AU2002367326A1 - Method and array for the detection of foreign gas in optical imaging and/or beam control systems - Google Patents

Method and array for the detection of foreign gas in optical imaging and/or beam control systems

Info

Publication number
AU2002367326A1
AU2002367326A1 AU2002367326A AU2002367326A AU2002367326A1 AU 2002367326 A1 AU2002367326 A1 AU 2002367326A1 AU 2002367326 A AU2002367326 A AU 2002367326A AU 2002367326 A AU2002367326 A AU 2002367326A AU 2002367326 A1 AU2002367326 A1 AU 2002367326A1
Authority
AU
Australia
Prior art keywords
array
detection
optical imaging
control systems
beam control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002367326A
Other languages
English (en)
Inventor
Gerhart Schroff
Michael Stetter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2002367326A1 publication Critical patent/AU2002367326A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B23K26/128Laser beam path enclosures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • B23K26/705Beam measuring device

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
AU2002367326A 2002-01-08 2002-12-30 Method and array for the detection of foreign gas in optical imaging and/or beam control systems Abandoned AU2002367326A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10200349.1 2002-01-08
DE10200349A DE10200349A1 (de) 2002-01-08 2002-01-08 Verfahren und Anordnung zur Fremdgaserkennung im Strahlengang optischer Abbildungs- und/oder Strahlführungssysteme
PCT/EP2002/014806 WO2003058213A1 (de) 2002-01-08 2002-12-30 Verfahren und anordnung zur fremdgaserkennung in optischen abbildungs- und/oder strahlführungssystemen

Publications (1)

Publication Number Publication Date
AU2002367326A1 true AU2002367326A1 (en) 2003-07-24

Family

ID=7711622

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002367326A Abandoned AU2002367326A1 (en) 2002-01-08 2002-12-30 Method and array for the detection of foreign gas in optical imaging and/or beam control systems

Country Status (4)

Country Link
EP (1) EP1463929A1 (de)
AU (1) AU2002367326A1 (de)
DE (1) DE10200349A1 (de)
WO (1) WO2003058213A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10253162B4 (de) * 2002-11-14 2005-11-03 Infineon Technologies Ag Verfahren zum Spülen einer optischen Linse
DE102004029672B4 (de) * 2004-06-11 2007-04-12 Novapax Kunststofftechnik Steiner Gmbh & Co. Kg Vorrichtung zur Bearbeitung von Werkstücken
DE102004034832B4 (de) * 2004-07-19 2014-05-22 Gerhart Schroff Verfahren und Anordnung zur Gasanalyse
CN102066035B (zh) * 2008-06-20 2014-11-12 通快机床两合公司 激光加工设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2820444C2 (de) * 1978-05-10 1982-04-29 Aleksandr Fedorovič Egorov Verfahren und Vorrichtung zur quantitativen Bestimmung des Fremdgas- bzw. -dampfgehaltes in einem Gasgemisch
DE3707622A1 (de) * 1987-03-10 1988-09-22 Pierburg Gmbh Verfahren und vorrichtung zum messen geringer gaskonzentrationen
DE3804134A1 (de) * 1988-02-11 1989-08-24 Felten & Guilleaume Energie Verfahren und einrichtung zum messen der konzentration eines fremdgases in einem gasgemisch unter nutzung eines moires
IT1248992B (it) * 1990-06-25 1995-02-11 Cise Spa Cella optoacustica per la misura di concentrazioni di specie chimiche in fluidi in genere
DE4126885A1 (de) * 1991-08-14 1993-02-18 Michael Rupp Verfahren und vorrichtung zum untersuchen von behaeltnissen auf fremdstoffe
DE4342624C1 (de) * 1993-12-14 1995-06-29 Deutsche Forsch Luft Raumfahrt Vorrichtung zum Erzeugen eines definierten Ozon-Fremdgas-Gemisches und Verfahren zum Bereitstellen eines definierten Ozon-Fremdgas-Gemisches in einem geschlossenen Behälter
DE4427314C2 (de) * 1994-08-02 1997-02-20 Graessle Walter Gmbh Vorrichtung zur Untersuchung von Behältern auf Fremdgase
US5929981A (en) * 1996-06-18 1999-07-27 Ohmeda Inc. System for monitoring contamination of optical elements in a Raman gas analyzer
NL1007970C2 (nl) * 1998-01-07 1999-07-08 Stichting Tech Wetenschapp Werkwijze voor het spectroscopisch bepalen van een vluchtige organische verbinding in een door een zoogdier afgegeven gas.
US6442182B1 (en) * 1999-02-12 2002-08-27 Lambda Physik Ag Device for on-line control of output power of vacuum-UV laser
DE19840345B4 (de) * 1998-09-04 2004-09-30 Dräger Medical AG & Co. KGaA Verfahren und Vorrichtung zum quantitativen Aufspüren eines vorgegebenen Gases

Also Published As

Publication number Publication date
EP1463929A1 (de) 2004-10-06
DE10200349A1 (de) 2003-07-17
WO2003058213A1 (de) 2003-07-17

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase