AU2002327605A1 - Hybrid plasma processing apparatus - Google Patents

Hybrid plasma processing apparatus

Info

Publication number
AU2002327605A1
AU2002327605A1 AU2002327605A AU2002327605A AU2002327605A1 AU 2002327605 A1 AU2002327605 A1 AU 2002327605A1 AU 2002327605 A AU2002327605 A AU 2002327605A AU 2002327605 A AU2002327605 A AU 2002327605A AU 2002327605 A1 AU2002327605 A1 AU 2002327605A1
Authority
AU
Australia
Prior art keywords
processing apparatus
plasma processing
hybrid plasma
hybrid
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002327605A
Inventor
Paul Moroz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002327605A1 publication Critical patent/AU2002327605A1/en
Abandoned legal-status Critical Current

Links

AU2002327605A 2001-09-28 2002-09-25 Hybrid plasma processing apparatus Abandoned AU2002327605A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60/325,188 2001-09-28

Publications (1)

Publication Number Publication Date
AU2002327605A1 true AU2002327605A1 (en) 2003-04-14

Family

ID=

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