ATE511075T1 - Interferometrische vorrichtung zum messen von formen - Google Patents

Interferometrische vorrichtung zum messen von formen

Info

Publication number
ATE511075T1
ATE511075T1 AT05003800T AT05003800T ATE511075T1 AT E511075 T1 ATE511075 T1 AT E511075T1 AT 05003800 T AT05003800 T AT 05003800T AT 05003800 T AT05003800 T AT 05003800T AT E511075 T1 ATE511075 T1 AT E511075T1
Authority
AT
Austria
Prior art keywords
light
interference
signal
interference light
intensity
Prior art date
Application number
AT05003800T
Other languages
English (en)
Inventor
Kinpui Chan
Masahiro Akiba
Yasufumi Fukuma
Hiroyuki Otsuka
Hisashi Tsukada
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Application granted granted Critical
Publication of ATE511075T1 publication Critical patent/ATE511075T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02012—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
AT05003800T 2004-02-26 2005-02-22 Interferometrische vorrichtung zum messen von formen ATE511075T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004052195A JP4381847B2 (ja) 2004-02-26 2004-02-26 光画像計測装置

Publications (1)

Publication Number Publication Date
ATE511075T1 true ATE511075T1 (de) 2011-06-15

Family

ID=34747521

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05003800T ATE511075T1 (de) 2004-02-26 2005-02-22 Interferometrische vorrichtung zum messen von formen

Country Status (5)

Country Link
US (1) US7245383B2 (de)
EP (1) EP1568963B1 (de)
JP (1) JP4381847B2 (de)
CN (1) CN100498294C (de)
AT (1) ATE511075T1 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4409331B2 (ja) * 2004-03-30 2010-02-03 株式会社トプコン 光画像計測装置
JP4633423B2 (ja) * 2004-09-15 2011-02-16 株式会社トプコン 光画像計測装置
JP4566685B2 (ja) * 2004-10-13 2010-10-20 株式会社トプコン 光画像計測装置及び光画像計測方法
JP4916779B2 (ja) * 2005-09-29 2012-04-18 株式会社トプコン 眼底観察装置
WO2007066465A1 (ja) * 2005-12-07 2007-06-14 Kabushiki Kaisha Topcon 光画像計測装置
DE102006000946B4 (de) * 2006-01-07 2007-11-15 Isra Vision Systems Ag Verfahren und System zur Inspektion einer periodischen Struktur
EP1806092A1 (de) 2006-01-10 2007-07-11 Kabushiki Kaisha TOPCON Fundusbeoabachtungsgerät
JP4823693B2 (ja) 2006-01-11 2011-11-24 株式会社トプコン 光画像計測装置
JP4884777B2 (ja) 2006-01-11 2012-02-29 株式会社トプコン 眼底観察装置
JP4890878B2 (ja) 2006-02-16 2012-03-07 株式会社トプコン 眼底観察装置
JP4869756B2 (ja) 2006-03-24 2012-02-08 株式会社トプコン 眼底観察装置
JP4869757B2 (ja) 2006-03-24 2012-02-08 株式会社トプコン 眼底観察装置
JP4864515B2 (ja) 2006-04-07 2012-02-01 株式会社トプコン 眼底観察装置
JP4864516B2 (ja) 2006-04-07 2012-02-01 株式会社トプコン 眼科装置
US7800761B2 (en) * 2006-04-12 2010-09-21 Massachusetts Institute Of Technology Infrared interferometric-spatial-phase imaging using backside wafer marks
JP4855150B2 (ja) * 2006-06-09 2012-01-18 株式会社トプコン 眼底観察装置、眼科画像処理装置及び眼科画像処理プログラム
JP4969925B2 (ja) 2006-06-28 2012-07-04 株式会社トプコン 眼底観察装置
JP5085086B2 (ja) 2006-10-04 2012-11-28 株式会社トプコン 眼底観察装置、眼底画像表示装置及びプログラム
JP5007114B2 (ja) 2006-12-22 2012-08-22 株式会社トプコン 眼底観察装置、眼底画像表示装置及びプログラム
EP1950526B1 (de) 2007-01-26 2010-03-10 Kabushiki Kaisha TOPCON Optisches Bildmessgerät
JP4921201B2 (ja) 2007-02-23 2012-04-25 株式会社トプコン 光画像計測装置及び光画像計測装置を制御するプログラム
JP5058627B2 (ja) 2007-02-26 2012-10-24 株式会社トプコン 眼底観察装置
JP5061380B2 (ja) 2007-03-23 2012-10-31 株式会社トプコン 眼底観察装置、眼科画像表示装置及びプログラム
JP5523658B2 (ja) 2007-03-23 2014-06-18 株式会社トプコン 光画像計測装置
FR2959305B1 (fr) * 2010-04-26 2014-09-05 Nanotec Solution Dispositif optique et procede d'inspection d'objets structures.
US20120050746A1 (en) * 2010-08-29 2012-03-01 Shivani Sharma Apparatus and method for increasing depth range and signal to noise ratio in fourier domain low coherence interferometry
JP5367047B2 (ja) * 2011-10-24 2013-12-11 株式会社トプコン 眼底観察装置
CN102506755B (zh) * 2011-11-15 2014-07-30 上海大学 基于方向频谱分离的数字全息层析图像记录装置
JP6387589B2 (ja) * 2013-08-30 2018-09-12 株式会社リコー 画像形成装置、車両、及び画像形成装置の制御方法
FR3033643B1 (fr) * 2015-03-13 2020-07-17 Unity Semiconductor Dispositif et procede pour detecter des defauts dans des zones de liaison entre des echantillons tels que des wafers
CN107431080B (zh) * 2015-03-30 2020-07-07 株式会社尼康 拍摄元件及拍摄装置
WO2019166190A1 (en) 2018-02-27 2019-09-06 Stichting Vu Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
CN112154320B (zh) * 2018-06-11 2023-10-20 株式会社岛津制作所 缺陷检测方法以及装置
JP2022131026A (ja) * 2021-02-26 2022-09-07 セイコーエプソン株式会社 レーザー干渉計

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6381015B1 (en) * 1997-05-26 2002-04-30 Hitachi, Ltd. Inspection apparatus using optical interferometer
JP3245135B2 (ja) * 1999-08-26 2002-01-07 科学技術振興事業団 光計測装置
JP3426552B2 (ja) * 2000-02-18 2003-07-14 株式会社ミツトヨ 形状計測装置
JP3594875B2 (ja) * 2000-05-25 2004-12-02 独立行政法人 科学技術振興機構 ２次元光ヘテロダイン検出法を用いた光画像計測装置
US7133137B2 (en) * 2002-06-27 2006-11-07 Visx, Incorporated Integrated scanning and ocular tomography system and method

Also Published As

Publication number Publication date
JP4381847B2 (ja) 2009-12-09
CN1661358A (zh) 2005-08-31
US7245383B2 (en) 2007-07-17
CN100498294C (zh) 2009-06-10
EP1568963B1 (de) 2011-05-25
EP1568963A2 (de) 2005-08-31
US20050190374A1 (en) 2005-09-01
JP2005241464A (ja) 2005-09-08
EP1568963A3 (de) 2006-09-13

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