AU2002349782A1 - Cerium-based polish and cerium-based polish slurry - Google Patents

Cerium-based polish and cerium-based polish slurry

Info

Publication number
AU2002349782A1
AU2002349782A1 AU2002349782A AU2002349782A AU2002349782A1 AU 2002349782 A1 AU2002349782 A1 AU 2002349782A1 AU 2002349782 A AU2002349782 A AU 2002349782A AU 2002349782 A AU2002349782 A AU 2002349782A AU 2002349782 A1 AU2002349782 A1 AU 2002349782A1
Authority
AU
Australia
Prior art keywords
cerium
based polish
slurry
polish
polish slurry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002349782A
Inventor
Naoki Bessho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Publication of AU2002349782A1 publication Critical patent/AU2002349782A1/en
Abandoned legal-status Critical Current

Links

AU2002349782A 2001-11-16 2002-11-15 Cerium-based polish and cerium-based polish slurry Abandoned AU2002349782A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-350968 2001-11-16
US60/331,614 2001-11-20

Publications (1)

Publication Number Publication Date
AU2002349782A1 true AU2002349782A1 (en) 2003-05-26

Family

ID=

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