AU2002233738A1 - Extreme ultraviolet generating device, exposure device using the generating device, and semiconductor manufacturing method - Google Patents

Extreme ultraviolet generating device, exposure device using the generating device, and semiconductor manufacturing method

Info

Publication number
AU2002233738A1
AU2002233738A1 AU2002233738A AU2002233738A AU2002233738A1 AU 2002233738 A1 AU2002233738 A1 AU 2002233738A1 AU 2002233738 A AU2002233738 A AU 2002233738A AU 2002233738 A AU2002233738 A AU 2002233738A AU 2002233738 A1 AU2002233738 A1 AU 2002233738A1
Authority
AU
Australia
Prior art keywords
generating device
semiconductor manufacturing
extreme ultraviolet
exposure
exposure device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002233738A
Inventor
Noriaki Kandaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2002233738A1 publication Critical patent/AU2002233738A1/en
Abandoned legal-status Critical Current

Links

AU2002233738A 2001-02-26 2002-02-26 Extreme ultraviolet generating device, exposure device using the generating device, and semiconductor manufacturing method Abandoned AU2002233738A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-049728 2001-02-26

Publications (1)

Publication Number Publication Date
AU2002233738A1 true AU2002233738A1 (en) 2002-09-12

Family

ID=

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