AU2002364824A1 - Device for etching, rinsing and drying substrates in ultra-clean atmosphere - Google Patents
Device for etching, rinsing and drying substrates in ultra-clean atmosphereInfo
- Publication number
- AU2002364824A1 AU2002364824A1 AU2002364824A AU2002364824A AU2002364824A1 AU 2002364824 A1 AU2002364824 A1 AU 2002364824A1 AU 2002364824 A AU2002364824 A AU 2002364824A AU 2002364824 A AU2002364824 A AU 2002364824A AU 2002364824 A1 AU2002364824 A1 AU 2002364824A1
- Authority
- AU
- Australia
- Prior art keywords
- rinsing
- ultra
- etching
- clean atmosphere
- drying substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0116415A FR2833753B1 (en) | 2001-12-18 | 2001-12-18 | DEVICE FOR ENGRAVING, RINSING, AND DRYING SUBSTRATES IN AN ULTRA-CLEAN ATMOSPHERE |
FR01/16415 | 2001-12-18 | ||
PCT/FR2002/004245 WO2003054930A2 (en) | 2001-12-18 | 2002-12-10 | Device for etching, rinsing and drying substrates in ultra-clean atmosphere |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002364824A1 true AU2002364824A1 (en) | 2003-07-09 |
Family
ID=8870660
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002364824A Abandoned AU2002364824A1 (en) | 2001-12-18 | 2002-12-10 | Device for etching, rinsing and drying substrates in ultra-clean atmosphere |
Country Status (7)
Country | Link |
---|---|
US (1) | US20050016680A1 (en) |
EP (1) | EP1456869A2 (en) |
JP (1) | JP2005513798A (en) |
AU (1) | AU2002364824A1 (en) |
FR (1) | FR2833753B1 (en) |
TW (1) | TW200303578A (en) |
WO (1) | WO2003054930A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050061775A1 (en) * | 2003-09-19 | 2005-03-24 | Kuo-Tang Hsu | Novel design to eliminate wafer sticking |
FR2877766A1 (en) * | 2004-11-09 | 2006-05-12 | Vaco Microtechnologies Sa | Etching, rinsing and drying of substrates in the same tank using a protective liquid to limit sticking phenomena during the fabrication of microsystems |
JP2009141022A (en) * | 2007-12-04 | 2009-06-25 | Tokyo Electron Ltd | Substrate processing apparatus |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0331226A (en) * | 1989-06-28 | 1991-02-12 | Central Glass Co Ltd | Azeotropic mixed solvent composition |
JPH0969509A (en) * | 1995-09-01 | 1997-03-11 | Matsushita Electron Corp | Cleaning/etching/drying system for semiconductor wafer and using method thereof |
JPH11176798A (en) * | 1997-12-08 | 1999-07-02 | Toshiba Corp | Substrate cleaning-drying system and method therefor |
JP3174038B2 (en) * | 1999-01-18 | 2001-06-11 | 東邦化成株式会社 | Substrate drying method and apparatus |
US6514355B1 (en) * | 1999-02-08 | 2003-02-04 | International Business Machines Corporation | Method and apparatus for recovery of semiconductor wafers from a chemical tank |
US6399517B2 (en) * | 1999-03-30 | 2002-06-04 | Tokyo Electron Limited | Etching method and etching apparatus |
FR2797405B1 (en) * | 1999-08-12 | 2001-10-26 | Coillard Sa Ets | ULTRA CLEAN LIQUID RINSING BIN |
US6415803B1 (en) * | 1999-10-06 | 2002-07-09 | Z Cap, L.L.C. | Method and apparatus for semiconductor wafer cleaning with reuse of chemicals |
KR100595302B1 (en) * | 2000-12-30 | 2006-07-03 | 엘지.필립스 엘시디 주식회사 | device for etching glass substrate in fabrication of LCD |
-
2001
- 2001-12-18 FR FR0116415A patent/FR2833753B1/en not_active Expired - Fee Related
-
2002
- 2002-12-09 TW TW091135528A patent/TW200303578A/en unknown
- 2002-12-10 JP JP2003555559A patent/JP2005513798A/en active Pending
- 2002-12-10 EP EP02801111A patent/EP1456869A2/en not_active Withdrawn
- 2002-12-10 US US10/498,250 patent/US20050016680A1/en not_active Abandoned
- 2002-12-10 AU AU2002364824A patent/AU2002364824A1/en not_active Abandoned
- 2002-12-10 WO PCT/FR2002/004245 patent/WO2003054930A2/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
US20050016680A1 (en) | 2005-01-27 |
TW200303578A (en) | 2003-09-01 |
JP2005513798A (en) | 2005-05-12 |
FR2833753B1 (en) | 2004-02-20 |
FR2833753A1 (en) | 2003-06-20 |
EP1456869A2 (en) | 2004-09-15 |
WO2003054930A2 (en) | 2003-07-03 |
WO2003054930A3 (en) | 2004-01-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |