AU2003284699A1 - Optical multilayer film filter and method of producing the same - Google Patents

Optical multilayer film filter and method of producing the same

Info

Publication number
AU2003284699A1
AU2003284699A1 AU2003284699A AU2003284699A AU2003284699A1 AU 2003284699 A1 AU2003284699 A1 AU 2003284699A1 AU 2003284699 A AU2003284699 A AU 2003284699A AU 2003284699 A AU2003284699 A AU 2003284699A AU 2003284699 A1 AU2003284699 A1 AU 2003284699A1
Authority
AU
Australia
Prior art keywords
producing
same
multilayer film
film filter
optical multilayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003284699A
Inventor
Masayuki Ohtani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2003284699A1 publication Critical patent/AU2003284699A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
AU2003284699A 2002-11-13 2003-10-27 Optical multilayer film filter and method of producing the same Abandoned AU2003284699A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002-329953 2002-11-13
JP2002329953A JP2004163692A (en) 2002-11-13 2002-11-13 Optical multilayer film filter and its manufacture method
PCT/JP2003/013715 WO2004044630A1 (en) 2002-11-13 2003-10-27 Optical multilayer film filter and method of producing the same

Publications (1)

Publication Number Publication Date
AU2003284699A1 true AU2003284699A1 (en) 2004-06-03

Family

ID=32310585

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003284699A Abandoned AU2003284699A1 (en) 2002-11-13 2003-10-27 Optical multilayer film filter and method of producing the same

Country Status (3)

Country Link
JP (1) JP2004163692A (en)
AU (1) AU2003284699A1 (en)
WO (1) WO2004044630A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2833936B2 (en) * 1992-09-04 1998-12-09 山形日本電気株式会社 Laser marking method for semiconductor wafer
JPH104057A (en) * 1996-06-13 1998-01-06 Nikon Corp Exposure method and system
JP3844886B2 (en) * 1998-07-28 2006-11-15 富士通株式会社 Manufacturing method of optical filter
JP3928681B2 (en) * 1999-02-18 2007-06-13 富士ゼロックス株式会社 Semiconductor device and manufacturing method thereof
JP2002071944A (en) * 2000-08-24 2002-03-12 Toyo Commun Equip Co Ltd Apparatus and method for manufacturing optical band pass filter

Also Published As

Publication number Publication date
WO2004044630A1 (en) 2004-05-27
JP2004163692A (en) 2004-06-10

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase