AU2001286550A1 - Resonator with preferred oscillation mode - Google Patents

Resonator with preferred oscillation mode

Info

Publication number
AU2001286550A1
AU2001286550A1 AU2001286550A AU8655001A AU2001286550A1 AU 2001286550 A1 AU2001286550 A1 AU 2001286550A1 AU 2001286550 A AU2001286550 A AU 2001286550A AU 8655001 A AU8655001 A AU 8655001A AU 2001286550 A1 AU2001286550 A1 AU 2001286550A1
Authority
AU
Australia
Prior art keywords
resonator
oscillation mode
preferred oscillation
preferred
mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001286550A
Inventor
Jonathan J Bernstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Charles Stark Draper Laboratory Inc
Original Assignee
Charles Stark Draper Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Charles Stark Draper Laboratory Inc filed Critical Charles Stark Draper Laboratory Inc
Publication of AU2001286550A1 publication Critical patent/AU2001286550A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
AU2001286550A 2000-08-28 2001-08-20 Resonator with preferred oscillation mode Abandoned AU2001286550A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/649,290 US6455980B1 (en) 2000-08-28 2000-08-28 Resonator with preferred oscillation mode
US09649290 2000-08-28
PCT/US2001/025942 WO2002019520A2 (en) 2000-08-28 2001-08-20 Resonator with preferred oscillation mode

Publications (1)

Publication Number Publication Date
AU2001286550A1 true AU2001286550A1 (en) 2002-03-13

Family

ID=24604182

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001286550A Abandoned AU2001286550A1 (en) 2000-08-28 2001-08-20 Resonator with preferred oscillation mode

Country Status (3)

Country Link
US (2) US6455980B1 (en)
AU (1) AU2001286550A1 (en)
WO (1) WO2002019520A2 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3926633B2 (en) * 2001-06-22 2007-06-06 沖電気工業株式会社 SAW device and manufacturing method thereof
US6930364B2 (en) * 2001-09-13 2005-08-16 Silicon Light Machines Corporation Microelectronic mechanical system and methods
US7943412B2 (en) * 2001-12-10 2011-05-17 International Business Machines Corporation Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters
US6877209B1 (en) 2002-08-28 2005-04-12 Silicon Light Machines, Inc. Method for sealing an active area of a surface acoustic wave device on a wafer
US6846423B1 (en) 2002-08-28 2005-01-25 Silicon Light Machines Corporation Wafer-level seal for non-silicon-based devices
US6822929B1 (en) * 2003-06-25 2004-11-23 Sandia Corporation Micro acoustic spectrum analyzer
US7109633B2 (en) * 2003-09-30 2006-09-19 Charles Stark Draper Laboratory, Inc. Flexural plate wave sensor
WO2005099088A1 (en) * 2004-03-26 2005-10-20 Cypress Semiconductor Corp. Integrated circuit having one or more conductive devices formed over a saw and/or mems device
US9164051B2 (en) 2005-04-06 2015-10-20 Bioscale, Inc. Electrically responsive device
WO2006107961A2 (en) * 2005-04-06 2006-10-12 Bioscale, Inc. Electrically responsive device
US7648844B2 (en) 2005-05-02 2010-01-19 Bioscale, Inc. Method and apparatus for detection of analyte using an acoustic device
US7749445B2 (en) 2005-05-02 2010-07-06 Bioscale, Inc. Method and apparatus for analyzing bioprocess fluids
KR20080113074A (en) * 2006-04-21 2008-12-26 바이오스케일, 아이엔씨. Microfabricated devices and method for fabricating microfabricated devices
US8354280B2 (en) 2007-09-06 2013-01-15 Bioscale, Inc. Reusable detection surfaces and methods of using same
WO2011053253A1 (en) * 2009-10-30 2011-05-05 Agency For Science, Technology And Research Surface acoustic wave resonator
EP2398145A1 (en) * 2010-06-18 2011-12-21 Stichting IMEC Nederland Microresonator, resonator sensor with such microresonator, sensor array comprising at least two such microresonators and method for making such a microresonator

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3634787A (en) * 1968-01-23 1972-01-11 Westinghouse Electric Corp Electromechanical tuning apparatus particularly for microelectronic components
JPS5622323Y2 (en) 1976-05-24 1981-05-26
US4294105A (en) * 1980-04-08 1981-10-13 Exxon Research & Engineering Co. Mass sensing element
US4517486A (en) * 1984-02-21 1985-05-14 The United States Of America As Represented By The Secretary Of The Army Monolitic band-pass filter using piezoelectric cantilevers
JPH0379113A (en) * 1989-08-23 1991-04-04 Seiko Electronic Components Ltd Support structure for crystal resonator
US5285127A (en) 1989-11-30 1994-02-08 New Sd, Inc. Single mode resonator and method
US5956292A (en) * 1995-04-13 1999-09-21 The Charles Stark Draper Laboratory, Inc. Monolithic micromachined piezoelectric acoustic transducer and transducer array and method of making same
AU2712597A (en) * 1997-05-13 1998-12-08 Mitsubishi Denki Kabushiki Kaisha Piezoelectric thin film device
US6114800A (en) * 1997-10-01 2000-09-05 Murata Manufacturing Co., Ltd Piezoelectric component
US6249073B1 (en) * 1999-01-14 2001-06-19 The Regents Of The University Of Michigan Device including a micromechanical resonator having an operating frequency and method of extending same

Also Published As

Publication number Publication date
US20020185934A1 (en) 2002-12-12
WO2002019520A2 (en) 2002-03-07
WO2002019520A3 (en) 2002-06-06
US6455980B1 (en) 2002-09-24

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