AU2001232257A1 - Reflection/refraction optical system - Google Patents
Reflection/refraction optical systemInfo
- Publication number
- AU2001232257A1 AU2001232257A1 AU2001232257A AU3225701A AU2001232257A1 AU 2001232257 A1 AU2001232257 A1 AU 2001232257A1 AU 2001232257 A AU2001232257 A AU 2001232257A AU 3225701 A AU3225701 A AU 3225701A AU 2001232257 A1 AU2001232257 A1 AU 2001232257A1
- Authority
- AU
- Australia
- Prior art keywords
- reflection
- optical system
- refraction optical
- refraction
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0892—Catadioptric systems specially adapted for the UV
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0804—Catadioptric systems using two curved mirrors
- G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000-31285 | 2000-02-09 | ||
JP2000031285A JP2005233979A (ja) | 2000-02-09 | 2000-02-09 | 反射屈折光学系 |
PCT/JP2001/000912 WO2001059502A1 (fr) | 2000-02-09 | 2001-02-09 | Systeme optique reflechissant/refringent |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001232257A1 true AU2001232257A1 (en) | 2001-08-20 |
Family
ID=18556059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001232257A Abandoned AU2001232257A1 (en) | 2000-02-09 | 2001-02-09 | Reflection/refraction optical system |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2005233979A (fr) |
AU (1) | AU2001232257A1 (fr) |
WO (1) | WO2001059502A1 (fr) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6600608B1 (en) | 1999-11-05 | 2003-07-29 | Carl-Zeiss-Stiftung | Catadioptric objective comprising two intermediate images |
KR101484435B1 (ko) | 2003-04-09 | 2015-01-19 | 가부시키가이샤 니콘 | 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
JP4706171B2 (ja) * | 2003-10-24 | 2011-06-22 | 株式会社ニコン | 反射屈折投影光学系、露光装置及び露光方法 |
EP2722703A3 (fr) | 2003-05-06 | 2014-07-23 | Nikon Corporation | Système de projection optique, système et procédé d'exposition |
US7348575B2 (en) | 2003-05-06 | 2008-03-25 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
TWI282487B (en) * | 2003-05-23 | 2007-06-11 | Canon Kk | Projection optical system, exposure apparatus, and device manufacturing method |
US8208198B2 (en) | 2004-01-14 | 2012-06-26 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
WO2006005547A1 (fr) * | 2004-07-14 | 2006-01-19 | Carl Zeiss Smt Ag | Objectif de projection catadioptrique |
TWI609409B (zh) | 2003-10-28 | 2017-12-21 | 尼康股份有限公司 | 照明光學裝置、曝光裝置、曝光方法以及元件製造方法 |
TWI385414B (zh) | 2003-11-20 | 2013-02-11 | 尼康股份有限公司 | 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法 |
US20080151364A1 (en) | 2004-01-14 | 2008-06-26 | Carl Zeiss Smt Ag | Catadioptric projection objective |
TWI505329B (zh) | 2004-02-06 | 2015-10-21 | 尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法以及元件製造方法 |
CN100483174C (zh) | 2004-05-17 | 2009-04-29 | 卡尔蔡司Smt股份公司 | 具有中间图像的反射折射投影物镜 |
JP5600128B2 (ja) * | 2004-07-14 | 2014-10-01 | カール・ツァイス・エスエムティー・ゲーエムベーハー | カタディオプトリック投影対物系 |
KR101171131B1 (ko) | 2004-07-14 | 2012-08-07 | 칼 짜이스 에스엠티 게엠베하 | 반사굴절식 투영 대물렌즈 |
US7324185B2 (en) | 2005-03-04 | 2008-01-29 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US8248577B2 (en) | 2005-05-03 | 2012-08-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
EP2660853B1 (fr) | 2005-05-12 | 2017-07-05 | Nikon Corporation | Système de projection optique, système d'exposition et procédé d'exposition |
KR20080091182A (ko) * | 2006-01-30 | 2008-10-09 | 가부시키가이샤 니콘 | 반사 굴절 결상 광학계, 노광 장치 및 디바이스의 제조방법 |
US7738188B2 (en) | 2006-03-28 | 2010-06-15 | Carl Zeiss Smt Ag | Projection objective and projection exposure apparatus including the same |
US7920338B2 (en) | 2006-03-28 | 2011-04-05 | Carl Zeiss Smt Gmbh | Reduction projection objective and projection exposure apparatus including the same |
DE102008001216A1 (de) * | 2007-04-18 | 2008-10-23 | Carl Zeiss Smt Ag | Projektionsobjektiv für die Mikrolithographie |
US8451427B2 (en) | 2007-09-14 | 2013-05-28 | Nikon Corporation | Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method |
JP5267029B2 (ja) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | 照明光学装置、露光装置及びデバイスの製造方法 |
EP2179330A1 (fr) | 2007-10-16 | 2010-04-28 | Nikon Corporation | Système optique d'éclairage, appareil d'exposition et procédé de fabrication de dispositif |
KR101546987B1 (ko) | 2007-10-16 | 2015-08-24 | 가부시키가이샤 니콘 | 조명 광학 시스템, 노광 장치 및 디바이스 제조 방법 |
US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
WO2009145048A1 (fr) | 2008-05-28 | 2009-12-03 | 株式会社ニコン | Dispositif et procédé d'inspection pour modulateur spatial de lumière, système optique d'éclairage, procédé de réglage de ce système optique d'éclairage, dispositif d'exposition et procédé de fabrication de dispositif |
JP2011049571A (ja) * | 2010-09-24 | 2011-03-10 | Nikon Corp | 反射屈折投影光学系、露光装置及び露光方法 |
JP2012073632A (ja) * | 2011-11-18 | 2012-04-12 | Nikon Corp | 反射屈折投影光学系、露光装置及び露光方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3635684B2 (ja) * | 1994-08-23 | 2005-04-06 | 株式会社ニコン | 反射屈折縮小投影光学系、反射屈折光学系、並びに投影露光方法及び装置 |
JP3352325B2 (ja) * | 1996-05-21 | 2002-12-03 | キヤノン株式会社 | 走査露光装置及びそれを用いたデバイスの製造方法 |
-
2000
- 2000-02-09 JP JP2000031285A patent/JP2005233979A/ja active Pending
-
2001
- 2001-02-09 WO PCT/JP2001/000912 patent/WO2001059502A1/fr active Application Filing
- 2001-02-09 AU AU2001232257A patent/AU2001232257A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2005233979A (ja) | 2005-09-02 |
WO2001059502A1 (fr) | 2001-08-16 |
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