AU2006252590A8 - Microelectromechanical systems (MEMS) device including a superlattice and associated methods - Google Patents

Microelectromechanical systems (MEMS) device including a superlattice and associated methods

Info

Publication number
AU2006252590A8
AU2006252590A8 AU2006252590A AU2006252590A AU2006252590A8 AU 2006252590 A8 AU2006252590 A8 AU 2006252590A8 AU 2006252590 A AU2006252590 A AU 2006252590A AU 2006252590 A AU2006252590 A AU 2006252590A AU 2006252590 A8 AU2006252590 A8 AU 2006252590A8
Authority
AU
Australia
Prior art keywords
superlattice
mems
device including
associated methods
microelectromechanical systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2006252590A
Other versions
AU2006252590A1 (en
Inventor
Richard A. Blanchard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mears Technologies Inc
Original Assignee
Mears Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mears Technologies Inc filed Critical Mears Technologies Inc
Publication of AU2006252590A1 publication Critical patent/AU2006252590A1/en
Publication of AU2006252590A8 publication Critical patent/AU2006252590A8/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
AU2006252590A 2005-05-31 2006-05-31 Microelectromechanical systems (MEMS) device including a superlattice and associated methods Abandoned AU2006252590A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US68599605P 2005-05-31 2005-05-31
US60/685,996 2005-05-31
PCT/US2006/021082 WO2006130665A2 (en) 2005-05-31 2006-05-31 Microelectromechanical systems (mems) device including a superlattice and associated methods

Publications (2)

Publication Number Publication Date
AU2006252590A1 AU2006252590A1 (en) 2006-12-07
AU2006252590A8 true AU2006252590A8 (en) 2008-04-03

Family

ID=37103354

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2006252590A Abandoned AU2006252590A1 (en) 2005-05-31 2006-05-31 Microelectromechanical systems (MEMS) device including a superlattice and associated methods

Country Status (7)

Country Link
EP (1) EP1896361A2 (en)
JP (1) JP2008545542A (en)
CN (1) CN101258100B (en)
AU (1) AU2006252590A1 (en)
CA (1) CA2609614A1 (en)
TW (2) TWI306666B (en)
WO (1) WO2006130665A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8604898B2 (en) * 2009-04-20 2013-12-10 International Business Machines Corporation Vertical integrated circuit switches, design structure and methods of fabricating same
CN102442631A (en) * 2010-10-08 2012-05-09 探微科技股份有限公司 Micro-electromechanical device and composite base material used in one micro-electromechanical device
CN105428520A (en) * 2015-11-09 2016-03-23 业成光电（深圳）有限公司 Method for manufacturing piezoelectric element and piezoelectric substrate

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4590399A (en) * 1984-02-28 1986-05-20 Exxon Research And Engineering Co. Superlattice piezoelectric devices
US5393375A (en) * 1992-02-03 1995-02-28 Cornell Research Foundation, Inc. Process for fabricating submicron single crystal electromechanical structures
JP2000188049A (en) * 1998-12-22 2000-07-04 Nec Corp Micro machine switch and manufacture thereof
GB2362506A (en) * 2000-05-19 2001-11-21 Secr Defence Field effect transistor with an InSb quantum well and minority carrier extraction
JP2004535062A (en) * 2001-06-14 2004-11-18 ナノダイナミックス インコーポレイテッド Epitaxial SiOx barrier / insulating layer
JP2003217421A (en) * 2002-01-24 2003-07-31 Matsushita Electric Ind Co Ltd Micromachine switch
US6958486B2 (en) * 2003-06-26 2005-10-25 Rj Mears, Llc Semiconductor device including band-engineered superlattice

Also Published As

Publication number Publication date
EP1896361A2 (en) 2008-03-12
TW200707650A (en) 2007-02-16
TWI306666B (en) 2009-02-21
CN101258100B (en) 2012-01-04
TW200711124A (en) 2007-03-16
WO2006130665A3 (en) 2007-01-18
AU2006252590A1 (en) 2006-12-07
TWI306646B (en) 2009-02-21
CA2609614A1 (en) 2006-12-07
CN101258100A (en) 2008-09-03
WO2006130665A2 (en) 2006-12-07
JP2008545542A (en) 2008-12-18

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Legal Events

Date Code Title Description
TH Corrigenda

Free format text: IN VOL 22, NO 2, PAGE(S) 199 UNDER THE HEADING PCT APPLICATIONS THAT HAVE ENTERED THE NATIONAL PHASE -NAME INDEX UNDER THE NAME RJ MEARS, LLC, APPLICATION NO. 2006252590, UNDER INID (71) CORRECT THE APPLICANT TO MEARS TECHNOLOGIES, INC.

MK1 Application lapsed section 142(2)(a) - no request for examination in relevant period