ATE531238T1 - Entladungsquelle mit gasvorhang zum schutz der optik vor partikeln - Google Patents
Entladungsquelle mit gasvorhang zum schutz der optik vor partikelnInfo
- Publication number
- ATE531238T1 ATE531238T1 AT02759209T AT02759209T ATE531238T1 AT E531238 T1 ATE531238 T1 AT E531238T1 AT 02759209 T AT02759209 T AT 02759209T AT 02759209 T AT02759209 T AT 02759209T AT E531238 T1 ATE531238 T1 AT E531238T1
- Authority
- AT
- Austria
- Prior art keywords
- gas curtain
- particles
- optics
- protect
- discharge source
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
- H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Epidemiology (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Nanotechnology (AREA)
- General Physics & Mathematics (AREA)
- Public Health (AREA)
- Optics & Photonics (AREA)
- Atmospheric Sciences (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- X-Ray Techniques (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/956,275 US6714624B2 (en) | 2001-09-18 | 2001-09-18 | Discharge source with gas curtain for protecting optics from particles |
PCT/US2002/024092 WO2003026363A1 (en) | 2001-09-18 | 2002-07-29 | Discharge source with gas curtain for protecting optics from particles |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE531238T1 true ATE531238T1 (de) | 2011-11-15 |
Family
ID=25498019
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT02759209T ATE531238T1 (de) | 2001-09-18 | 2002-07-29 | Entladungsquelle mit gasvorhang zum schutz der optik vor partikeln |
Country Status (6)
Country | Link |
---|---|
US (1) | US6714624B2 (de) |
EP (1) | EP1428416B1 (de) |
JP (1) | JP4510449B2 (de) |
KR (1) | KR20040035706A (de) |
AT (1) | ATE531238T1 (de) |
WO (1) | WO2003026363A1 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7378673B2 (en) * | 2005-02-25 | 2008-05-27 | Cymer, Inc. | Source material dispenser for EUV light source |
US7372056B2 (en) * | 2005-06-29 | 2008-05-13 | Cymer, Inc. | LPP EUV plasma source material target delivery system |
US7002168B2 (en) * | 2002-10-15 | 2006-02-21 | Cymer, Inc. | Dense plasma focus radiation source |
DE10256663B3 (de) * | 2002-12-04 | 2005-10-13 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Gasentladungslampe für EUV-Strahlung |
TWI255394B (en) * | 2002-12-23 | 2006-05-21 | Asml Netherlands Bv | Lithographic apparatus with debris suppression means and device manufacturing method |
DE10337667B4 (de) * | 2003-08-12 | 2012-03-22 | Xtreme Technologies Gmbh | Plasma-Strahlungsquelle und Anordnung zur Erzeugung eines Gasvorhangs für Plasma-Strahlungsquellen |
EP1531365A1 (de) | 2003-11-11 | 2005-05-18 | ASML Netherlands B.V. | Lithographischer Apparat mit Unterdrückung von Kontamination |
CN100555082C (zh) * | 2003-11-11 | 2009-10-28 | Asml荷兰有限公司 | 抑制污染的光刻设备及其器件制造方法 |
US7167232B2 (en) * | 2003-12-30 | 2007-01-23 | Asml Netherlands B.V. | Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus |
US6980281B2 (en) * | 2004-01-23 | 2005-12-27 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
KR101123187B1 (ko) | 2004-03-31 | 2012-03-19 | 에이에스엠엘 네델란즈 비.브이. | 단파 방사의 생성 동안 방사원에 의해 생성되는 입자를제거하기 위한 방법 및 장치 |
US7208746B2 (en) * | 2004-07-14 | 2007-04-24 | Asml Netherlands B.V. | Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
US7145132B2 (en) * | 2004-12-27 | 2006-12-05 | Asml Netherlands B.V. | Lithographic apparatus, illumination system and debris trapping system |
US7251263B2 (en) * | 2005-05-23 | 2007-07-31 | Colorado State University Research Foundation | Capillary discharge x-ray laser |
CN101218543A (zh) | 2005-06-14 | 2008-07-09 | 皇家飞利浦电子股份有限公司 | 具有改进气体分布的碎片抑制系统 |
US7365349B2 (en) * | 2005-06-27 | 2008-04-29 | Cymer, Inc. | EUV light source collector lifetime improvements |
US7180083B2 (en) * | 2005-06-27 | 2007-02-20 | Cymer, Inc. | EUV light source collector erosion mitigation |
JP4693544B2 (ja) * | 2005-08-11 | 2011-06-01 | シャープ株式会社 | プラズマ生成電極、プラズマ処理装置、および、プラズマ処理方法 |
US7502446B2 (en) * | 2005-10-18 | 2009-03-10 | Alft Inc. | Soft x-ray generator |
US7453077B2 (en) * | 2005-11-05 | 2008-11-18 | Cymer, Inc. | EUV light source |
JP4904809B2 (ja) * | 2005-12-28 | 2012-03-28 | ウシオ電機株式会社 | 極端紫外光光源装置 |
US7473908B2 (en) * | 2006-07-14 | 2009-01-06 | Asml Netherlands B.V. | Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface |
DE102007023444B4 (de) * | 2007-05-16 | 2009-04-09 | Xtreme Technologies Gmbh | Einrichtung zur Erzeugung eines Gasvorhangs für plasmabasierte EUV-Strahlungsquellen |
US7816658B2 (en) * | 2007-06-07 | 2010-10-19 | Asml Netherlands B.V. | Extreme ultra-violet lithographic apparatus and device manufacturing method |
NL1036153A1 (nl) | 2007-11-08 | 2009-05-11 | Asml Netherlands Bv | Method and system for determining a suppression factor of a suppression system and a lithographic apparatus. |
WO2009107063A1 (en) | 2008-02-28 | 2009-09-03 | Philips Intellectual Property & Standards Gmbh | Debris mitigation device with rotating foil trap and drive assembly |
DE102008049494A1 (de) * | 2008-09-27 | 2010-04-08 | Xtreme Technologies Gmbh | Verfahren und Anordnung zum Betreiben von plasmabasierten kurzwelligen Strahlungsquellen |
KR20120003916A (ko) | 2009-04-02 | 2012-01-11 | 에테하 취리히 | 데브리 완화 및 냉각된 집광기 광학계를 갖는 극자외선 광원 |
CN102484938B (zh) | 2009-09-01 | 2014-12-10 | 株式会社Ihi | 等离子体光源 |
JP2011054376A (ja) * | 2009-09-01 | 2011-03-17 | Ihi Corp | Lpp方式のeuv光源とその発生方法 |
US9066412B2 (en) | 2010-04-15 | 2015-06-23 | Asml Netherlands B.V. | Systems and methods for cooling an optic |
US9268031B2 (en) * | 2012-04-09 | 2016-02-23 | Kla-Tencor Corporation | Advanced debris mitigation of EUV light source |
DE102012213927A1 (de) | 2012-08-07 | 2013-06-06 | Carl Zeiss Smt Gmbh | Vorrichtung zur Erzeugung eines Gasvorhangs, Gasdüse und EUV-Lithographiesystem damit |
CN102978628A (zh) * | 2012-11-27 | 2013-03-20 | 中国人民解放军空军工程大学 | 在化学热处理过程中采用激光等离子体冲击波增渗的方法 |
WO2014131016A1 (en) | 2013-02-25 | 2014-08-28 | Kla-Tencor Corporation | Method and system for gas flow mitigation of molecular contamination of optics |
CN108617070B (zh) * | 2013-04-05 | 2020-10-09 | Asml荷兰有限公司 | 源收集器设备、光刻设备和方法 |
CN114557136A (zh) * | 2019-10-16 | 2022-05-27 | Asml荷兰有限公司 | 用于辐射源的设备 |
JP7467174B2 (ja) | 2020-03-16 | 2024-04-15 | ギガフォトン株式会社 | チャンバ装置、極端紫外光生成装置、及び電子デバイスの製造方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2625659A1 (de) * | 1976-06-08 | 1977-12-22 | Leybold Heraeus Gmbh & Co Kg | Einrichtung zur vermeidung von kontaminationen auf einer in einem vakuumrezipienten angeordneten probe |
US4692934A (en) * | 1984-11-08 | 1987-09-08 | Hampshire Instruments | X-ray lithography system |
JPS63292553A (ja) * | 1987-05-25 | 1988-11-29 | Agency Of Ind Science & Technol | X線発生装置におけるプラズマ飛散防止機構 |
US5499282A (en) | 1994-05-02 | 1996-03-12 | University Of Central Florida | Efficient narrow spectral width soft-X-ray discharge sources |
US5577092A (en) | 1995-01-25 | 1996-11-19 | Kublak; Glenn D. | Cluster beam targets for laser plasma extreme ultraviolet and soft x-ray sources |
US6031241A (en) | 1997-03-11 | 2000-02-29 | University Of Central Florida | Capillary discharge extreme ultraviolet lamp source for EUV microlithography and other related applications |
US5963616A (en) | 1997-03-11 | 1999-10-05 | University Of Central Florida | Configurations, materials and wavelengths for EUV lithium plasma discharge lamps |
US6232613B1 (en) * | 1997-03-11 | 2001-05-15 | University Of Central Florida | Debris blocker/collector and emission enhancer for discharge sources |
US6198792B1 (en) * | 1998-11-06 | 2001-03-06 | Euv Llc | Wafer chamber having a gas curtain for extreme-UV lithography |
US6190835B1 (en) * | 1999-05-06 | 2001-02-20 | Advanced Energy Systems, Inc. | System and method for providing a lithographic light source for a semiconductor manufacturing process |
AU1241401A (en) * | 1999-10-27 | 2001-05-08 | Jmar Research, Inc. | Method and radiation generating system using microtargets |
US6356618B1 (en) * | 2000-06-13 | 2002-03-12 | Euv Llc | Extreme-UV electrical discharge source |
-
2001
- 2001-09-18 US US09/956,275 patent/US6714624B2/en not_active Expired - Lifetime
-
2002
- 2002-07-29 KR KR10-2004-7001541A patent/KR20040035706A/ko not_active Application Discontinuation
- 2002-07-29 WO PCT/US2002/024092 patent/WO2003026363A1/en active Application Filing
- 2002-07-29 JP JP2003529823A patent/JP4510449B2/ja not_active Expired - Fee Related
- 2002-07-29 AT AT02759209T patent/ATE531238T1/de not_active IP Right Cessation
- 2002-07-29 EP EP02759209A patent/EP1428416B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20030053594A1 (en) | 2003-03-20 |
US6714624B2 (en) | 2004-03-30 |
EP1428416B1 (de) | 2011-10-26 |
WO2003026363A8 (en) | 2004-02-19 |
JP2005503657A (ja) | 2005-02-03 |
EP1428416A1 (de) | 2004-06-16 |
JP4510449B2 (ja) | 2010-07-21 |
KR20040035706A (ko) | 2004-04-29 |
WO2003026363A1 (en) | 2003-03-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |