EP0258027A3 - Preparation of polysilicon by silane pyrolysis - Google Patents

Preparation of polysilicon by silane pyrolysis Download PDF

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Publication number
EP0258027A3
EP0258027A3 EP87307464A EP87307464A EP0258027A3 EP 0258027 A3 EP0258027 A3 EP 0258027A3 EP 87307464 A EP87307464 A EP 87307464A EP 87307464 A EP87307464 A EP 87307464A EP 0258027 A3 EP0258027 A3 EP 0258027A3
Authority
EP
European Patent Office
Prior art keywords
polysilicon
preparation
silane pyrolysis
pyrolysis
silane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP87307464A
Other versions
EP0258027A2 (en
EP0258027B1 (en
Inventor
Marcelian Francis Gautreaux
Robert Hall Allen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ethyl Corp
Original Assignee
Ethyl Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ethyl Corp filed Critical Ethyl Corp
Priority to AT87307464T priority Critical patent/ATE79601T1/en
Publication of EP0258027A2 publication Critical patent/EP0258027A2/en
Publication of EP0258027A3 publication Critical patent/EP0258027A3/en
Application granted granted Critical
Publication of EP0258027B1 publication Critical patent/EP0258027B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/24—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique
    • B01J8/26—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique with two or more fluidised beds, e.g. reactor and regeneration installations
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/912—Replenishing liquid precursor, other than a moving zone
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
    • Y10T428/2991—Coated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
    • Y10T428/2991—Coated
    • Y10T428/2993—Silicic or refractory material containing [e.g., tungsten oxide, glass, cement, etc.]
    • Y10T428/2995—Silane, siloxane or silicone coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Silicon Compounds (AREA)
EP87307464A 1986-08-25 1987-08-24 Preparation of polysilicon by silane pyrolysis Expired - Lifetime EP0258027B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT87307464T ATE79601T1 (en) 1986-08-25 1987-08-24 PRODUCTION OF POLYCRYSTALLINE SILICON BY PYROLYSIS OF SILANE.

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US89990686A 1986-08-25 1986-08-25
US07/004,116 US4820587A (en) 1986-08-25 1987-01-16 Polysilicon produced by a fluid bed process
US899906 1987-01-16
US4116 1995-09-21

Publications (3)

Publication Number Publication Date
EP0258027A2 EP0258027A2 (en) 1988-03-02
EP0258027A3 true EP0258027A3 (en) 1989-02-22
EP0258027B1 EP0258027B1 (en) 1992-08-19

Family

ID=26672629

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87307464A Expired - Lifetime EP0258027B1 (en) 1986-08-25 1987-08-24 Preparation of polysilicon by silane pyrolysis

Country Status (5)

Country Link
US (1) US4820587A (en)
EP (1) EP0258027B1 (en)
JP (1) JPH06102532B2 (en)
CA (1) CA1294755C (en)
DE (1) DE3781223T2 (en)

Families Citing this family (39)

