AU2001233046A1 - Electronically switching latching micro-magnetic relay and method of operating same - Google Patents

Electronically switching latching micro-magnetic relay and method of operating same

Info

Publication number
AU2001233046A1
AU2001233046A1 AU2001233046A AU3304601A AU2001233046A1 AU 2001233046 A1 AU2001233046 A1 AU 2001233046A1 AU 2001233046 A AU2001233046 A AU 2001233046A AU 3304601 A AU3304601 A AU 3304601A AU 2001233046 A1 AU2001233046 A1 AU 2001233046A1
Authority
AU
Australia
Prior art keywords
relay
state
cantilever
operating same
magnetic relay
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001233046A
Other languages
English (en)
Inventor
Meichun Ruan
Jun Shen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arizona State University ASU
Original Assignee
University of Arizona
Arizona State University ASU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Arizona, Arizona State University ASU filed Critical University of Arizona
Publication of AU2001233046A1 publication Critical patent/AU2001233046A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H67/00—Electrically-operated selector switches
    • H01H67/22—Switches without multi-position wipers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Relay Circuits (AREA)
  • Switches With Compound Operations (AREA)
AU2001233046A 2000-02-02 2001-01-26 Electronically switching latching micro-magnetic relay and method of operating same Abandoned AU2001233046A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09496446 2000-02-02
US09/496,446 US6469602B2 (en) 1999-09-23 2000-02-02 Electronically switching latching micro-magnetic relay and method of operating same
PCT/US2001/002722 WO2001057899A1 (fr) 2000-02-02 2001-01-26 Relais micromagnetique electronique a verrouillage de commutation et procede de fonctionnement de ce relais

Publications (1)

Publication Number Publication Date
AU2001233046A1 true AU2001233046A1 (en) 2001-08-14

Family

ID=23972649

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001233046A Abandoned AU2001233046A1 (en) 2000-02-02 2001-01-26 Electronically switching latching micro-magnetic relay and method of operating same

Country Status (11)

Country Link
US (2) US6469602B2 (fr)
EP (1) EP1254473B1 (fr)
JP (1) JP2003522377A (fr)
KR (1) KR100474536B1 (fr)
CN (1) CN1419702A (fr)
AT (1) ATE304218T1 (fr)
AU (1) AU2001233046A1 (fr)
DE (1) DE60113233T2 (fr)
DK (1) DK1254473T3 (fr)
ES (1) ES2249409T3 (fr)
WO (1) WO2001057899A1 (fr)

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Also Published As

Publication number Publication date
KR20030028451A (ko) 2003-04-08
US6469602B2 (en) 2002-10-22
JP2003522377A (ja) 2003-07-22
EP1254473A1 (fr) 2002-11-06
ES2249409T3 (es) 2006-04-01
WO2001057899A1 (fr) 2001-08-09
ATE304218T1 (de) 2005-09-15
DK1254473T3 (da) 2006-01-23
US20020050880A1 (en) 2002-05-02
DE60113233T2 (de) 2007-01-18
EP1254473B1 (fr) 2005-09-07
KR100474536B1 (ko) 2005-03-10
DE60113233D1 (de) 2005-10-13
CN1419702A (zh) 2003-05-21
US6469603B1 (en) 2002-10-22

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