AU2002335217A1 - Projection optical system and exposure apparatus having the projection optical system - Google Patents

Projection optical system and exposure apparatus having the projection optical system

Info

Publication number
AU2002335217A1
AU2002335217A1 AU2002335217A AU2002335217A AU2002335217A1 AU 2002335217 A1 AU2002335217 A1 AU 2002335217A1 AU 2002335217 A AU2002335217 A AU 2002335217A AU 2002335217 A AU2002335217 A AU 2002335217A AU 2002335217 A1 AU2002335217 A1 AU 2002335217A1
Authority
AU
Australia
Prior art keywords
optical system
projection optical
exposure apparatus
projection
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002335217A
Inventor
Yasuhiro Omura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2002335217A1 publication Critical patent/AU2002335217A1/en
Abandoned legal-status Critical Current

Links

AU2002335217A 2001-10-19 2002-10-08 Projection optical system and exposure apparatus having the projection optical system Abandoned AU2002335217A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-321463 2001-10-19

Publications (1)

Publication Number Publication Date
AU2002335217A1 true AU2002335217A1 (en) 2003-05-06

Family

ID=

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