zh) 測定電子點之寬度及高度
Spethmann et al. Measurement and simulation of the momentum transferred to a surface by deposition of sputtered atoms
EP1916695A1 (en) Charged particle beam apparatus and method for operating it
US8068582B2 (en) Methods and systems for the directing and energy filtering of X-rays for non-intrusive inspection
EP3900007B1 (en) Electron collector with oblique impact portion
Lin et al. Confocal X-ray fluorescence for the exploration of near-field structures of aerated-liquid jets in subsonic crossflows
Artru et al. Different focalisations of Optical Transition Radiation and Diffraction Radiation
Orlandi Spatial coherence effects in the transition radiation spectrum for relativistic charged beams: theoretical results and beam diagnostics implications
JPS63279549A (ja) 表面解析装置

Legal Events

Date Code Title Description
FGA Letters patent sealed or granted (standard patent)