ATE519091T1 - Optisches verschiebungsmessinstrument - Google Patents

Optisches verschiebungsmessinstrument

Info

Publication number
ATE519091T1
ATE519091T1 AT09162205T AT09162205T ATE519091T1 AT E519091 T1 ATE519091 T1 AT E519091T1 AT 09162205 T AT09162205 T AT 09162205T AT 09162205 T AT09162205 T AT 09162205T AT E519091 T1 ATE519091 T1 AT E519091T1
Authority
AT
Austria
Prior art keywords
light
light detector
detecting
detector
signals
Prior art date
Application number
AT09162205T
Other languages
English (en)
Inventor
Yutaka Miki
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Application granted granted Critical
Publication of ATE519091T1 publication Critical patent/ATE519091T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Eye Examination Apparatus (AREA)
AT09162205T 2008-06-13 2009-06-08 Optisches verschiebungsmessinstrument ATE519091T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008155283A JP5058080B2 (ja) 2008-06-13 2008-06-13 光学式変位測定器

Publications (1)

Publication Number Publication Date
ATE519091T1 true ATE519091T1 (de) 2011-08-15

Family

ID=40957835

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09162205T ATE519091T1 (de) 2008-06-13 2009-06-08 Optisches verschiebungsmessinstrument

Country Status (4)

Country Link
US (1) US8134718B2 (de)
EP (1) EP2133660B1 (de)
JP (1) JP5058080B2 (de)
AT (1) ATE519091T1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5437085B2 (ja) * 2010-01-06 2014-03-12 株式会社ミツトヨ 光ファイバ型磁界センサ
JP4919307B1 (ja) 2011-05-13 2012-04-18 レーザーテック株式会社 基板検査装置及びマスク検査装置
KR102062840B1 (ko) * 2014-10-31 2020-02-11 삼성전자주식회사 양안 시차를 이용한 물체 위치 검출 장치 및 그 장치의 동작 방법
CN105806709B (zh) * 2016-03-10 2021-04-27 北京航空航天大学 一种管材性能测试方法及设备
EP3441812B1 (de) * 2017-08-11 2020-07-01 Tecan Trading Ag Muster-basiertes autofokus-verfahren für ein mikroskop
US11529594B2 (en) 2018-11-15 2022-12-20 Bonne O Inc. Beverage carbonation system and beverage carbonator

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4713533A (en) * 1986-01-03 1987-12-15 Westinghouse Electric Corp. Concentric detector array and associated hybrid signal processing for coarse and fine electro-optical tracking
JP2592904B2 (ja) * 1988-05-06 1997-03-19 キヤノン株式会社 カメラ
JPH0634319A (ja) * 1992-07-21 1994-02-08 Mitsubishi Heavy Ind Ltd 光学式変位検出方法及び装置
JPH08128806A (ja) 1994-10-31 1996-05-21 Ricoh Co Ltd 光学式変位センサ
TW336311B (en) * 1997-10-15 1998-07-11 Ind Tech Res Inst Method and device for focusing and tracking of an optical head
JP2003207323A (ja) * 2002-01-16 2003-07-25 Mitsutoyo Corp 光学式変位測定器
JP4879636B2 (ja) * 2006-04-17 2012-02-22 株式会社ミツトヨ 光学装置、および、光学式変位測定器
JP2007332296A (ja) 2006-06-16 2007-12-27 Toray Ind Inc ポリオレフィン系再生樹脂組成物およびその製造方法
JP2008203093A (ja) 2007-02-20 2008-09-04 Mitsutoyo Corp 照明装置、画像測定装置
JP5057962B2 (ja) * 2007-12-25 2012-10-24 株式会社ミツトヨ 光学式変位測定器

Also Published As

Publication number Publication date
EP2133660A1 (de) 2009-12-16
JP5058080B2 (ja) 2012-10-24
US8134718B2 (en) 2012-03-13
JP2009300264A (ja) 2009-12-24
EP2133660B1 (de) 2011-08-03
US20090310147A1 (en) 2009-12-17

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Legal Events

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