AU1301801A - Illuminator, aligner, and method for fabricating device - Google Patents
Illuminator, aligner, and method for fabricating deviceInfo
- Publication number
- AU1301801A AU1301801A AU13018/01A AU1301801A AU1301801A AU 1301801 A AU1301801 A AU 1301801A AU 13018/01 A AU13018/01 A AU 13018/01A AU 1301801 A AU1301801 A AU 1301801A AU 1301801 A AU1301801 A AU 1301801A
- Authority
- AU
- Australia
- Prior art keywords
- aligner
- illuminator
- fabricating device
- fabricating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70583—Speckle reduction, e.g. coherence control or amplitude/wavefront splitting
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11/317732 | 1999-11-09 | ||
JP31773299 | 1999-11-09 | ||
PCT/JP2000/007830 WO2001035451A1 (en) | 1999-11-09 | 2000-11-08 | Illuminator, aligner, and method for fabricating device |
Publications (1)
Publication Number | Publication Date |
---|---|
AU1301801A true AU1301801A (en) | 2001-06-06 |
Family
ID=18091433
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU13018/01A Abandoned AU1301801A (en) | 1999-11-09 | 2000-11-08 | Illuminator, aligner, and method for fabricating device |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU1301801A (en) |
WO (1) | WO2001035451A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10148170A1 (en) * | 2001-09-28 | 2003-04-17 | Zeiss Carl Jena Gmbh | Method and device for reducing speckle in an optical system |
DE10148167A1 (en) * | 2001-09-28 | 2003-04-17 | Zeiss Carl Jena Gmbh | lighting arrangement |
EP1324136A1 (en) | 2001-12-28 | 2003-07-02 | ASML Netherlands B.V. | Lithographic projection apparatus and device manufacturing method |
KR20150036786A (en) | 2003-04-09 | 2015-04-07 | 가부시키가이샤 니콘 | Exposure method and apparatus, and device manufacturing method |
TWI569308B (en) | 2003-10-28 | 2017-02-01 | 尼康股份有限公司 | Optical illumination device, exposure device, exposure method and device manufacturing method |
TWI519819B (en) * | 2003-11-20 | 2016-02-01 | 尼康股份有限公司 | Light beam converter, optical illuminating apparatus, exposure device, and exposure method |
TWI412067B (en) | 2004-02-06 | 2013-10-11 | 尼康股份有限公司 | Polarization changing device, optical illumination apparatus, light-exposure apparatus and light-exposure method |
JP2007189079A (en) * | 2006-01-13 | 2007-07-26 | Canon Inc | Illuminating optical system, exposure device having it, and manufacturing method of device |
KR101227803B1 (en) | 2006-06-09 | 2013-01-29 | 칼 짜이스 레이저 옵틱스 게엠베하 | Homogenizer with reduced interference |
DE102009009366A1 (en) | 2009-02-18 | 2010-08-19 | Limo Patentverwaltung Gmbh & Co. Kg | Device for homogenizing laser radiation |
JP5157961B2 (en) * | 2009-02-27 | 2013-03-06 | ウシオ電機株式会社 | Light source device |
JP6825956B2 (en) | 2017-03-28 | 2021-02-03 | 株式会社Screenホールディングス | Selection method of substrate processing equipment, substrate processing method and ultraviolet irradiation means |
JP7145620B2 (en) * | 2018-02-27 | 2022-10-03 | 株式会社オーク製作所 | projection exposure equipment |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6358827A (en) * | 1986-08-29 | 1988-03-14 | Nippon Telegr & Teleph Corp <Ntt> | Exposure device |
EP0266203B1 (en) * | 1986-10-30 | 1994-07-06 | Canon Kabushiki Kaisha | An illumination device |
US5153773A (en) * | 1989-06-08 | 1992-10-06 | Canon Kabushiki Kaisha | Illumination device including amplitude-division and beam movements |
-
2000
- 2000-11-08 WO PCT/JP2000/007830 patent/WO2001035451A1/en active Application Filing
- 2000-11-08 AU AU13018/01A patent/AU1301801A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2001035451A1 (en) | 2001-05-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |