AU2002334034A1 - Device for detaching substrates and the associated method - Google Patents

Device for detaching substrates and the associated method

Info

Publication number
AU2002334034A1
AU2002334034A1 AU2002334034A AU2002334034A AU2002334034A1 AU 2002334034 A1 AU2002334034 A1 AU 2002334034A1 AU 2002334034 A AU2002334034 A AU 2002334034A AU 2002334034 A AU2002334034 A AU 2002334034A AU 2002334034 A1 AU2002334034 A1 AU 2002334034A1
Authority
AU
Australia
Prior art keywords
associated method
detaching
substrates
detaching substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002334034A
Inventor
Thierry Barge
Bruno Ghyselen
Walter Schwarzenbach
Thuan Truong
Jean-Marc Waechter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec SA filed Critical Soitec SA
Publication of AU2002334034A1 publication Critical patent/AU2002334034A1/en
Abandoned legal-status Critical Current

Links

AU2002334034A 2001-08-07 2002-07-24 Device for detaching substrates and the associated method Abandoned AU2002334034A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR01/10537 2001-08-07

Publications (1)

Publication Number Publication Date
AU2002334034A1 true AU2002334034A1 (en) 2003-02-24

Family

ID=

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