AU2002233738A1 - Extreme ultraviolet generating device, exposure device using the generating device, and semiconductor manufacturing method
- Google Patents
Extreme ultraviolet generating device, exposure device using the generating device, and semiconductor manufacturing method
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002233738A
Inventor
Noriaki Kandaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
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Filing date
Publication date
Application filed by Nikon CorpfiledCriticalNikon Corp
Publication of AU2002233738A1publicationCriticalpatent/AU2002233738A1/en