ATE516625T1 - Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems) - Google Patents

Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems)

Info

Publication number
ATE516625T1
ATE516625T1 AT03775657T AT03775657T ATE516625T1 AT E516625 T1 ATE516625 T1 AT E516625T1 AT 03775657 T AT03775657 T AT 03775657T AT 03775657 T AT03775657 T AT 03775657T AT E516625 T1 ATE516625 T1 AT E516625T1
Authority
AT
Austria
Prior art keywords
mems
array
driving
elements
microelectromechanical system
Prior art date
Application number
AT03775657T
Other languages
English (en)
Inventor
Theodoor Rijks
Marco Matters
Beek Jozef Van
Original Assignee
Epcos Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos Ag filed Critical Epcos Ag
Application granted granted Critical
Publication of ATE516625T1 publication Critical patent/ATE516625T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/08—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance
    • H03B5/12—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance active element in amplifier being semiconductor device

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AT03775657T 2002-12-10 2003-12-01 Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems) ATE516625T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP02080219 2002-12-10
PCT/IB2003/005590 WO2004054088A2 (en) 2002-12-10 2003-12-01 Driving of an array of micro-electro-mechanical-system (mems) elements

Publications (1)

Publication Number Publication Date
ATE516625T1 true ATE516625T1 (de) 2011-07-15

Family

ID=32479772

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03775657T ATE516625T1 (de) 2002-12-10 2003-12-01 Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems)

Country Status (9)

Country Link
US (1) US20060050350A1 (de)
EP (1) EP1573894B1 (de)
JP (1) JP4555951B2 (de)
KR (1) KR101140689B1 (de)
CN (1) CN1723606B (de)
AT (1) ATE516625T1 (de)
AU (1) AU2003283676A1 (de)
TW (1) TW200507444A (de)
WO (1) WO2004054088A2 (de)

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WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
KR101140688B1 (ko) * 2003-10-31 2012-05-03 에프코스 아게 전자 장치 및 그 제조 방법
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7486429B2 (en) 2004-09-27 2009-02-03 Idc, Llc Method and device for multistate interferometric light modulation
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7369296B2 (en) * 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
JP4907544B2 (ja) 2004-10-27 2012-03-28 エプコス アクチエンゲゼルシャフト 電子デバイス
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
CN101438366B (zh) * 2006-03-08 2011-10-26 维斯普瑞公司 微机电系统（mems）可变电容器、激励部件及相关方法
US7957589B2 (en) 2007-01-25 2011-06-07 Qualcomm Mems Technologies, Inc. Arbitrary power function using logarithm lookup table
KR100986966B1 (ko) * 2007-06-27 2010-10-11 가부시키가이샤 엔.티.티.도코모 가변 회로, 통신 장치, 이동 통신 장치, 통신 시스템
EP2252899A2 (de) * 2008-02-11 2010-11-24 QUALCOMM MEMS Technologies, Inc. Verfahren zur messung und kennzeichnung interferometrischer modulatoren
US20090201282A1 (en) * 2008-02-11 2009-08-13 Qualcomm Mems Technologies, Inc Methods of tuning interferometric modulator displays
WO2009102639A1 (en) * 2008-02-11 2009-08-20 Qualcomm Mems Technologies, Inc. Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same
US8466858B2 (en) * 2008-02-11 2013-06-18 Qualcomm Mems Technologies, Inc. Sensing to determine pixel state in a passively addressed display array
US8258800B2 (en) * 2008-02-11 2012-09-04 Qualcomm Mems Technologies, Inc. Methods for measurement and characterization of interferometric modulators
US7643305B2 (en) 2008-03-07 2010-01-05 Qualcomm Mems Technologies, Inc. System and method of preventing damage to metal traces of flexible printed circuits
JP5180683B2 (ja) * 2008-06-02 2013-04-10 太陽誘電株式会社 スイッチトキャパシタ
US7782522B2 (en) 2008-07-17 2010-08-24 Qualcomm Mems Technologies, Inc. Encapsulation methods for interferometric modulator and MEMS devices
WO2010011733A2 (en) * 2008-07-22 2010-01-28 Massachusetts Institute Of Technology Electro-mechanical switches and methods of use thereof
US8405649B2 (en) 2009-03-27 2013-03-26 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
DE102010014101B4 (de) 2010-04-07 2016-06-09 Epcos Ag Hybridschaltung mit einstellbarer Impedanz
US8253435B2 (en) * 2010-09-13 2012-08-28 Texas Instruments Incorporated Methods and apparatus to detect voltage conditions of power supplies
KR101383760B1 (ko) 2012-07-23 2014-04-10 서강대학교산학협력단 수평 구동형 전기기계 메모리 소자 및 그 제조방법

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US4674180A (en) * 1984-05-01 1987-06-23 The Foxboro Company Method of making a micromechanical electric shunt
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7550794B2 (en) * 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
DE4437261C1 (de) * 1994-10-18 1995-10-19 Siemens Ag Mikromechanisches elektrostatisches Relais
US5578976A (en) * 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch
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US5880921A (en) * 1997-04-28 1999-03-09 Rockwell Science Center, Llc Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology
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FI109155B (fi) * 2000-04-13 2002-05-31 Nokia Corp Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi
US6495944B2 (en) * 2001-04-18 2002-12-17 International Business Machines Corporation Electrostatic microactuator with viscous liquid damping
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Also Published As

Publication number Publication date
US20060050350A1 (en) 2006-03-09
AU2003283676A1 (en) 2004-06-30
CN1723606B (zh) 2011-01-12
EP1573894A2 (de) 2005-09-14
WO2004054088A3 (en) 2004-12-02
KR20050085452A (ko) 2005-08-29
EP1573894B1 (de) 2011-07-13
KR101140689B1 (ko) 2012-05-03
TW200507444A (en) 2005-02-16
CN1723606A (zh) 2006-01-18
WO2004054088A2 (en) 2004-06-24
JP4555951B2 (ja) 2010-10-06
JP2006509643A (ja) 2006-03-23

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