AU2003259049A1 - Electrolytic copper plating solutions - Google Patents
Electrolytic copper plating solutionsInfo
- Publication number
- AU2003259049A1 AU2003259049A1 AU2003259049A AU2003259049A AU2003259049A1 AU 2003259049 A1 AU2003259049 A1 AU 2003259049A1 AU 2003259049 A AU2003259049 A AU 2003259049A AU 2003259049 A AU2003259049 A AU 2003259049A AU 2003259049 A1 AU2003259049 A1 AU 2003259049A1
- Authority
- AU
- Australia
- Prior art keywords
- copper plating
- electrolytic copper
- plating solutions
- solutions
- electrolytic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title 1
- 229910052802 copper Inorganic materials 0.000 title 1
- 239000010949 copper Substances 0.000 title 1
- 238000007747 plating Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
- C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/423—Plated through-holes or plated via connections characterised by electroplating method
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Electroplating Methods And Accessories (AREA)
- Electrodes Of Semiconductors (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US40395402P | 2002-08-16 | 2002-08-16 | |
US60/403,954 | 2002-08-16 | ||
US10/620,042 | 2003-07-15 | ||
US10/620,042 US20040045832A1 (en) | 1999-10-14 | 2003-07-15 | Electrolytic copper plating solutions |
PCT/US2003/024747 WO2004016829A2 (en) | 2002-08-16 | 2003-08-08 | Electrolytic copper plating solutions |
Publications (2)
Publication Number | Publication Date |
---|---|
AU2003259049A8 AU2003259049A8 (en) | 2004-03-03 |
AU2003259049A1 true AU2003259049A1 (en) | 2004-03-03 |
Family
ID=31891409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003259049A Abandoned AU2003259049A1 (en) | 2002-08-16 | 2003-08-08 | Electrolytic copper plating solutions |
Country Status (8)
Country | Link |
---|---|
US (1) | US20040045832A1 (en) |
EP (1) | EP1529126A4 (en) |
JP (1) | JP2005535787A (en) |
CN (1) | CN1592800A (en) |
AU (1) | AU2003259049A1 (en) |
CA (1) | CA2465363A1 (en) |
TW (1) | TWI285687B (en) |
WO (1) | WO2004016829A2 (en) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10311575B4 (en) * | 2003-03-10 | 2007-03-22 | Atotech Deutschland Gmbh | Process for the electrolytic metallization of workpieces with high aspect ratio holes |
JP4238051B2 (en) * | 2003-03-11 | 2009-03-11 | 日本ペイント株式会社 | Cationic electrodeposition coating composition and method for stabilizing cationic electrodeposition coating composition |
JP2005272874A (en) * | 2004-03-23 | 2005-10-06 | Sumitomo Bakelite Co Ltd | Method for producing circuit board |
TW200632147A (en) | 2004-11-12 | 2006-09-16 | ||
JP4704761B2 (en) * | 2005-01-19 | 2011-06-22 | 石原薬品株式会社 | Electro copper plating bath and copper plating method |
US20060231409A1 (en) * | 2005-03-31 | 2006-10-19 | Tdk Corporation | Plating solution, conductive material, and surface treatment method of conductive material |
JP4764718B2 (en) * | 2005-12-28 | 2011-09-07 | 新光電気工業株式会社 | Through-hole filling method |
US7575666B2 (en) * | 2006-04-05 | 2009-08-18 | James Watkowski | Process for electrolytically plating copper |
US20080110759A1 (en) * | 2006-11-14 | 2008-05-15 | Tower Semiconductor Ltd. | Self Terminating Overburden Free Plating (STOP) Of Metals On Patterned Wafers |
TWI341554B (en) * | 2007-08-02 | 2011-05-01 | Enthone | Copper metallization of through silicon via |
JP2009041097A (en) * | 2007-08-10 | 2009-02-26 | Rohm & Haas Electronic Materials Llc | Copper plating method |
EP2103717B1 (en) * | 2008-02-29 | 2010-04-21 | ATOTECH Deutschland GmbH | Pyrophosphate-based bath for depositing tin alloy layers |
US10221496B2 (en) | 2008-11-26 | 2019-03-05 | Macdermid Enthone Inc. | Copper filling of through silicon vias |
US8388824B2 (en) | 2008-11-26 | 2013-03-05 | Enthone Inc. | Method and composition for electrodeposition of copper in microelectronics with dipyridyl-based levelers |
