ATE98530T1 - Ultraschall-array mit trapezfoermigen schwingerelementen sowie verfahren und vorrichtung zu seiner herstellung. - Google Patents
Ultraschall-array mit trapezfoermigen schwingerelementen sowie verfahren und vorrichtung zu seiner herstellung.Info
- Publication number
- ATE98530T1 ATE98530T1 AT89103112T AT89103112T ATE98530T1 AT E98530 T1 ATE98530 T1 AT E98530T1 AT 89103112 T AT89103112 T AT 89103112T AT 89103112 T AT89103112 T AT 89103112T AT E98530 T1 ATE98530 T1 AT E98530T1
- Authority
- AT
- Austria
- Prior art keywords
- vibration elements
- manufacture
- ultrasound array
- incisions
- electrode
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 238000002604 ultrasonography Methods 0.000 title 1
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 238000013016 damping Methods 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0648—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of rectangular shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP89103112A EP0383972B1 (de) | 1989-02-22 | 1989-02-22 | Ultraschall-Array mit trapezförmigen Schwingerelementen sowie Verfahren und Vorrichtung zu seiner Herstellung |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE98530T1 true ATE98530T1 (de) | 1994-01-15 |
Family
ID=8200994
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT89103112T ATE98530T1 (de) | 1989-02-22 | 1989-02-22 | Ultraschall-array mit trapezfoermigen schwingerelementen sowie verfahren und vorrichtung zu seiner herstellung. |
Country Status (5)
Country | Link |
---|---|
US (2) | US5045746A (de) |
EP (1) | EP0383972B1 (de) |
JP (1) | JP2960093B2 (de) |
AT (1) | ATE98530T1 (de) |
DE (1) | DE58906448D1 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE59008863D1 (de) * | 1990-06-21 | 1995-05-11 | Siemens Ag | Verbund-Ultraschallwandler und Verfahren zur Herstellung eines strukturierten Bauelementes aus piezoelektrischer Keramik. |
US5329202A (en) * | 1991-11-22 | 1994-07-12 | Advanced Imaging Systems | Large area ultrasonic transducer |
US5744898A (en) * | 1992-05-14 | 1998-04-28 | Duke University | Ultrasound transducer array with transmitter/receiver integrated circuitry |
US5311095A (en) * | 1992-05-14 | 1994-05-10 | Duke University | Ultrasonic transducer array |
US5329496A (en) * | 1992-10-16 | 1994-07-12 | Duke University | Two-dimensional array ultrasonic transducers |
US5281887A (en) * | 1992-06-15 | 1994-01-25 | Engle Craig D | Two independent spatial variable degree of freedom wavefront modulator |
US5282005A (en) * | 1993-01-13 | 1994-01-25 | Xerox Corporation | Cross process vibrational mode suppression in high frequency vibratory energy producing devices for electrophotographic imaging |
US5410208A (en) * | 1993-04-12 | 1995-04-25 | Acuson Corporation | Ultrasound transducers with reduced sidelobes and method for manufacture thereof |
US5371717A (en) * | 1993-06-15 | 1994-12-06 | Hewlett-Packard Company | Microgrooves for apodization and focussing of wideband clinical ultrasonic transducers |
US5460181A (en) * | 1994-10-06 | 1995-10-24 | Hewlett Packard Co. | Ultrasonic transducer for three dimensional imaging |
US5434827A (en) * | 1993-06-15 | 1995-07-18 | Hewlett-Packard Company | Matching layer for front acoustic impedance matching of clinical ultrasonic tranducers |
US5423319A (en) * | 1994-06-15 | 1995-06-13 | Hewlett-Packard Company | Integrated impedance matching layer to acoustic boundary problems for clinical ultrasonic transducers |
US5493541A (en) * | 1994-12-30 | 1996-02-20 | General Electric Company | Ultrasonic transducer array having laser-drilled vias for electrical connection of electrodes |
US5644085A (en) * | 1995-04-03 | 1997-07-01 | General Electric Company | High density integrated ultrasonic phased array transducer and a method for making |
EP0777913B1 (de) * | 1995-06-27 | 1999-08-25 | Koninklijke Philips Electronics N.V. | Methode zur herstellung von mehrlagigen elektronischen komponenten |
US5698928A (en) * | 1995-08-17 | 1997-12-16 | Motorola, Inc. | Thin film piezoelectric arrays with enhanced coupling and fabrication methods |
US5855049A (en) * | 1996-10-28 | 1999-01-05 | Microsound Systems, Inc. | Method of producing an ultrasound transducer |
JP2927286B1 (ja) * | 1998-02-05 | 1999-07-28 | 日本電気株式会社 | 圧電アクチュエータ及びその製造方法 |
DE19833213C2 (de) * | 1998-07-23 | 2002-11-07 | Siemens Ag | Ultraschall-Sendeanordnung |
DE60045022D1 (de) * | 1999-01-22 | 2010-11-11 | Canon Kk | Piezoelektrische dünnschichtanordnung, verfahren zu deren herstellung und tintenstrahldruckkopf |
US6894425B1 (en) * | 1999-03-31 | 2005-05-17 | Koninklijke Philips Electronics N.V. | Two-dimensional ultrasound phased array transducer |
US6390985B1 (en) * | 1999-07-21 | 2002-05-21 | Scimed Life Systems, Inc. | Impedance matching transducers |
US7105985B2 (en) * | 2001-04-23 | 2006-09-12 | Product Systems Incorporated | Megasonic transducer with focused energy resonator |
JP3485904B2 (ja) * | 2001-04-24 | 2004-01-13 | 松下電器産業株式会社 | 音響変換器 |
JP3883823B2 (ja) * | 2001-06-19 | 2007-02-21 | 日本電波工業株式会社 | マトリクス型の超音波探触子及びその製造方法 |
US7309948B2 (en) * | 2001-12-05 | 2007-12-18 | Fujifilm Corporation | Ultrasonic transducer and method of manufacturing the same |
US20070222339A1 (en) * | 2004-04-20 | 2007-09-27 | Mark Lukacs | Arrayed ultrasonic transducer |
CA2563775C (en) * | 2004-04-20 | 2014-08-26 | Visualsonics Inc. | Arrayed ultrasonic transducer |
US20060100522A1 (en) * | 2004-11-08 | 2006-05-11 | Scimed Life Systems, Inc. | Piezocomposite transducers |
JP4619845B2 (ja) * | 2005-03-25 | 2011-01-26 | 株式会社東芝 | 超音波プローブ及び超音波診断装置 |
US20070046149A1 (en) * | 2005-08-23 | 2007-03-01 | Zipparo Michael J | Ultrasound probe transducer assembly and production method |
CA2628100C (en) | 2005-11-02 | 2016-08-23 | Visualsonics Inc. | High frequency array ultrasound system |
US7622848B2 (en) * | 2006-01-06 | 2009-11-24 | General Electric Company | Transducer assembly with z-axis interconnect |
WO2008016599A2 (en) * | 2006-08-02 | 2008-02-07 | Cts Corporation | Laser capacitance trimmed piezoelectric element and method of making the same |
US9184369B2 (en) | 2008-09-18 | 2015-11-10 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
US9173047B2 (en) | 2008-09-18 | 2015-10-27 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
US20110144494A1 (en) | 2008-09-18 | 2011-06-16 | James Mehi | Methods for acquisition and display in ultrasound imaging |
JP5511202B2 (ja) * | 2009-03-09 | 2014-06-04 | キヤノン株式会社 | 圧電体素子、それを用いた液体吐出ヘッド及び記録装置 |
US8345511B1 (en) * | 2010-03-15 | 2013-01-01 | The United States Of America As Represented By The Secretary Of The Navy | Blazed array for broadband transmission/reception |
JP6052233B2 (ja) * | 2014-05-26 | 2016-12-27 | Tdk株式会社 | 積層型圧電素子 |
US11417309B2 (en) * | 2018-11-29 | 2022-08-16 | Ascent Venture, Llc. | Ultrasonic transducer with via formed in piezoelectric element and method of fabricating an ultrasonic transducer including milling a piezoelectric substrate |
CN115921259A (zh) * | 2023-01-03 | 2023-04-07 | 京东方科技集团股份有限公司 | 一种超声换能单元及其制备方法、超声换能器件 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB595154A (en) * | 1941-04-03 | 1947-11-27 | Submarine Signal Co | Improvements in or relating to piezoelectric vibrators |
US2716708A (en) * | 1950-11-17 | 1955-08-30 | Nat Res Dev | Apparatus for launching ultrasonic waves |
US2833999A (en) * | 1953-09-28 | 1958-05-06 | Douglas H Howry | Transducer |
US3059130A (en) * | 1957-10-03 | 1962-10-16 | United Insulator Company Ltd | Electromechanical transducers |
DE2829570C2 (de) * | 1978-07-05 | 1979-12-20 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Ultraschallkopf |
US4211949A (en) * | 1978-11-08 | 1980-07-08 | General Electric Company | Wear plate for piezoelectric ultrasonic transducer arrays |
US4211948A (en) * | 1978-11-08 | 1980-07-08 | General Electric Company | Front surface matched piezoelectric ultrasonic transducer array with wide field of view |
JPS5927560B2 (ja) * | 1980-09-26 | 1984-07-06 | 株式会社日立製作所 | 圧電セラミック振動子による超音波送受波器の製造方法 |
JPS57113700A (en) * | 1980-12-30 | 1982-07-15 | Nippon Dempa Kogyo Co Ltd | Array type ultrasonic wave probe and its manufacture |
JPS57148247A (en) * | 1981-03-09 | 1982-09-13 | Matsushita Electric Ind Co Ltd | Manufacture of ultrasonic probing contact |
US4604542A (en) * | 1984-07-25 | 1986-08-05 | Gould Inc. | Broadband radial vibrator transducer with multiple resonant frequencies |
US4825116A (en) * | 1987-05-07 | 1989-04-25 | Yokogawa Electric Corporation | Transmitter-receiver of ultrasonic distance measuring device |
DE3739226A1 (de) * | 1987-11-19 | 1989-06-01 | Siemens Ag | Verfahren zur herstellung eines ultraschallwandler-arrays |
-
1989
- 1989-02-22 EP EP89103112A patent/EP0383972B1/de not_active Expired - Lifetime
- 1989-02-22 DE DE89103112T patent/DE58906448D1/de not_active Expired - Fee Related
- 1989-02-22 AT AT89103112T patent/ATE98530T1/de not_active IP Right Cessation
-
1990
- 1990-02-19 JP JP2039535A patent/JP2960093B2/ja not_active Expired - Fee Related
- 1990-02-22 US US07/484,352 patent/US5045746A/en not_active Ceased
-
1993
- 1993-09-03 US US08/116,800 patent/USRE35011E/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0383972B1 (de) | 1993-12-15 |
US5045746A (en) | 1991-09-03 |
DE58906448D1 (de) | 1994-01-27 |
EP0383972A1 (de) | 1990-08-29 |
USRE35011E (en) | 1995-08-08 |
JP2960093B2 (ja) | 1999-10-06 |
JPH02246700A (ja) | 1990-10-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
REN | Ceased due to non-payment of the annual fee |