AU2002354464A1 - Method of suckingly holding substrate, and suckingly and holdingly carrying machine using the method - Google Patents

Method of suckingly holding substrate, and suckingly and holdingly carrying machine using the method

Info

Publication number
AU2002354464A1
AU2002354464A1 AU2002354464A AU2002354464A AU2002354464A1 AU 2002354464 A1 AU2002354464 A1 AU 2002354464A1 AU 2002354464 A AU2002354464 A AU 2002354464A AU 2002354464 A AU2002354464 A AU 2002354464A AU 2002354464 A1 AU2002354464 A1 AU 2002354464A1
Authority
AU
Australia
Prior art keywords
suckingly
holdingly
holding substrate
carrying machine
carrying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002354464A
Inventor
Hideaki Funada
Hiroaki Yoshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of AU2002354464A1 publication Critical patent/AU2002354464A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/917—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers control arrangements
AU2002354464A 2001-12-11 2002-12-11 Method of suckingly holding substrate, and suckingly and holdingly carrying machine using the method Abandoned AU2002354464A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001377333 2001-12-11
JP2001-377333 2001-12-11
PCT/JP2002/012957 WO2003049909A1 (en) 2001-12-11 2002-12-11 Method of suckingly holding substrate, and suckingly and holdingly carrying machine using the method

Publications (1)

Publication Number Publication Date
AU2002354464A1 true AU2002354464A1 (en) 2003-06-23

Family

ID=19185332

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002354464A Abandoned AU2002354464A1 (en) 2001-12-11 2002-12-11 Method of suckingly holding substrate, and suckingly and holdingly carrying machine using the method

Country Status (6)

Country Link
JP (1) JP3834038B2 (en)
KR (1) KR20050044315A (en)
CN (1) CN100335242C (en)
AU (1) AU2002354464A1 (en)
TW (1) TW200301211A (en)
WO (1) WO2003049909A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100445049C (en) 2003-11-21 2008-12-24 三星钻石工业股份有限公司 Vacuum suction head, and vacuum suction device and table using the same
TW201134778A (en) * 2010-04-08 2011-10-16 Tae Sung Eng Co Ltd Apparatus for transferring of glass panel
JP2014135332A (en) * 2013-01-09 2014-07-24 Mitsuboshi Diamond Industrial Co Ltd Suction turnover device
CN104465449B (en) * 2013-09-18 2017-08-29 上海微电子装备（集团）股份有限公司 One kind rotation exchanges hand self-adaptive protector and its guard method
CN103753589A (en) * 2013-12-25 2014-04-30 江苏中科机器人科技有限公司 Robot sucker gripper
KR20160042508A (en) * 2014-10-10 2016-04-20 한국미쯔보시다이아몬드공업(주) Vacuum suction head and vacuum suction apparatus using the same
CN106087015B (en) * 2016-07-01 2018-05-15 广州明毅电子机械有限公司 A kind of electroplating device automatic board descending machine
CN106541414A (en) * 2016-10-17 2017-03-29 苏州科维新型包装有限公司 A kind of tong
CN106429432B (en) * 2016-10-31 2019-02-22 高贯铭 A kind of wood plank feeder and method
CN107150350B (en) * 2017-05-25 2019-07-12 东莞质研工业设计服务有限公司 Sucker mounting plate equipped with barrier wall
JP7033303B2 (en) 2018-01-31 2022-03-10 三星ダイヤモンド工業株式会社 Board transfer device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4335980C2 (en) * 1993-10-21 1998-09-10 Wacker Siltronic Halbleitermat Method for positioning a workpiece holder
JPH08264995A (en) * 1995-03-28 1996-10-11 Toshiba Fa Syst Eng Kk Suction head
CN1141813A (en) * 1995-07-28 1997-02-05 徐正泰 Level-keeping table-tennis table
JPH10107495A (en) * 1996-09-26 1998-04-24 Matsushita Electric Ind Co Ltd Device for mounting component
JPH10249771A (en) * 1997-03-05 1998-09-22 Kanto Auto Works Ltd Work carrying device for press machine
JP4048592B2 (en) * 1998-04-03 2008-02-20 ソニー株式会社 Exposure equipment
JP4262389B2 (en) * 2000-06-01 2009-05-13 本田技研工業株式会社 Work removal method

Also Published As

Publication number Publication date
KR20050044315A (en) 2005-05-12
TW200301211A (en) 2003-07-01
CN100335242C (en) 2007-09-05
JPWO2003049909A1 (en) 2005-04-21
JP3834038B2 (en) 2006-10-18
CN1602239A (en) 2005-03-30
WO2003049909A1 (en) 2003-06-19

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase