ATE516625T1 - Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems) - Google Patents

Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems)

Info

Publication number
ATE516625T1
ATE516625T1 AT03775657T AT03775657T ATE516625T1 AT E516625 T1 ATE516625 T1 AT E516625T1 AT 03775657 T AT03775657 T AT 03775657T AT 03775657 T AT03775657 T AT 03775657T AT E516625 T1 ATE516625 T1 AT E516625T1
Authority
AT
Austria
Prior art keywords
mems
array
driving
elements
microelectromechanical system
Prior art date
Application number
AT03775657T
Other languages
English (en)
Inventor
Theodoor Rijks
Marco Matters
Beek Jozef Van
Original Assignee
Epcos Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos Ag filed Critical Epcos Ag
Application granted granted Critical
Publication of ATE516625T1 publication Critical patent/ATE516625T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/08—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance
    • H03B5/12—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance active element in amplifier being semiconductor device

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AT03775657T 2002-12-10 2003-12-01 Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems) ATE516625T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP02080219 2002-12-10
PCT/IB2003/005590 WO2004054088A2 (en) 2002-12-10 2003-12-01 Driving of an array of micro-electro-mechanical-system (mems) elements

Publications (1)

Publication Number Publication Date
ATE516625T1 true ATE516625T1 (de) 2011-07-15

Family

ID=32479772

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03775657T ATE516625T1 (de) 2002-12-10 2003-12-01 Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems)

Country Status (9)

Country Link
US (1) US20060050350A1 (de)
EP (1) EP1573894B1 (de)
JP (1) JP4555951B2 (de)
KR (1) KR101140689B1 (de)
CN (1) CN1723606B (de)
AT (1) ATE516625T1 (de)
AU (1) AU2003283676A1 (de)
TW (1) TW200507444A (de)
WO (1) WO2004054088A2 (de)

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US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
JP4744449B2 (ja) * 2003-10-31 2011-08-10 エプコス アーゲー 電子デバイスの製造方法及び電子デバイス
US7560299B2 (en) 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7515147B2 (en) 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7602375B2 (en) 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7369296B2 (en) * 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
EP1800173A1 (de) 2004-09-27 2007-06-27 Idc, Llc Verfahren und einrichtung zur interferometrischen mehrzustands-lichtmodulation
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US8203402B2 (en) 2004-10-27 2012-06-19 Epcos Ag Electronic device
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7907033B2 (en) * 2006-03-08 2011-03-15 Wispry, Inc. Tunable impedance matching networks and tunable diplexer matching systems
US7957589B2 (en) 2007-01-25 2011-06-07 Qualcomm Mems Technologies, Inc. Arbitrary power function using logarithm lookup table
KR100986966B1 (ko) * 2007-06-27 2010-10-11 가부시키가이샤 엔.티.티.도코모 가변 회로, 통신 장치, 이동 통신 장치, 통신 시스템
US8466858B2 (en) * 2008-02-11 2013-06-18 Qualcomm Mems Technologies, Inc. Sensing to determine pixel state in a passively addressed display array
US8258800B2 (en) * 2008-02-11 2012-09-04 Qualcomm Mems Technologies, Inc. Methods for measurement and characterization of interferometric modulators
US20090201282A1 (en) * 2008-02-11 2009-08-13 Qualcomm Mems Technologies, Inc Methods of tuning interferometric modulator displays
RU2526763C2 (ru) * 2008-02-11 2014-08-27 Квалкомм Мемс Текнолоджис, Инк. Способ и устройство считывания, измерения или определения параметров дисплейных элементов, объединенных со схемой управления дисплеем, а также система, в которой применены такие способ и устройство
KR20100126352A (ko) * 2008-02-11 2010-12-01 퀄컴 엠이엠스 테크놀로지스, 인크. 간섭계 변조기의 측정 및 평가 방법
US7643305B2 (en) 2008-03-07 2010-01-05 Qualcomm Mems Technologies, Inc. System and method of preventing damage to metal traces of flexible printed circuits
JP5180683B2 (ja) * 2008-06-02 2013-04-10 太陽誘電株式会社 スイッチトキャパシタ
US7782522B2 (en) 2008-07-17 2010-08-24 Qualcomm Mems Technologies, Inc. Encapsulation methods for interferometric modulator and MEMS devices
US8441081B2 (en) * 2008-07-22 2013-05-14 William Jay Arora Electro-mechanical switches and methods of use thereof
US8405649B2 (en) 2009-03-27 2013-03-26 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
DE102010014101B4 (de) 2010-04-07 2016-06-09 Epcos Ag Hybridschaltung mit einstellbarer Impedanz
US8253435B2 (en) * 2010-09-13 2012-08-28 Texas Instruments Incorporated Methods and apparatus to detect voltage conditions of power supplies
KR101383760B1 (ko) 2012-07-23 2014-04-10 서강대학교산학협력단 수평 구동형 전기기계 메모리 소자 및 그 제조방법
CN119271598A (zh) * 2023-07-07 2025-01-07 美光科技公司 基于微机电系统(mems)开关的接口
CN118670243B (zh) * 2024-07-04 2025-11-28 天津大学 基于变容二极管的电容式叶尖间隙测量系统的响应带宽测量装置及方法

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Also Published As

Publication number Publication date
EP1573894B1 (de) 2011-07-13
CN1723606B (zh) 2011-01-12
JP4555951B2 (ja) 2010-10-06
WO2004054088A2 (en) 2004-06-24
CN1723606A (zh) 2006-01-18
KR101140689B1 (ko) 2012-05-03
US20060050350A1 (en) 2006-03-09
EP1573894A2 (de) 2005-09-14
JP2006509643A (ja) 2006-03-23
KR20050085452A (ko) 2005-08-29
AU2003283676A1 (en) 2004-06-30
TW200507444A (en) 2005-02-16
WO2004054088A3 (en) 2004-12-02

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