ATE79601T1 - Herstellung von polykristallinem silizium durch pyrolyse von silan. - Google Patents

Herstellung von polykristallinem silizium durch pyrolyse von silan.

Info

Publication number
ATE79601T1
ATE79601T1 AT87307464T AT87307464T ATE79601T1 AT E79601 T1 ATE79601 T1 AT E79601T1 AT 87307464 T AT87307464 T AT 87307464T AT 87307464 T AT87307464 T AT 87307464T AT E79601 T1 ATE79601 T1 AT E79601T1
Authority
AT
Austria
Prior art keywords
pyrolysis
silane
production
polycrystalline silicon
polycrystalline
Prior art date
Application number
AT87307464T
Other languages
English (en)
Inventor
Marcelian Francis Gautreaux
Robert Hall Allen
Original Assignee
Ethyl Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/004,116 external-priority patent/US4820587A/en
Application filed by Ethyl Corp filed Critical Ethyl Corp
Application granted granted Critical
Publication of ATE79601T1 publication Critical patent/ATE79601T1/de

Links

AT87307464T 1986-08-25 1987-08-24 Herstellung von polykristallinem silizium durch pyrolyse von silan. ATE79601T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US89990686A 1986-08-25 1986-08-25
US07/004,116 US4820587A (en) 1986-08-25 1987-01-16 Polysilicon produced by a fluid bed process
EP87307464A EP0258027B1 (de) 1986-08-25 1987-08-24 Herstellung von polykristallinem Silizium durch Pyrolyse von Silan

Publications (1)

Publication Number Publication Date
ATE79601T1 true ATE79601T1 (de) 1992-09-15

Family

ID=27230507

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87307464T ATE79601T1 (de) 1986-08-25 1987-08-24 Herstellung von polykristallinem silizium durch pyrolyse von silan.

Country Status (1)

Country Link
AT (1) ATE79601T1 (de)

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Legal Events

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