AU2001296849A1 - Fluid distribution system and process, and semiconductor fabrication facility utilizing same - Google Patents

Fluid distribution system and process, and semiconductor fabrication facility utilizing same

Info

Publication number
AU2001296849A1
AU2001296849A1 AU2001296849A AU9684901A AU2001296849A1 AU 2001296849 A1 AU2001296849 A1 AU 2001296849A1 AU 2001296849 A AU2001296849 A AU 2001296849A AU 9684901 A AU9684901 A AU 9684901A AU 2001296849 A1 AU2001296849 A1 AU 2001296849A1
Authority
AU
Australia
Prior art keywords
distribution system
fluid distribution
semiconductor fabrication
fabrication facility
utilizing same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001296849A
Inventor
Thomas H. Baum
George R Brandes
Michael A. Tischler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Publication of AU2001296849A1 publication Critical patent/AU2001296849A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • B01D53/053—Pressure swing adsorption with storage or buffer vessel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/104—Alumina
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B01D2253/1085—Zeolites characterized by a silicon-aluminium ratio
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/304—Linear dimensions, e.g. particle shape, diameter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/308—Pore size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • B01D2259/40098—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating with other heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
AU2001296849A 2000-08-10 2001-08-06 Fluid distribution system and process, and semiconductor fabrication facility utilizing same Abandoned AU2001296849A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/635,880 US6500238B1 (en) 2000-08-10 2000-08-10 Fluid storage and dispensing system
US09635880 2000-08-10
PCT/US2001/041564 WO2002011860A1 (en) 2000-08-10 2001-08-06 Fluid storage and dispensing system

Publications (1)

Publication Number Publication Date
AU2001296849A1 true AU2001296849A1 (en) 2002-02-18

Family

ID=24549496

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001296849A Abandoned AU2001296849A1 (en) 2000-08-10 2001-08-06 Fluid distribution system and process, and semiconductor fabrication facility utilizing same

Country Status (3)

Country Link
US (1) US6500238B1 (en)
AU (1) AU2001296849A1 (en)
WO (1) WO2002011860A1 (en)

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* Cited by examiner, † Cited by third party
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US6991671B2 (en) 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
US8002880B2 (en) 2002-12-10 2011-08-23 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US6743278B1 (en) * 2002-12-10 2004-06-01 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US7029517B2 (en) * 2003-11-06 2006-04-18 General Electric Company Devices and methods for hydrogen storage and generation
WO2006055030A2 (en) * 2004-04-19 2006-05-26 The Curators of the University of Missouri Office of Technology and Special Projects Method of separating and storing volatile gases
US7303607B2 (en) * 2004-06-14 2007-12-04 Air Products And Chemicals, Inc. Liquid media containing Lewis acidic reactive compounds for storage and delivery of Lewis basic gases
US7396381B2 (en) * 2004-07-08 2008-07-08 Air Products And Chemicals, Inc. Storage and delivery systems for gases held in liquid medium
US7648682B2 (en) * 2004-07-08 2010-01-19 Air Products And Chemicals, Inc. Wick systems for complexed gas technology
WO2006135378A2 (en) * 2004-07-27 2006-12-21 University Of North Texas Method and apparatus for hydrogen production from greenhouse gas saturated carbon nanotubes and synthesis of carbon nanostructures therefrom
US7404845B2 (en) 2004-09-23 2008-07-29 Air Products And Chemicals, Inc. Ionic liquid based mixtures for gas storage and delivery
US7563308B2 (en) 2004-09-23 2009-07-21 Air Products And Chemicals, Inc. Ionic liquid based mixtures for gas storage and delivery
US7282084B2 (en) * 2004-10-15 2007-10-16 Air Products And Chemicals, Inc. Liquid media containing Lewis basic reactive compounds for storage and delivery of Lewis acidic gases
US7955797B2 (en) 2004-10-25 2011-06-07 Advanced Technology Materials, Inc. Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
US20060115591A1 (en) * 2004-11-29 2006-06-01 Olander W K Pentaborane(9) storage and delivery
TW200722344A (en) * 2005-08-22 2007-06-16 Advanced Tech Materials Material containment system
CN103122255B (en) * 2006-01-30 2016-01-20 诚实公司 For fluid storage/distribution carbonaceous material and utilize its apparatus and method
US7736420B2 (en) 2006-05-19 2010-06-15 Air Products And Chemicals, Inc. Contact methods for formation of Lewis gas/liquid systems and recovery of Lewis gas therefrom
US7740690B2 (en) * 2007-03-29 2010-06-22 Praxair Technology, Inc. Methods and systems for purifying gases
CN103329252B (en) * 2010-11-30 2016-06-15 恩特格里斯公司 Including the Ion implanter system of long-range dopant source and the method that comprises this system
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
WO2013181295A1 (en) 2012-05-29 2013-12-05 Advanced Technology Materials, Inc. Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent
WO2014134298A1 (en) * 2013-02-27 2014-09-04 Nol-Tec Systems, Inc. System for utilizing multiple vessels for continuous injection of material into a convey line
WO2015027099A1 (en) 2013-08-21 2015-02-26 Nol-Tec Systems, Inc. Dispensing assembly with continuous loss of weight feed control
US9075037B2 (en) * 2013-09-11 2015-07-07 King Fahd University Of Petroleum And Minerals Micro-solid phase extraction of haloacetic acids
US10207878B1 (en) 2016-03-31 2019-02-19 Nol-Tec Systems, Inc. Pneumatic conveying system utilizing a pressured hopper with intermittent volumetric feed control
US10883947B2 (en) * 2017-11-01 2021-01-05 Palo Alto Research Center Incorporated Sorbent based gas concentration monitor

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US2747681A (en) * 1951-09-05 1956-05-29 British Oxygen Co Ltd Regeneration of adsorbent units
US3037338A (en) * 1958-12-30 1962-06-05 Union Carbide Corp Method for molecular sieve adsorption and desorption
US3077712A (en) * 1961-07-14 1963-02-19 Milleron Norman Vacuum trap and valve combination
US4038050A (en) * 1974-11-27 1977-07-26 W. R. Grace & Co. Electrical sensing and regenerating system for molecular sieve driers
US4312640A (en) * 1979-03-12 1982-01-26 Pall Corporation Heat-reactivatable adsorbent gas fractionator and process
US4323640A (en) 1980-11-05 1982-04-06 Corning Glass Works Positive imaging method using doped silver halide medium
US4744221A (en) 1987-06-29 1988-05-17 Olin Corporation Zeolite based arsine storage and delivery system
US5308457A (en) * 1991-04-05 1994-05-03 Catalytica, Inc. Self-contained system for controlling gaseous emissions from dilute organic sources and a process for using that system
US5429665A (en) * 1993-10-27 1995-07-04 Botich; Leon A. Apparatus for introducing microwave energy to desiccant for regenerating the same and method for using the same
US5509956A (en) * 1994-07-08 1996-04-23 Horizon Holdings, Inc. Regenerative apparatus for recovery of volatiles
US5704967A (en) 1995-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US5707424A (en) 1994-10-13 1998-01-13 Advanced Technology Materials, Inc. Process system with integrated gas storage and delivery unit
US5518528A (en) 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US6083298A (en) * 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US5761910A (en) 1996-05-20 1998-06-09 Advanced Technology Materials, Inc. High capacity gas storage and dispensing system
US5837027A (en) * 1996-05-20 1998-11-17 Advanced Technology Materials, Inc. Manufacturing process for gas source and dispensing systems
US5993766A (en) * 1996-05-20 1999-11-30 Advanced Technology Materials, Inc. Gas source and dispensing system
US5827355A (en) * 1997-01-31 1998-10-27 Lockheed Martin Energy Research Corporation Carbon fiber composite molecular sieve electrically regenerable air filter media
US6110257A (en) * 1997-05-16 2000-08-29 Advanced Technology Materials, Inc. Low concentration gas delivery system utilizing sorbent-based gas storage and delivery system
DE19727376C2 (en) * 1997-06-27 2002-07-18 Daimler Chrysler Ag Process for the adsorption of organic substances in the air
US5980608A (en) 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system

Also Published As

Publication number Publication date
US6500238B1 (en) 2002-12-31
WO2002011860A1 (en) 2002-02-14

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