ATE542867T1 - Dispersion, enthaltend ceroxid und kolloidales siliciumoxid - Google Patents

Dispersion, enthaltend ceroxid und kolloidales siliciumoxid

Info

Publication number
ATE542867T1
ATE542867T1 AT07822403T AT07822403T ATE542867T1 AT E542867 T1 ATE542867 T1 AT E542867T1 AT 07822403 T AT07822403 T AT 07822403T AT 07822403 T AT07822403 T AT 07822403T AT E542867 T1 ATE542867 T1 AT E542867T1
Authority
AT
Austria
Prior art keywords
silicon dioxide
cerium oxide
particles
ceroxide
colloidal silicon
Prior art date
Application number
AT07822403T
Other languages
English (en)
Inventor
Michael Kroell
Stefan Heberer
Katharina Dauth
Original Assignee
Evonik Degussa Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Evonik Degussa Gmbh filed Critical Evonik Degussa Gmbh
Application granted granted Critical
Publication of ATE542867T1 publication Critical patent/ATE542867T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/06—Planarisation of inorganic insulating materials
    • H10P95/062—Planarisation of inorganic insulating materials involving a dielectric removal step
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Silicon Compounds (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Pigments, Carbon Blacks, Or Wood Stains (AREA)
AT07822403T 2007-02-20 2007-11-09 Dispersion, enthaltend ceroxid und kolloidales siliciumoxid ATE542867T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007008232A DE102007008232A1 (de) 2007-02-20 2007-02-20 Dispersion enthaltend Ceroxid und kolloidales Siliciumdioxid
PCT/EP2007/062102 WO2008101553A1 (en) 2007-02-20 2007-11-09 Dispersion comprising cerium oxide and colloidal silicon dioxide

Publications (1)

Publication Number Publication Date
ATE542867T1 true ATE542867T1 (de) 2012-02-15

Family

ID=39149433

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07822403T ATE542867T1 (de) 2007-02-20 2007-11-09 Dispersion, enthaltend ceroxid und kolloidales siliciumoxid

Country Status (9)

Country Link
US (1) US20100102268A1 (de)
EP (1) EP2121860B1 (de)
JP (1) JP5119272B2 (de)
KR (1) KR101097506B1 (de)
CN (1) CN101611110A (de)
AT (1) ATE542867T1 (de)
DE (1) DE102007008232A1 (de)
TW (1) TW200848482A (de)
WO (1) WO2008101553A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007062572A1 (de) * 2007-12-22 2009-06-25 Evonik Degussa Gmbh Ceroxid und kolloidales Siliciumdioxid enthaltende Dispersion
DE102008008184A1 (de) * 2008-02-08 2009-08-13 Evonik Degussa Gmbh Verfahren zum Polieren einer Siliciumoberfläche mittels einer ceroxidhaltigen Dispersion
CN102802875A (zh) * 2009-06-25 2012-11-28 赢创德固赛有限公司 包含氧化铈和二氧化硅的分散体
WO2013099142A1 (ja) * 2011-12-28 2013-07-04 コニカミノルタ株式会社 基板用研磨剤及び基板の製造方法
JP6280561B2 (ja) * 2013-11-15 2018-02-14 Hoya株式会社 磁気ディスク用ガラス基板の製造方法及び磁気ディスクの製造方法
CN103992743B (zh) * 2014-05-09 2018-06-19 杰明纳微电子股份有限公司 含有二氧化铈粉体与胶体二氧化硅混合磨料的抛光液及其制备工艺
KR102090984B1 (ko) * 2015-03-31 2020-03-19 니끼 쇼꾸바이 카세이 가부시키가이샤 실리카계 복합 미립자 분산액, 그의 제조 방법 및 실리카계 복합 미립자 분산액을 포함하는 연마용 슬러리
KR102463863B1 (ko) * 2015-07-20 2022-11-04 삼성전자주식회사 연마용 조성물 및 이를 이용한 반도체 장치의 제조 방법
JP6985116B2 (ja) * 2017-11-17 2021-12-22 信越化学工業株式会社 合成石英ガラス基板用の研磨剤及び合成石英ガラス基板の研磨方法
WO2020044308A1 (en) * 2018-08-30 2020-03-05 Sabic Global Technologies B.V. High yield stabilized colloidal particle assemblies

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10106988A (ja) * 1996-09-30 1998-04-24 Hitachi Chem Co Ltd 酸化セリウム研磨剤及び基板の研磨法
US5891205A (en) 1997-08-14 1999-04-06 Ekc Technology, Inc. Chemical mechanical polishing composition
JP4113282B2 (ja) * 1998-05-07 2008-07-09 スピードファム株式会社 研磨組成物及びそれを用いたエッジポリッシング方法
US20020019202A1 (en) * 1998-06-10 2002-02-14 Thomas Terence M. Control of removal rates in CMP
JP3895949B2 (ja) * 2001-07-18 2007-03-22 株式会社東芝 Ｃｍｐ用スラリー、およびこれを用いた半導体装置の製造方法
US20030162398A1 (en) * 2002-02-11 2003-08-28 Small Robert J. Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same
US7513920B2 (en) * 2002-02-11 2009-04-07 Dupont Air Products Nanomaterials Llc Free radical-forming activator attached to solid and used to enhance CMP formulations
JP2004079968A (ja) * 2002-08-22 2004-03-11 Toshiba Corp 半導体装置の研磨剤及び研磨剤を用いた半導体装置の製造方法
JP2004200268A (ja) * 2002-12-17 2004-07-15 Hitachi Chem Co Ltd Ｃｍｐ研磨剤及び基板の研磨方法
JP4574140B2 (ja) * 2003-08-27 2010-11-04 株式会社フジミインコーポレーテッド 研磨用組成物及びそれを用いる研磨方法
US7112123B2 (en) * 2004-06-14 2006-09-26 Amcol International Corporation Chemical-mechanical polishing (CMP) slurry containing clay and CeO2 abrasive particles and method of planarizing surfaces
TW200613485A (en) * 2004-03-22 2006-05-01 Kao Corp Polishing composition
US7056192B2 (en) * 2004-09-14 2006-06-06 International Business Machines Corporation Ceria-based polish processes, and ceria-based slurries
JP4451347B2 (ja) 2005-04-26 2010-04-14 花王株式会社 研磨液組成物
JP2006318952A (ja) 2005-05-10 2006-11-24 Hitachi Chem Co Ltd Ｃｍｐ研磨剤及び基板の研磨方法
US7553465B2 (en) * 2005-08-12 2009-06-30 Degussa Ag Cerium oxide powder and cerium oxide dispersion
DE102005038136A1 (de) 2005-08-12 2007-02-15 Degussa Ag Ceroxid-Pulver und Ceroxid-Dispersion

Also Published As

Publication number Publication date
KR20090122932A (ko) 2009-12-01
EP2121860B1 (de) 2012-01-25
JP5119272B2 (ja) 2013-01-16
KR101097506B1 (ko) 2011-12-22
CN101611110A (zh) 2009-12-23
JP2010519157A (ja) 2010-06-03
TW200848482A (en) 2008-12-16
WO2008101553A1 (en) 2008-08-28
DE102007008232A1 (de) 2008-08-21
US20100102268A1 (en) 2010-04-29
EP2121860A1 (de) 2009-11-25

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