AU2002326175A1 - Polishing slurry comprising silica-coated ceria - Google Patents

Polishing slurry comprising silica-coated ceria

Info

Publication number
AU2002326175A1
AU2002326175A1 AU2002326175A AU2002326175A AU2002326175A1 AU 2002326175 A1 AU2002326175 A1 AU 2002326175A1 AU 2002326175 A AU2002326175 A AU 2002326175A AU 2002326175 A AU2002326175 A AU 2002326175A AU 2002326175 A1 AU2002326175 A1 AU 2002326175A1
Authority
AU
Australia
Prior art keywords
silica
polishing slurry
coated ceria
ceria
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002326175A
Inventor
Yun Ju Cho
Kyoung Jun Kim
Sang Tae Kim
In Yeon Lee
Sang Kyu Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Precision Materials Co Ltd
Original Assignee
Samsung Corning Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Corning Co Ltd filed Critical Samsung Corning Co Ltd
Publication of AU2002326175A1 publication Critical patent/AU2002326175A1/en
Abandoned legal-status Critical Current

Links

AU2002326175A 2001-08-20 2002-08-20 Polishing slurry comprising silica-coated ceria Abandoned AU2002326175A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR2001/49925 2001-08-20
KR2001/76082 2001-12-04

Publications (1)

Publication Number Publication Date
AU2002326175A1 true AU2002326175A1 (en) 2003-03-03

Family

ID=

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