ATE62430T1 - Reaktorvorrichtung fuer halbleiterwaffelbehandlung. - Google Patents

Reaktorvorrichtung fuer halbleiterwaffelbehandlung.

Info

Publication number
ATE62430T1
ATE62430T1 AT85904545T AT85904545T ATE62430T1 AT E62430 T1 ATE62430 T1 AT E62430T1 AT 85904545 T AT85904545 T AT 85904545T AT 85904545 T AT85904545 T AT 85904545T AT E62430 T1 ATE62430 T1 AT E62430T1
Authority
AT
Austria
Prior art keywords
wafle
semiconductor
processing
reactor device
reactor
Prior art date
Application number
AT85904545T
Other languages
English (en)
Inventor
Martin L Hammond
Charles L Ramiller
Original Assignee
Tetron Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/662,879 external-priority patent/US4694779A/en
Application filed by Tetron Inc filed Critical Tetron Inc
Application granted granted Critical
Publication of ATE62430T1 publication Critical patent/ATE62430T1/de

Links

AT85904545T 1984-10-19 1985-09-03 Reaktorvorrichtung fuer halbleiterwaffelbehandlung. ATE62430T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US06/662,879 US4694779A (en) 1984-10-19 1984-10-19 Reactor apparatus for semiconductor wafer processing
PCT/US1985/001674 WO1986002289A1 (en) 1984-10-19 1985-09-03 Reactor apparatus for semiconductor wafer processing
EP85904545A EP0198842B1 (de) 1984-10-19 1985-09-03 Reaktorvorrichtung für halbleiterwaffelbehandlung

Publications (1)

Publication Number Publication Date
ATE62430T1 true ATE62430T1 (de) 1991-04-15

Family

ID=27228702

Family Applications (1)

Application Number Title Priority Date Filing Date
AT85904545T ATE62430T1 (de) 1984-10-19 1985-09-03 Reaktorvorrichtung fuer halbleiterwaffelbehandlung.

Country Status (1)

Country Link
AT (1) ATE62430T1 (de)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee