ATE519136T1 - Laser-oberflächenbehandlung - Google Patents

Laser-oberflächenbehandlung

Info

Publication number
ATE519136T1
ATE519136T1 AT06006249T AT06006249T ATE519136T1 AT E519136 T1 ATE519136 T1 AT E519136T1 AT 06006249 T AT06006249 T AT 06006249T AT 06006249 T AT06006249 T AT 06006249T AT E519136 T1 ATE519136 T1 AT E519136T1
Authority
AT
Austria
Prior art keywords
optical material
metal film
surface treatment
laser surface
laser
Prior art date
Application number
AT06006249T
Other languages
English (en)
Inventor
Kenichiro Tanaka
Masayuki Fujita
Original Assignee
Panasonic Elec Works Co Ltd
Inst Laser Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Elec Works Co Ltd, Inst Laser Technology filed Critical Panasonic Elec Works Co Ltd
Application granted granted Critical
Publication of ATE519136T1 publication Critical patent/ATE519136T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/483—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using coherent light, UV to IR, e.g. lasers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Laser Beam Processing (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Lasers (AREA)
AT06006249T 2005-03-28 2006-03-27 Laser-oberflächenbehandlung ATE519136T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005093145A JP4791745B2 (ja) 2005-03-28 2005-03-28 光学媒質の光入出射部処理方法

Publications (1)

Publication Number Publication Date
ATE519136T1 true ATE519136T1 (de) 2011-08-15

Family

ID=36616874

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06006249T ATE519136T1 (de) 2005-03-28 2006-03-27 Laser-oberflächenbehandlung

Country Status (7)

Country Link
US (1) US8026459B2 (de)
EP (1) EP1707994B1 (de)
JP (1) JP4791745B2 (de)
KR (1) KR100774436B1 (de)
CN (1) CN100381838C (de)
AT (1) ATE519136T1 (de)
TW (1) TWI289209B (de)

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US12544854B2 (en) * 2017-10-25 2026-02-10 Nikon Corporation Processing apparatus, processing system, and manufacturing method of movable body
CN108680976B (zh) * 2018-07-25 2021-11-09 浙江夜光明光电科技股份有限公司 一种双色反光热贴膜的制作方法
DE102018221189A1 (de) * 2018-12-07 2020-06-10 Carl Zeiss Smt Gmbh Verfahren zum Bilden von Nanostrukturen an einer Oberfläche und optisches Element
CN113677619A (zh) * 2019-04-15 2021-11-19 脸谱科技有限责任公司 干法蚀刻中通过飞秒激光修饰衬底以实现可变蚀刻深度
WO2021013333A1 (en) * 2019-07-22 2021-01-28 Technische Hochschule Aschaffenburg Electrical connection pad with enhanced solderability and corresponding method for laser treating an electrical connection pad
JP6822699B1 (ja) * 2019-09-24 2021-01-27 フェニックス電機株式会社 レーザー照射装置、およびそれを用いた表面荒らし処理方法
CN111185678B (zh) * 2020-02-07 2021-07-27 吉林大学 一种在透明材料表面和内部制备镂空结构的方法
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Also Published As

Publication number Publication date
US20060213880A1 (en) 2006-09-28
EP1707994A1 (de) 2006-10-04
JP4791745B2 (ja) 2011-10-12
KR100774436B1 (ko) 2007-11-08
EP1707994B1 (de) 2011-08-03
CN100381838C (zh) 2008-04-16
TWI289209B (en) 2007-11-01
US8026459B2 (en) 2011-09-27
JP2006276282A (ja) 2006-10-12
TW200634329A (en) 2006-10-01
KR20060104938A (ko) 2006-10-09
CN1841097A (zh) 2006-10-04

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