ATE527394T1 - Herstellung von siliziumoxid-wellenleitern mit minimaler absorption - Google Patents
Herstellung von siliziumoxid-wellenleitern mit minimaler absorptionInfo
- Publication number
- ATE527394T1 ATE527394T1 AT01270640T AT01270640T ATE527394T1 AT E527394 T1 ATE527394 T1 AT E527394T1 AT 01270640 T AT01270640 T AT 01270640T AT 01270640 T AT01270640 T AT 01270640T AT E527394 T1 ATE527394 T1 AT E527394T1
- Authority
- AT
- Austria
- Prior art keywords
- production
- silicon oxide
- minimal absorption
- waveguides
- oxide waveguides
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12038—Glass (SiO2 based materials)
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12169—Annealing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Vapour Deposition (AREA)
- Optical Integrated Circuits (AREA)
- Silicon Compounds (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0030236A GB2370043A (en) | 2000-12-12 | 2000-12-12 | Chemical treatment of silica films |
PCT/CA2001/001753 WO2002048429A1 (en) | 2000-12-12 | 2001-12-06 | Manufacture of silica waveguides with minimal absorption |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE527394T1 true ATE527394T1 (de) | 2011-10-15 |
Family
ID=9904890
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT01270640T ATE527394T1 (de) | 2000-12-12 | 2001-12-06 | Herstellung von siliziumoxid-wellenleitern mit minimaler absorption |
Country Status (6)
Country | Link |
---|---|
US (1) | US6537623B2 (de) |
EP (1) | EP1404892B1 (de) |
AT (1) | ATE527394T1 (de) |
AU (1) | AU2002215742A1 (de) |
GB (1) | GB2370043A (de) |
WO (1) | WO2002048429A1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6887514B2 (en) * | 2001-05-31 | 2005-05-03 | Dalsa Semiconductor Inc. | Method of depositing optical films |
US7006753B2 (en) | 2002-12-18 | 2006-02-28 | General Electric Company | Optical waveguide devices with deuterated amorphous carbon core structures |
EP1651988A1 (de) * | 2003-08-04 | 2006-05-03 | Pirelli & C. S.p.A. | Integrierte optische wellenleiterstruktur mit niedrigen koppelverlusten an ein externes optisches feld |
US7901870B1 (en) | 2004-05-12 | 2011-03-08 | Cirrex Systems Llc | Adjusting optical properties of optical thin films |
US7565084B1 (en) | 2004-09-15 | 2009-07-21 | Wach Michael L | Robustly stabilizing laser systems |
US9575335B1 (en) * | 2014-01-10 | 2017-02-21 | Oakley, Inc. | Eyewear with chroma enhancement for specific activities |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3887733A (en) * | 1974-04-24 | 1975-06-03 | Motorola Inc | Doped oxide reflow process |
US4585492A (en) * | 1984-07-30 | 1986-04-29 | International Business Machines Corporation | Rapid thermal annealing of silicon dioxide for reduced hole trapping |
US4784975A (en) * | 1986-10-23 | 1988-11-15 | International Business Machines Corporation | Post-oxidation anneal of silicon dioxide |
JPS6463904A (en) * | 1987-09-03 | 1989-03-09 | Fujikura Ltd | Production of glass waveguide |
US4943558A (en) * | 1988-04-15 | 1990-07-24 | Ford Motor Company | Preparation of superconducting oxide films using a pre-oxygen nitrogen anneal |
DE69030822T2 (de) * | 1989-02-14 | 1997-11-27 | Seiko Epson Corp | Halbleitervorrichtung und Verfahren zu ihrer Herstellung |
EP0471845B1 (de) * | 1989-05-07 | 1995-11-15 | OHMI, Tadahiro | Verfahren zur herstellung eines siliziumoxydfilmes |
US5699035A (en) * | 1991-12-13 | 1997-12-16 | Symetrix Corporation | ZnO thin-film varistors and method of making the same |
US5610105A (en) * | 1992-10-23 | 1997-03-11 | Vlsi Technology, Inc. | Densification in an intermetal dielectric film |
US5851602A (en) * | 1993-12-09 | 1998-12-22 | Applied Materials, Inc. | Deposition of high quality conformal silicon oxide thin films for the manufacture of thin film transistors |
US5614270A (en) * | 1996-02-09 | 1997-03-25 | National Science Council | Method of improving electrical characteristics of a liquid phase deposited silicon dioxide film by plasma treatment |
GB2312525A (en) * | 1996-04-24 | 1997-10-29 | Northern Telecom Ltd | Providing cladding on planar optical waveguide by heating to flow |
GB2314346A (en) * | 1996-06-22 | 1997-12-24 | Northern Telecom Ltd | Rapid thermal annealing |
US5966627A (en) * | 1996-08-30 | 1999-10-12 | Lucent Technologies Inc. | In-situ doped silicon layers |
WO1999023690A1 (en) * | 1997-11-03 | 1999-05-14 | Asm America, Inc. | Method of processing wafers with low mass support |
-
2000
- 2000-12-12 GB GB0030236A patent/GB2370043A/en not_active Withdrawn
-
2001
- 2001-03-07 US US09/799,496 patent/US6537623B2/en not_active Expired - Fee Related
- 2001-12-06 AU AU2002215742A patent/AU2002215742A1/en not_active Abandoned
- 2001-12-06 WO PCT/CA2001/001753 patent/WO2002048429A1/en not_active Application Discontinuation
- 2001-12-06 EP EP01270640A patent/EP1404892B1/de not_active Expired - Lifetime
- 2001-12-06 AT AT01270640T patent/ATE527394T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US20020071914A1 (en) | 2002-06-13 |
EP1404892A1 (de) | 2004-04-07 |
GB0030236D0 (en) | 2001-01-24 |
EP1404892B1 (de) | 2011-10-05 |
US6537623B2 (en) | 2003-03-25 |
AU2002215742A1 (en) | 2002-06-24 |
WO2002048429A1 (en) | 2002-06-20 |
GB2370043A (en) | 2002-06-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |