JP4007115B2
(en)
|
2002-08-09 |
2007-11-14 |
ソニー株式会社 |
Micromachine and manufacturing method thereof
|
US7075160B2
(en)
|
2003-06-04 |
2006-07-11 |
Robert Bosch Gmbh |
Microelectromechanical systems and devices having thin film encapsulated mechanical structures
|
US6995622B2
(en)
|
2004-01-09 |
2006-02-07 |
Robert Bosh Gmbh |
Frequency and/or phase compensated microelectromechanical oscillator
|
EP1640726B1
(en)
|
2004-09-22 |
2009-09-09 |
STMicroelectronics S.r.l. |
Micro-electromechanical structure with self-compensation of the thermal drifts caused by thermomechanical stress
|
EP1645847B1
(en)
*
|
2004-10-08 |
2014-07-02 |
STMicroelectronics Srl |
Temperature compensated micro-electromechanical device and method of temperature compensation in a micro-electromechanical device
|
US20110068834A1
(en)
*
|
2005-01-07 |
2011-03-24 |
Trustees Of Boston University |
Electro-mechanical oscillating devices and associated methods
|
KR20070100942A
(en)
*
|
2005-01-07 |
2007-10-15 |
트르스티스 오브 보스톤 유니버시티 |
Nanomechanical oscillator
|
CN100517541C
(en)
*
|
2005-01-08 |
2009-07-22 |
艾默生网络能源系统有限公司 |
Bistable contactor drive circuit
|
US7319372B2
(en)
*
|
2005-07-15 |
2008-01-15 |
Board Of Trustees Of The Leland Standford Junior University |
In-plane mechanically coupled microelectromechanical tuning fork resonators
|
US7956428B2
(en)
|
2005-08-16 |
2011-06-07 |
Robert Bosch Gmbh |
Microelectromechanical devices and fabrication methods
|
US20070170528A1
(en)
|
2006-01-20 |
2007-07-26 |
Aaron Partridge |
Wafer encapsulated microelectromechanical structure and method of manufacturing same
|
US20070214890A1
(en)
*
|
2006-01-31 |
2007-09-20 |
Ranjan Mukherjee |
MEMS resonator using frequency tuning
|
JP2007274610A
(en)
*
|
2006-03-31 |
2007-10-18 |
Nippon Dempa Kogyo Co Ltd |
Quartz-crystal vibrator, and package thereof
|
US8120133B2
(en)
*
|
2006-09-11 |
2012-02-21 |
Alcatel Lucent |
Micro-actuator and locking switch
|
WO2008036830A2
(en)
*
|
2006-09-20 |
2008-03-27 |
Trustees Of Boston University |
Nano electromechanical integrated-circuit filter
|
WO2008036845A2
(en)
*
|
2006-09-20 |
2008-03-27 |
Trustees Of Boston University |
Nano electromechanical integrated-circuit bank and switch
|
US7545239B2
(en)
*
|
2006-12-20 |
2009-06-09 |
Sitime Inc. |
Serrated MEMS resonators
|
US7545237B2
(en)
*
|
2006-12-20 |
2009-06-09 |
Sitime Inc. |
Serrated MEMS resonators
|
US7545238B2
(en)
*
|
2006-12-20 |
2009-06-09 |
Sitime Inc. |
Serrated MEMS resonators
|
JP2009060173A
(en)
*
|
2007-08-29 |
2009-03-19 |
Seiko Instruments Inc |
Oscillation element and oscillator having the same
|
JP5351166B2
(en)
*
|
2007-09-19 |
2013-11-27 |
ジョージア・テック・リサーチ・コーポレイション |
Single resonator dual frequency transverse-longitudinal mode piezoelectric oscillator and method of operation thereof
|
WO2009048468A1
(en)
|
2007-10-11 |
2009-04-16 |
Sand 9, Inc. |
Signal amplification by hierarchal resonating structures
|
JP4538503B2
(en)
*
|
2008-01-18 |
2010-09-08 |
Okiセミコンダクタ株式会社 |
Resonator
|
WO2009092846A1
(en)
*
|
2008-01-24 |
2009-07-30 |
Vti Technologies, Oy |
A micromechanical resonator
|
US7990229B2
(en)
|
2008-04-01 |
2011-08-02 |
Sand9, Inc. |
Methods and devices for compensating a signal using resonators
|
US8410868B2
(en)
|
2009-06-04 |
2013-04-02 |
Sand 9, Inc. |
Methods and apparatus for temperature control of devices and mechanical resonating structures
|
US8044736B2
(en)
*
|
2008-04-29 |
2011-10-25 |
Sand9, Inc. |
Timing oscillators and related methods
|
US8044737B2
(en)
*
|
2008-04-29 |
2011-10-25 |
Sand9, Inc. |
Timing oscillators and related methods
|
US8476809B2
(en)
|
2008-04-29 |
2013-07-02 |
Sand 9, Inc. |
Microelectromechanical systems (MEMS) resonators and related apparatus and methods
|
US7999635B1
(en)
|
2008-07-29 |
2011-08-16 |
Silicon Laboratories Inc. |
Out-of plane MEMS resonator with static out-of-plane deflection
|
US8111108B2
(en)
|
2008-07-29 |
2012-02-07 |
Sand9, Inc. |
Micromechanical resonating devices and related methods
|
US7888843B2
(en)
|
2008-09-10 |
2011-02-15 |
Georgia Tech Research Corporation |
Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein
|
US20100155883A1
(en)
*
|
2008-10-31 |
2010-06-24 |
Trustees Of Boston University |
Integrated mems and ic systems and related methods
|
WO2010077311A1
(en)
*
|
2008-12-17 |
2010-07-08 |
Sand9, Inc. |
Multi-port mechanical resonating devices and related methods
|
US8689426B2
(en)
|
2008-12-17 |
2014-04-08 |
Sand 9, Inc. |
Method of manufacturing a resonating structure
|
US7939990B2
(en)
|
2009-01-30 |
2011-05-10 |
Integrated Device Technology, Inc. |
Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations
|
US8446227B2
(en)
*
|
2009-02-04 |
2013-05-21 |
Sand 9, Inc. |
Methods and apparatus for tuning devices having mechanical resonators
|
US8395456B2
(en)
|
2009-02-04 |
2013-03-12 |
Sand 9, Inc. |
Variable phase amplifier circuit and method of use
|
US8456250B2
(en)
*
|
2009-02-04 |
2013-06-04 |
Sand 9, Inc. |
Methods and apparatus for tuning devices having resonators
|
US9048811B2
(en)
|
2009-03-31 |
2015-06-02 |
Sand 9, Inc. |
Integration of piezoelectric materials with substrates
|
WO2010147772A1
(en)
|
2009-06-19 |
2010-12-23 |
Georgia Tech Research Corporation |
Methods of forming micromechanical resonators having high density trench arrays therein that provide passive temperature compensation
|
US8106724B1
(en)
|
2009-07-23 |
2012-01-31 |
Integrated Device Technologies, Inc. |
Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor
|
US8736388B2
(en)
|
2009-12-23 |
2014-05-27 |
Sand 9, Inc. |
Oscillators having arbitrary frequencies and related systems and methods
|
US8704604B2
(en)
|
2009-12-23 |
2014-04-22 |
Sand 9, Inc. |
Oscillators having arbitrary frequencies and related systems and methods
|
US8604888B2
(en)
|
2009-12-23 |
2013-12-10 |
Sand 9, Inc. |
Oscillators having arbitrary frequencies and related systems and methods
|
FI124103B
(en)
*
|
2010-02-22 |
2014-03-14 |
Murata Electronics Oy |
Improved micromechanical construction for a resonator
|
WO2011109382A1
(en)
|
2010-03-01 |
2011-09-09 |
Sand9, Inc. |
Microelectromechanical gyroscopes and related apparatus and methods
|
US20110221312A1
(en)
*
|
2010-03-12 |
2011-09-15 |
Seiko Epson Corporation |
Vibrator element, vibrator, sensor, and electronic apparatus
|
US8833161B2
(en)
|
2010-04-20 |
2014-09-16 |
Sand 9, Inc. |
Microelectromechanical gyroscopes and related apparatus and methods
|
WO2012040043A1
(en)
|
2010-09-20 |
2012-03-29 |
Sand9, Inc. |
Resonant sensing using extensional modes of a plate
|
US8501515B1
(en)
|
2011-02-25 |
2013-08-06 |
Integrated Device Technology Inc. |
Methods of forming micro-electromechanical resonators using passive compensation techniques
|
JP2012209885A
(en)
|
2011-03-30 |
2012-10-25 |
Seiko Epson Corp |
Mems vibrator and oscillator
|
US8471641B2
(en)
|
2011-06-30 |
2013-06-25 |
Silicon Laboratories Inc. |
Switchable electrode for power handling
|
US8638178B1
(en)
*
|
2011-09-30 |
2014-01-28 |
Integrated Device Technology Inc. |
Methods of testing packaged thin-film piezoelectric-on-semiconductor microelectromechanical resonators having hermetic seals
|
US8610336B1
(en)
|
2011-09-30 |
2013-12-17 |
Integrated Device Technology Inc |
Microelectromechanical resonators having resistive heating elements therein configured to provide frequency tuning through convective heating of resonator bodies
|
US9383208B2
(en)
|
2011-10-13 |
2016-07-05 |
Analog Devices, Inc. |
Electromechanical magnetometer and applications thereof
|
US8427249B1
(en)
*
|
2011-10-19 |
2013-04-23 |
The United States Of America As Represented By The Secretary Of The Navy |
Resonator with reduced acceleration sensitivity and phase noise using time domain switch
|
US9402137B2
(en)
|
2011-11-14 |
2016-07-26 |
Infineon Technologies Ag |
Sound transducer with interdigitated first and second sets of comb fingers
|
JP2014011531A
(en)
*
|
2012-06-28 |
2014-01-20 |
Seiko Epson Corp |
Vibration device, electronic apparatus
|
SE537998C2
(en)
|
2014-05-09 |
2016-02-02 |
Per-Axel Uhlin |
Magnetic vibration sensor
|
JP6627209B2
(en)
|
2014-09-09 |
2020-01-08 |
セイコーエプソン株式会社 |
Vibrating element, vibrator, oscillator, electronic equipment and moving object
|
RU2569409C1
(en)
*
|
2014-09-10 |
2015-11-27 |
Открытое акционерное общество "Научно-исследовательский институт физических измерений" |
Tuning-fork measuring transformer of mechanical stresses and deformations
|
US11305981B2
(en)
|
2018-06-29 |
2022-04-19 |
Stathera Ip Holdings Inc. |
Dual-output microelectromechanical resonator and method of manufacture and operation thereof
|
DE102021202573B3
(en)
|
2021-03-16 |
2022-07-07 |
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein |
MEMS TRANSDUCER WITH CUTS AND PROJECTIONS
|
WO2022258085A1
(en)
|
2021-07-13 |
2022-12-15 |
Ceske Vysoke Uceni Technicke V Praze |
A method of examining a sample in a microscope equipped with at least one scanning tunneling tip
|
TWI822583B
(en)
*
|
2023-02-08 |
2023-11-11 |
鈺太科技股份有限公司 |
Resonance structure in micro electro mechanical system
|