AU2002230986A1 - Trench schottky barrier rectifier and method of making the same - Google Patents
Trench schottky barrier rectifier and method of making the sameInfo
- Publication number
- AU2002230986A1 AU2002230986A1 AU2002230986A AU3098602A AU2002230986A1 AU 2002230986 A1 AU2002230986 A1 AU 2002230986A1 AU 2002230986 A AU2002230986 A AU 2002230986A AU 3098602 A AU3098602 A AU 3098602A AU 2002230986 A1 AU2002230986 A1 AU 2002230986A1
- Authority
- AU
- Australia
- Prior art keywords
- making
- same
- schottky barrier
- trench schottky
- barrier rectifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000004888 barrier function Effects 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/095—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being Schottky barrier gate field-effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/6609—Diodes
- H01L29/66143—Schottky diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/737,357 US6420768B1 (en) | 2000-12-15 | 2000-12-15 | Trench schottky barrier rectifier and method of making the same |
US09/737,357 | 2000-12-15 | ||
PCT/US2001/048914 WO2002049118A2 (en) | 2000-12-15 | 2001-12-13 | Trench schottky barrier rectifier and method of making the same |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002230986A1 true AU2002230986A1 (en) | 2002-06-24 |
Family
ID=24963592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002230986A Abandoned AU2002230986A1 (en) | 2000-12-15 | 2001-12-13 | Trench schottky barrier rectifier and method of making the same |
Country Status (9)
Country | Link |
---|---|
US (2) | US6420768B1 (en) |
EP (1) | EP1346417B1 (en) |
JP (1) | JP4440542B2 (en) |
KR (1) | KR100794716B1 (en) |
CN (1) | CN1315197C (en) |
AU (1) | AU2002230986A1 (en) |
DE (1) | DE60118432T2 (en) |
TW (1) | TW511191B (en) |
WO (1) | WO2002049118A2 (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6707127B1 (en) * | 2000-08-31 | 2004-03-16 | General Semiconductor, Inc. | Trench schottky rectifier |
FR2850791B1 (en) * | 2003-01-30 | 2006-01-21 | St Microelectronics Sa | VERTICAL UNIPOLAR COMPONENT |
FR2864345B1 (en) * | 2003-12-18 | 2006-03-31 | St Microelectronics Sa | IMPLEMENTING THE PERIPHERY OF A MOS TRENCH SCHOTTKY DIODE |
CN100424836C (en) * | 2006-12-20 | 2008-10-08 | 鞍山市华辰电力器件有限公司 | Process for producing rectifier tube chip by one time coating source full spreading |
KR100824205B1 (en) * | 2006-12-26 | 2008-04-21 | 매그나칩 반도체 유한회사 | Dmos transistor and manufacturing method thereof |
KR101067953B1 (en) * | 2009-05-12 | 2011-09-26 | 주식회사 케이이씨 | Trench mosfet with embedded schottky barrier diode and manufacture method thereof |
TWI469221B (en) * | 2009-06-26 | 2015-01-11 | Pfc Device Co | Trench schottky diode and manufacturing mehtod thereof |
US9577079B2 (en) | 2009-12-17 | 2017-02-21 | Infineon Technologies Ag | Tunnel field effect transistors |
CN101800252B (en) * | 2010-03-04 | 2012-05-30 | 无锡新洁能功率半导体有限公司 | Groove-shaped Schottky barrier rectifier and manufacture method thereof |
JP2011243948A (en) * | 2010-04-22 | 2011-12-01 | Elpida Memory Inc | Semiconductor device and method of manufacturing the same |
US20130168765A1 (en) * | 2012-01-04 | 2013-07-04 | Vishay General Semiconductor Llc | Trench dmos device with improved termination structure for high voltage applications |
CN103383969B (en) * | 2012-05-06 | 2017-04-26 | 朱江 | Schottky device and manufacturing method thereof |
MY185098A (en) * | 2014-08-29 | 2021-04-30 | Mimos Berhad | A method for manufacturing a large schottky diode |
KR102147640B1 (en) | 2018-04-25 | 2020-08-25 | 심요섭 | Mobile cremation of the Dead Animal |
CN109378312B (en) * | 2018-09-14 | 2020-08-18 | 西安交通大学 | Body-doped diamond-based normally-off field effect transistor and preparation method thereof |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5082795A (en) * | 1986-12-05 | 1992-01-21 | General Electric Company | Method of fabricating a field effect semiconductor device having a self-aligned structure |
US4982260A (en) | 1989-10-02 | 1991-01-01 | General Electric Company | Power rectifier with trenches |
US5262668A (en) | 1992-08-13 | 1993-11-16 | North Carolina State University At Raleigh | Schottky barrier rectifier including schottky barrier regions of differing barrier heights |
US5365102A (en) | 1993-07-06 | 1994-11-15 | North Carolina State University | Schottky barrier rectifier with MOS trench |
US6078090A (en) * | 1997-04-02 | 2000-06-20 | Siliconix Incorporated | Trench-gated Schottky diode with integral clamping diode |
US5612567A (en) | 1996-05-13 | 1997-03-18 | North Carolina State University | Schottky barrier rectifiers and methods of forming same |
US5998833A (en) * | 1998-10-26 | 1999-12-07 | North Carolina State University | Power semiconductor devices having improved high frequency switching and breakdown characteristics |
-
2000
- 2000-12-15 US US09/737,357 patent/US6420768B1/en not_active Expired - Lifetime
-
2001
- 2001-12-12 TW TW090130811A patent/TW511191B/en not_active IP Right Cessation
- 2001-12-13 JP JP2002550323A patent/JP4440542B2/en not_active Expired - Lifetime
- 2001-12-13 AU AU2002230986A patent/AU2002230986A1/en not_active Abandoned
- 2001-12-13 EP EP01991246A patent/EP1346417B1/en not_active Expired - Lifetime
- 2001-12-13 KR KR1020037007940A patent/KR100794716B1/en active IP Right Grant
- 2001-12-13 DE DE60118432T patent/DE60118432T2/en not_active Expired - Lifetime
- 2001-12-13 WO PCT/US2001/048914 patent/WO2002049118A2/en active IP Right Grant
- 2001-12-13 CN CNB018206697A patent/CN1315197C/en not_active Expired - Lifetime
-
2002
- 2002-02-19 US US10/078,994 patent/US6558984B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP4440542B2 (en) | 2010-03-24 |
US6558984B2 (en) | 2003-05-06 |
CN1315197C (en) | 2007-05-09 |
US6420768B1 (en) | 2002-07-16 |
US20020074578A1 (en) | 2002-06-20 |
TW511191B (en) | 2002-11-21 |
WO2002049118A2 (en) | 2002-06-20 |
US20020074613A1 (en) | 2002-06-20 |
KR100794716B1 (en) | 2008-01-15 |
JP2004521487A (en) | 2004-07-15 |
DE60118432D1 (en) | 2006-05-18 |
CN1529912A (en) | 2004-09-15 |
KR20040033283A (en) | 2004-04-21 |
WO2002049118A3 (en) | 2003-04-03 |
DE60118432T2 (en) | 2006-09-21 |
EP1346417B1 (en) | 2006-03-29 |
EP1346417A2 (en) | 2003-09-24 |
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