US20100206737A1 (en) * | 2009-02-17 | 2010-08-19 | Preisser Robert F | Process for electrodeposition of copper chip to chip, chip to wafer and wafer to wafer interconnects in through-silicon vias (tsv) |
US20120027948A1 (en) * | 2009-04-07 | 2012-02-02 | Basf Se | Composition for metal plating comprising suppressing agent for void free submicron feature filling |
MY156728A (en) | 2009-04-07 | 2016-03-15 | Basf Se | Composition for metal plating comprising suppressing agent for void free submicron feature filling |
US8262894B2 (en) | 2009-04-30 | 2012-09-11 | Moses Lake Industries, Inc. | High speed copper plating bath |
US20100320081A1 (en) * | 2009-06-17 | 2010-12-23 | Mayer Steven T | Apparatus for wetting pretreatment for enhanced damascene metal filling |
TWI465609B (en) * | 2009-07-07 | 2014-12-21 | Furukawa Electric Co Ltd | An electrolytic copper film, a method for producing the same, and a copper electrolytic solution for manufacturing a copper electrolytic film |
KR20120095888A (en) * | 2009-09-28 | 2012-08-29 | 바스프 에스이 | Copper electroplating composition |
JP5384719B2 (en) * | 2010-02-22 | 2014-01-08 | Jx日鉱日石金属株式会社 | High purity copper sulfonate aqueous solution and method for producing the same |
KR101705734B1 (en) * | 2011-02-18 | 2017-02-14 | 삼성전자주식회사 | Copper electroplating solution and method of copper electroplating using the same |
WO2012164509A1 (en) | 2011-06-01 | 2012-12-06 | Basf Se | Composition for metal electroplating comprising an additive for bottom-up filling of though silicon vias and interconnect features |
EP2530102A1 (en) | 2011-06-01 | 2012-12-05 | Basf Se | Additive and composition for metal electroplating comprising an additive for bottom-up filling of though silicon vias |
CN103361694A (en) * | 2013-08-08 | 2013-10-23 | 上海新阳半导体材料股份有限公司 | Micro-pore electroplated copper filling method for three-dimensional (3D) copper interconnection high aspect ratio through-silicon-via technology |
CN104762643A (en) * | 2014-12-17 | 2015-07-08 | 安捷利电子科技(苏州)有限公司 | Copper plating solution capable of realizing co-plating of through hole, blind hole and circuit |
WO2016174705A1 (en) * | 2015-04-27 | 2016-11-03 | 株式会社Jcu | Method for managing copper sulfate plating solution |
US11191164B2 (en) * | 2015-09-29 | 2021-11-30 | Dai Nippon Printing Co., Ltd. | Wiring structure and method of manufacturing the same, semiconductor device, multilayer wiring structure and method of manufacturing the same, semiconductor element mounting substrate, method of forming pattern structure, imprint mold and method of manufacturing the same, imprint mold set, and method of manufacturing multilayer wiring board |
JP2017222903A (en) * | 2016-06-15 | 2017-12-21 | 公立大学法人大阪府立大学 | Halogen free or low halogen electrolytic hole filling copper plating bath |
CN109952390A (en) * | 2016-09-22 | 2019-06-28 | 麦克德米德乐思公司 | The electro-deposition of copper in microelectronics part |
CN106757191B (en) | 2016-11-23 | 2019-10-01 | 苏州昕皓新材料科技有限公司 | A kind of copper crystal particle and preparation method thereof with high preferred orientation |
TWI647342B (en) * | 2017-08-03 | 2019-01-11 | 國家中山科學研究院 | Copper-silver two-component metal plating liquid for semiconductor wires and plating method |
US11387108B2 (en) * | 2017-09-04 | 2022-07-12 | Basf Se | Composition for metal electroplating comprising leveling agent |
CN108914171B (en) * | 2018-07-19 | 2020-05-19 | 广东工业大学 | Additive for accelerating copper deposition and preparation method and application thereof |
CN110983389B (en) * | 2019-12-31 | 2020-11-13 | 广州三孚新材料科技股份有限公司 | Cyanide-free alkaline copper electroplating solution for steel parts and preparation method thereof |
CN113279026B (en) * | 2021-04-25 | 2022-09-02 | 厦门理工学院 | Liquid medicine for copper foil blind hole filling |
CN116856022B (en) * | 2023-07-05 | 2024-02-20 | 诺博环保科技(中山)有限公司 | Alloy additive for electroplating and preparation method thereof |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2252942A (en) * | 1938-07-01 | 1941-08-19 | Clyde M Mourer | Metal spray gun |
US2525943A (en) * | 1947-09-24 | 1950-10-17 | Standard Oil Co | Copper plating bath and process |
US3770598A (en) * | 1972-01-21 | 1973-11-06 | Oxy Metal Finishing Corp | Electrodeposition of copper from acid baths |
DE2204326C3 (en) * | 1972-01-26 | 1981-07-09 | Schering Ag Berlin Und Bergkamen, 1000 Berlin | Aqueous acid bath for the galvanic deposition of shiny and ductile copper coatings |
US3956084A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US4374709A (en) * | 1980-05-01 | 1983-02-22 | Occidental Chemical Corporation | Process for plating polymeric substrates |
US4376685A (en) * | 1981-06-24 | 1983-03-15 | M&T Chemicals Inc. | Acid copper electroplating baths containing brightening and leveling additives |
US4555315A (en) * | 1984-05-29 | 1985-11-26 | Omi International Corporation | High speed copper electroplating process and bath therefor |
US4673469A (en) * | 1984-06-08 | 1987-06-16 | Mcgean-Rohco, Inc. | Method of plating plastics |
US4673459A (en) * | 1985-06-18 | 1987-06-16 | Kamyr, Inc. | Radial configuration of evaporator heating elements and method |
US5051154A (en) * | 1988-08-23 | 1991-09-24 | Shipley Company Inc. | Additive for acid-copper electroplating baths to increase throwing power |
US5068013A (en) * | 1988-08-23 | 1991-11-26 | Shipley Company Inc. | Electroplating composition and process |
US5174886A (en) * | 1991-02-22 | 1992-12-29 | Mcgean-Rohco, Inc. | High-throw acid copper plating using inert electrolyte |
US5385661A (en) * | 1993-09-17 | 1995-01-31 | International Business Machines Corporation | Acid electrolyte solution and process for the electrodeposition of copper-rich alloys exploiting the phenomenon of underpotential deposition |
DE4338148C2 (en) * | 1993-11-04 | 1997-01-30 | Atotech Deutschland Gmbh | Process for the electrolytic deposition of dull and pimple-free copper layers with high elongation at break on substrate surfaces |
DE19545231A1 (en) * | 1995-11-21 | 1997-05-22 | Atotech Deutschland Gmbh | Process for the electrolytic deposition of metal layers |
JPH10310881A (en) * | 1997-05-12 | 1998-11-24 | Toppan Printing Co Ltd | Method for etching copper-base metallic material |
US6270601B1 (en) * | 1998-11-02 | 2001-08-07 | Coorstek, Inc. | Method for producing filled vias in electronic components |
US6444110B2 (en) * | 1999-05-17 | 2002-09-03 | Shipley Company, L.L.C. | Electrolytic copper plating method |
US6605204B1 (en) * | 1999-10-14 | 2003-08-12 | Atofina Chemicals, Inc. | Electroplating of copper from alkanesulfonate electrolytes |
-
2003
- 2003-07-15 US US10/620,042 patent/US20040045832A1/en not_active Abandoned
- 2003-08-08 WO PCT/US2003/024747 patent/WO2004016829A2/en active Application Filing
- 2003-08-08 CA CA002465363A patent/CA2465363A1/en not_active Abandoned
- 2003-08-08 JP JP2004529271A patent/JP2005535787A/en not_active Abandoned
- 2003-08-08 AU AU2003259049A patent/AU2003259049A1/en not_active Abandoned
- 2003-08-08 CN CN03801591.9A patent/CN1592800A/en active Pending
- 2003-08-08 EP EP03788347A patent/EP1529126A4/en not_active Withdrawn
- 2003-08-15 TW TW092122506A patent/TWI285687B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AU2003259049A8 (en) | 2004-03-03 |
TW200415263A (en) | 2004-08-16 |
CA2465363A1 (en) | 2004-02-26 |
JP2005535787A (en) | 2005-11-24 |
EP1529126A4 (en) | 2006-07-05 |
EP1529126A2 (en) | 2005-05-11 |
WO2004016829A2 (en) | 2004-02-26 |
US20040045832A1 (en) | 2004-03-11 |
WO2004016829A3 (en) | 2004-04-29 |
TWI285687B (en) | 2007-08-21 |
CN1592800A (en) | 2005-03-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |