ATE516625T1 - Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems) - Google Patents

Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems)

Info

Publication number
ATE516625T1
ATE516625T1 AT03775657T AT03775657T ATE516625T1 AT E516625 T1 ATE516625 T1 AT E516625T1 AT 03775657 T AT03775657 T AT 03775657T AT 03775657 T AT03775657 T AT 03775657T AT E516625 T1 ATE516625 T1 AT E516625T1
Authority
AT
Austria
Prior art keywords
mems
array
driving
elements
microelectromechanical system
Prior art date
Application number
AT03775657T
Other languages
English (en)
Inventor
Theodoor Rijks
Marco Matters
Beek Jozef Van
Original Assignee
Epcos Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos Ag filed Critical Epcos Ag
Application granted granted Critical
Publication of ATE516625T1 publication Critical patent/ATE516625T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/08—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance
    • H03B5/12—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance active element in amplifier being semiconductor device

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AT03775657T 2002-12-10 2003-12-01 Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems) ATE516625T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP02080219 2002-12-10
PCT/IB2003/005590 WO2004054088A2 (en) 2002-12-10 2003-12-01 Driving of an array of micro-electro-mechanical-system (mems) elements

Publications (1)

Publication Number Publication Date
ATE516625T1 true ATE516625T1 (de) 2011-07-15

Family

ID=32479772

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03775657T ATE516625T1 (de) 2002-12-10 2003-12-01 Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems)

Country Status (9)

Country Link
US (1) US20060050350A1 (de)
EP (1) EP1573894B1 (de)
JP (1) JP4555951B2 (de)
KR (1) KR101140689B1 (de)
CN (1) CN1723606B (de)
AT (1) ATE516625T1 (de)
AU (1) AU2003283676A1 (de)
TW (1) TW200507444A (de)
WO (1) WO2004054088A2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7550794B2 (en) 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
EP2444368A3 (de) * 2003-10-31 2012-07-25 Epcos AG Verfahren zur Herstellung einer elektronischen Vorrichtung und elektronische Vorrichtung
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7515147B2 (en) 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7560299B2 (en) 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7602375B2 (en) 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7545550B2 (en) * 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
BRPI0509575A (pt) 2004-09-27 2007-10-09 Idc Llc método e dispositivo para modulação de luz interferométrica de multi-estados
US7369296B2 (en) * 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
CN101048839B (zh) 2004-10-27 2010-11-17 爱普科斯公司 电子设备
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
EP2002511A4 (de) * 2006-03-08 2012-02-29 Wispry Inc Einstellbare impedanzabgleichsnetze und einstellbare diplexer-abgleichssysteme
US7957589B2 (en) 2007-01-25 2011-06-07 Qualcomm Mems Technologies, Inc. Arbitrary power function using logarithm lookup table
US20090002069A1 (en) * 2007-06-27 2009-01-01 Ntt Docomo, Inc. Variable circuit, communication apparatus, mobile communication apparatus and communication system
US20090201282A1 (en) * 2008-02-11 2009-08-13 Qualcomm Mems Technologies, Inc Methods of tuning interferometric modulator displays
US8258800B2 (en) * 2008-02-11 2012-09-04 Qualcomm Mems Technologies, Inc. Methods for measurement and characterization of interferometric modulators
US8466858B2 (en) * 2008-02-11 2013-06-18 Qualcomm Mems Technologies, Inc. Sensing to determine pixel state in a passively addressed display array
WO2009102620A2 (en) * 2008-02-11 2009-08-20 Qualcomm Mems Technologies Inc. Methods for measurement and characterization of interferometric modulators
KR20100121498A (ko) * 2008-02-11 2010-11-17 퀄컴 엠이엠스 테크놀로지스, 인크. 디스플레이 구동 체계가 통합된 표시소자의 감지, 측정 혹은 평가 방법 및 장치, 그리고 이를 이용한 시스템 및 용도
US7643305B2 (en) 2008-03-07 2010-01-05 Qualcomm Mems Technologies, Inc. System and method of preventing damage to metal traces of flexible printed circuits
JP5180683B2 (ja) * 2008-06-02 2013-04-10 太陽誘電株式会社 スイッチトキャパシタ
US7782522B2 (en) 2008-07-17 2010-08-24 Qualcomm Mems Technologies, Inc. Encapsulation methods for interferometric modulator and MEMS devices
WO2010011733A2 (en) * 2008-07-22 2010-01-28 Massachusetts Institute Of Technology Electro-mechanical switches and methods of use thereof
US8405649B2 (en) 2009-03-27 2013-03-26 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
DE102010014101B4 (de) 2010-04-07 2016-06-09 Epcos Ag Hybridschaltung mit einstellbarer Impedanz
US8253435B2 (en) * 2010-09-13 2012-08-28 Texas Instruments Incorporated Methods and apparatus to detect voltage conditions of power supplies
KR101383760B1 (ko) 2012-07-23 2014-04-10 서강대학교산학협력단 수평 구동형 전기기계 메모리 소자 및 그 제조방법
CN119271598A (zh) * 2023-07-07 2025-01-07 美光科技公司 基于微机电系统(mems)开关的接口
CN118670243B (zh) * 2024-07-04 2025-11-28 天津大学 基于变容二极管的电容式叶尖间隙测量系统的响应带宽测量装置及方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4242736A (en) * 1976-10-29 1980-12-30 Massachusetts Institute Of Technology Capacitor memory and methods for reading, writing, and fabricating capacitor memories
US4674180A (en) * 1984-05-01 1987-06-23 The Foxboro Company Method of making a micromechanical electric shunt
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7550794B2 (en) * 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
DE4437261C1 (de) * 1994-10-18 1995-10-19 Siemens Ag Mikromechanisches elektrostatisches Relais
US5578976A (en) * 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch
US5771321A (en) * 1996-01-04 1998-06-23 Massachusetts Institute Of Technology Micromechanical optical switch and flat panel display
US5872489A (en) * 1997-04-28 1999-02-16 Rockwell Science Center, Llc Integrated tunable inductance network and method
US5880921A (en) * 1997-04-28 1999-03-09 Rockwell Science Center, Llc Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology
JP3643508B2 (ja) * 1999-09-28 2005-04-27 株式会社東芝 可動フィルム型表示装置
FI109155B (fi) * 2000-04-13 2002-05-31 Nokia Corp Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi
US6495944B2 (en) * 2001-04-18 2002-12-17 International Business Machines Corporation Electrostatic microactuator with viscous liquid damping
US6574033B1 (en) * 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US6972881B1 (en) * 2002-11-21 2005-12-06 Nuelight Corp. Micro-electro-mechanical switch (MEMS) display panel with on-glass column multiplexers using MEMS as mux elements

Also Published As

Publication number Publication date
CN1723606B (zh) 2011-01-12
CN1723606A (zh) 2006-01-18
JP4555951B2 (ja) 2010-10-06
TW200507444A (en) 2005-02-16
KR20050085452A (ko) 2005-08-29
AU2003283676A1 (en) 2004-06-30
KR101140689B1 (ko) 2012-05-03
US20060050350A1 (en) 2006-03-09
WO2004054088A3 (en) 2004-12-02
WO2004054088A2 (en) 2004-06-24
EP1573894B1 (de) 2011-07-13
EP1573894A2 (de) 2005-09-14
JP2006509643A (ja) 2006-03-23

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