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Publication number Priority date Publication date Assignee Title
US5165908A (en) * 1988-03-31 1992-11-24 Advanced Silicon Materials, Inc. Annular heated fluidized bed reactor
US5326547A (en) * 1988-10-11 1994-07-05 Albemarle Corporation Process for preparing polysilicon with diminished hydrogen content by using a two-step heating process
CA1340189C (en) * 1988-10-11 1998-12-15 Albemarle Corporation Polysilicon with diminished hydrogen content
CA2038175A1 (en) * 1990-04-02 1991-10-03 Albemarle Corporation Polysilicon and process therefor
JPH05246786A (en) * 1991-07-02 1993-09-24 L'air Liquide Method for uniformly coating core powders with ultrafine silicon-based particles while using chemical vapor decomposition in presence of core powders
US5405658A (en) * 1992-10-20 1995-04-11 Albemarle Corporation Silicon coating process
US5798137A (en) 1995-06-07 1998-08-25 Advanced Silicon Materials, Inc. Method for silicon deposition
US5910295A (en) * 1997-11-10 1999-06-08 Memc Electronic Materials, Inc. Closed loop process for producing polycrystalline silicon and fumed silica
DE10359587A1 (en) * 2003-12-18 2005-07-14 Wacker-Chemie Gmbh Dust- and pore-free high-purity polysilicon granules
DE102004027563A1 (en) * 2004-06-04 2005-12-22 Joint Solar Silicon Gmbh & Co. Kg Silicon and process for its production
US20060105105A1 (en) 2004-11-12 2006-05-18 Memc Electronic Materials, Inc. High purity granular silicon and method of manufacturing the same
DE102005042753A1 (en) * 2005-09-08 2007-03-15 Wacker Chemie Ag Method and device for producing granular polycrystalline silicon in a fluidized bed reactor
DE102007049635A1 (en) 2007-10-17 2009-04-23 Willert-Porada, Monika, Prof. Dr. Coating particles in presence of microwave-plasma in fluidized bed reactor, employs flow of ionized gas carrying particulate substrate powder and metallic targets
KR20110037967A (en) * 2008-06-27 2011-04-13 엠이엠씨 일렉트로닉 머티리얼즈, 인크. Methods for increasing polycrystalline silicon reactor productivity by recycle of silicon fines
CN103058194B (en) 2008-09-16 2015-02-25 储晞 Reactor for producing high-purity particulate silicon
DE102008059408A1 (en) * 2008-11-27 2010-06-02 Schmid Silicon Technology Gmbh Process and apparatus for the production of ultrapure silicon
US8168123B2 (en) * 2009-02-26 2012-05-01 Siliken Chemicals, S.L. Fluidized bed reactor for production of high purity silicon
TWI454309B (en) * 2009-04-20 2014-10-01 Jiangsu Zhongneng Polysilicon Technology Dev Co Ltd Methods and system for cooling a reaction effluent gas
US8425855B2 (en) 2009-04-20 2013-04-23 Robert Froehlich Reactor with silicide-coated metal surfaces
US20120148728A1 (en) * 2010-12-09 2012-06-14 Siliken Sa Methods and apparatus for the production of high purity silicon
US8452547B2 (en) 2010-12-29 2013-05-28 Memc Electronic Materials, Inc. Systems and methods for particle size determination and control in a fluidized bed reactor
US8849584B2 (en) 2010-12-29 2014-09-30 Sunedison, Inc. Systems and methods for particle size determination and control in a fluidized bed reactor for use with thermally decomposable silicon-containing gas
EP2760576B1 (en) 2011-09-30 2016-12-07 MEMC Electronic Materials, Inc. Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor
WO2013049314A2 (en) 2011-09-30 2013-04-04 Memc Electronic Materials, Inc. Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor
TWI580825B (en) 2012-01-27 2017-05-01 Ｍｅｍｃ新加坡有限公司 Method of preparing cast silicon by directional solidification
US8875728B2 (en) 2012-07-12 2014-11-04 Siliken Chemicals, S.L. Cooled gas distribution plate, thermal bridge breaking system, and related methods
DE102012213506A1 (en) 2012-07-31 2014-02-06 Siltronic Ag Process for producing a single crystal of silicon
US9452403B2 (en) 2012-10-19 2016-09-27 Sunedison, Inc. Using wavelet decomposition to determine the fluidization quality in a fluidized bed reactor
US9587993B2 (en) 2012-11-06 2017-03-07 Rec Silicon Inc Probe assembly for a fluid bed reactor
US9212421B2 (en) 2013-07-10 2015-12-15 Rec Silicon Inc Method and apparatus to reduce contamination of particles in a fluidized bed reactor
CN105026029B (en) 2012-12-31 2017-12-22 爱迪生太阳能公司 Thermograde is optimized by size distribution control and improves the operation of fluidized-bed reactor
US9297765B2 (en) 2013-03-14 2016-03-29 Sunedison, Inc. Gas decomposition reactor feedback control using Raman spectrometry
US9446367B2 (en) 2014-08-15 2016-09-20 Rec Silicon Inc Joint design for segmented silicon carbide liner in a fluidized bed reactor
US9662628B2 (en) 2014-08-15 2017-05-30 Rec Silicon Inc Non-contaminating bonding material for segmented silicon carbide liner in a fluidized bed reactor
US9238211B1 (en) 2014-08-15 2016-01-19 Rec Silicon Inc Segmented silicon carbide liner
DE112018008047A5 (en) 2018-10-02 2021-06-24 Wacker Chemie Ag SILICON PARTICLES WITH SPECIFIC CHLORINE CONTENT AS ACTIVE ANODE MATERIAL FOR LITHIUM-ION BATTERIES
CN113544090B (en) * 2019-07-16 2024-06-04 瓦克化学股份公司 Method for preparing polycrystalline silicon
WO2021164846A1 (en) 2020-02-17 2021-08-26 Wacker Chemie Ag Anode active materials for lithium-ion batteries
FR3113675B1 (en) * 2020-09-01 2022-09-09 Safran Ceram Fluidized bed fiber coating process

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4292344A (en) * 1979-02-23 1981-09-29 Union Carbide Corporation Fluidized bed heating process and apparatus

Family Cites Families (7)

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US4207360A (en) * 1975-10-31 1980-06-10 Texas Instruments Incorporated Silicon seed production process
US4314525A (en) * 1980-03-03 1982-02-09 California Institute Of Technology Fluidized bed silicon deposition from silane
US4444811A (en) * 1980-03-03 1984-04-24 California Institute Of Technology Fluidized bed silicon deposition from silane
US4388080A (en) * 1982-02-12 1983-06-14 Atlantic Richfield Company Process for recovery of high purity silicon
FR2530607B1 (en) * 1982-07-26 1985-06-28 Rhone Poulenc Spec Chim PURE SILICON, DENSE POWDER AND PROCESS FOR PREPARING SAME
DE3310828A1 (en) * 1983-03-24 1984-09-27 Bayer Ag, 5090 Leverkusen METHOD FOR PRODUCING SILICON
US4676968A (en) * 1985-07-24 1987-06-30 Enichem, S.P.A. Melt consolidation of silicon powder

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4292344A (en) * 1979-02-23 1981-09-29 Union Carbide Corporation Fluidized bed heating process and apparatus

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
CHEMICAL ABSTRACTS, vol. 98, no. 4, 24th January 1983, page 155, abstract no. 19429s, Columbus, Ohio, US; N.K. ROHATGI et al.: "Silane pyrolysis in a fluidized-bed reactor", & PROC. - ELECTROCHEM. SOC. 1982, 82-8(MATER. NEW PROCESS. TECHNOL. PHOTOVOLTAICS), 477-87 *
CHEMICAL ENGINEERING SCIENCE, vol. 41, no. 4, 1986, pages 633-641, Pergamon Press Ltd, GB; S. LAI et al.: "Chemical vapor deposition and homogeneous nucleation in fluidized bed reactors: silicon from silane" *
EIGHTEENTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, 1984, pages 553-557, IEEE; G. HSU et al.: "Fluidized bed silicon deposition" *
JOURNAL OF THE ELECTROCHEMICAL SOCIETY.: SOLID-STATE SCIENCE AND TECHNOLOGY, vol. 131, no. 3, March 1984, pages 660-663, Princeton, New Jersey, US; G. HSU et al.: "Fines in fluidized bed silane pyrolysis" *
N.T.I.S. TECHNICAL NOTES, no. 2, part H, February 1986, Springfield, Virginia, US; G. HSU et al.: "Fluidized-bed particles scavenge silicon fines" *

Also Published As

Publication number Publication date
JPS63129012A (en) 1988-06-01
CA1294755C (en) 1992-01-28
EP0258027A2 (en) 1988-03-02
DE3781223T2 (en) 1992-12-17
DE3781223D1 (en) 1992-09-24
US4820587A (en) 1989-04-11
EP0258027B1 (en) 1992-08-19
JPH06102532B2 (en) 1994-12-14

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