AU2001267248A1 - Storage device, especially for the intermediate storage of test wafers - Google Patents

Storage device, especially for the intermediate storage of test wafers

Info

Publication number
AU2001267248A1
AU2001267248A1 AU2001267248A AU6724801A AU2001267248A1 AU 2001267248 A1 AU2001267248 A1 AU 2001267248A1 AU 2001267248 A AU2001267248 A AU 2001267248A AU 6724801 A AU6724801 A AU 6724801A AU 2001267248 A1 AU2001267248 A1 AU 2001267248A1
Authority
AU
Australia
Prior art keywords
storage
test wafers
storage device
intermediate storage
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001267248A
Inventor
Jakob Blattner
Federici Rudy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brooks PRI Automation Switzerland GmbH
Original Assignee
Tec Sem AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tec Sem AG filed Critical Tec Sem AG
Publication of AU2001267248A1 publication Critical patent/AU2001267248A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
AU2001267248A 2000-07-09 2001-07-06 Storage device, especially for the intermediate storage of test wafers Abandoned AU2001267248A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH1353/00 2000-07-09
CH13532000 2000-07-09
PCT/CH2001/000422 WO2002005320A1 (en) 2000-07-09 2001-07-06 Storage device, especially for the intermediate storage of test wafers

Publications (1)

Publication Number Publication Date
AU2001267248A1 true AU2001267248A1 (en) 2002-01-21

Family

ID=4565404

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001267248A Abandoned AU2001267248A1 (en) 2000-07-09 2001-07-06 Storage device, especially for the intermediate storage of test wafers

Country Status (6)

Country Link
US (1) US20040026694A1 (en)
EP (1) EP1299899B1 (en)
KR (1) KR100897070B1 (en)
AU (1) AU2001267248A1 (en)
DE (1) DE50115207D1 (en)
WO (1) WO2002005320A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8292563B2 (en) 2004-06-28 2012-10-23 Brooks Automation, Inc. Nonproductive wafer buffer module for substrate processing apparatus
DE102006028057B4 (en) * 2005-10-17 2017-07-20 Dynamic Microsystems Semiconductor Equipment Gmbh Device for storing contamination-sensitive, plate-shaped objects, in particular for storing semiconductor wafers
JP4688637B2 (en) 2005-10-28 2011-05-25 東京エレクトロン株式会社 Substrate processing apparatus, batch knitting apparatus, batch knitting method, and batch knitting program
DE102005052757B4 (en) * 2005-11-04 2007-07-26 Vistec Semiconductor Systems Gmbh Device for measuring the position of an object with a laser interferometer system
US7896602B2 (en) * 2006-06-09 2011-03-01 Lutz Rebstock Workpiece stocker with circular configuration
US20080112787A1 (en) 2006-11-15 2008-05-15 Dynamic Micro Systems Removable compartments for workpiece stocker
US9449862B2 (en) 2011-06-03 2016-09-20 Tel Nexx, Inc. Parallel single substrate processing system
KR101677375B1 (en) * 2015-07-06 2016-11-18 주식회사 포스코 Sample inserting apparatus for electroplating simulator
CN113299586B (en) * 2021-07-28 2021-10-19 四川通妙科技有限公司 Chip wafer temporary storage device and chip wafer temporary storage and pickup method

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US4532970A (en) * 1983-09-28 1985-08-06 Hewlett-Packard Company Particle-free dockable interface for integrated circuit processing
US4534389A (en) * 1984-03-29 1985-08-13 Hewlett-Packard Company Interlocking door latch for dockable interface for integrated circuit processing
US5255251A (en) * 1990-10-24 1993-10-19 International Data Engineering, Inc. Optical disc cartridge handling apparatus with removable magazine
JPH0727442B2 (en) * 1991-09-11 1995-03-29 インターナショナル・ビジネス・マシーンズ・コーポレイション Method for improving hit rate in data storage device hierarchical structure and apparatus therefor
DE4319551A1 (en) * 1993-06-12 1994-12-15 Nsm Ag Record player
US6178153B1 (en) * 1994-02-18 2001-01-23 Hyundai Electronics Ind. Co., Ltd. Compact disk auto-exchanger and method thereof
US6034927A (en) * 1994-10-20 2000-03-07 Sony Corporation Carriage for optical disk storage and retrieval array
JP3654684B2 (en) * 1995-05-01 2005-06-02 東京エレクトロン株式会社 Processing method and processing apparatus
US5870357A (en) * 1996-06-10 1999-02-09 Cdlogic, Inc. Multidisk CD-storage, retrieval, and playback system including an elevator system having a gripper and front and rear pushers
US6029230A (en) * 1996-10-22 2000-02-22 International Business Machines Corporation Data storage library with media destaging and prestaging for improved response time
US5912873A (en) * 1997-06-18 1999-06-15 Multidisc Technologies Compact disc transporter with dual transport sites
US6579052B1 (en) * 1997-07-11 2003-06-17 Asyst Technologies, Inc. SMIF pod storage, delivery and retrieval system
US6099230A (en) * 1998-03-04 2000-08-08 Beckman Coulter, Inc. Automated labware storage system
JP3430015B2 (en) * 1998-05-20 2003-07-28 東京エレクトロン株式会社 Reliability test system
US6064544A (en) * 1998-06-16 2000-05-16 Nec Corporation Information medium conveying method and apparatus
CH693726A5 (en) * 1998-07-09 2003-12-31 Tec Sem Ag Apparatus and method for providing a full wafer stack.
NL1010317C2 (en) * 1998-10-14 2000-05-01 Asm Int Sorting / storage device for wafers and method for handling them.
US6532428B1 (en) * 1999-10-07 2003-03-11 Advanced Micro Devices, Inc. Method and apparatus for automatic calibration of critical dimension metrology tool
US6817823B2 (en) * 2001-09-11 2004-11-16 Marian Corporation Method, device and system for semiconductor wafer transfer
US6714001B2 (en) * 2001-11-28 2004-03-30 Winbond Electronics Corporation Dispatching method of manufacturing integrated circuit
JP2004103761A (en) * 2002-09-09 2004-04-02 Renesas Technology Corp Semiconductor device manufacturing line

Also Published As

Publication number Publication date
DE50115207D1 (en) 2009-12-17
US20040026694A1 (en) 2004-02-12
KR100897070B1 (en) 2009-05-14
EP1299899A1 (en) 2003-04-09
EP1299899B1 (en) 2009-11-04
KR20030036595A (en) 2003-05-09
WO2002005320A1 (en) 2002-01-17

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