ATE507573T1 - Kanone für geladene teilchen - Google Patents

Kanone für geladene teilchen

Info

Publication number
ATE507573T1
ATE507573T1 AT05739271T AT05739271T ATE507573T1 AT E507573 T1 ATE507573 T1 AT E507573T1 AT 05739271 T AT05739271 T AT 05739271T AT 05739271 T AT05739271 T AT 05739271T AT E507573 T1 ATE507573 T1 AT E507573T1
Authority
AT
Austria
Prior art keywords
charged particle
adaptor
emitter
particle cannon
receiving
Prior art date
Application number
AT05739271T
Other languages
English (en)
Inventor
Tao Zhang
Original Assignee
Nanobeam Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanobeam Ltd filed Critical Nanobeam Ltd
Application granted granted Critical
Publication of ATE507573T1 publication Critical patent/ATE507573T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/027—Construction of the gun or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/16—Cathodes heated directly by an electric current characterised by the shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/18—Supports; Vibration-damping arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Catching Or Destruction (AREA)
  • Manufacturing Of Micro-Capsules (AREA)
AT05739271T 2004-06-03 2005-05-13 Kanone für geladene teilchen ATE507573T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0412426A GB2414856B (en) 2004-06-03 2004-06-03 Charged particle gun
PCT/GB2005/050063 WO2005119723A1 (en) 2004-06-03 2005-05-13 Charged particle gun

Publications (1)

Publication Number Publication Date
ATE507573T1 true ATE507573T1 (de) 2011-05-15

Family

ID=32696628

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05739271T ATE507573T1 (de) 2004-06-03 2005-05-13 Kanone für geladene teilchen

Country Status (11)

Country Link
US (1) US7855373B2 (de)
EP (1) EP1751783B1 (de)
JP (1) JP4778962B2 (de)
KR (1) KR20070033413A (de)
CN (1) CN101019201B (de)
AT (1) ATE507573T1 (de)
DE (1) DE602005027687D1 (de)
GB (1) GB2414856B (de)
IL (1) IL179664A (de)
TW (1) TWI414212B (de)
WO (1) WO2005119723A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010049062A1 (de) * 2010-10-20 2012-04-26 Volodymyr Granovskyy Einrichtung zur visuellen Kontrolle der Positionsjustierung der Kathode einer elektronischen Kanone für ein Elektronenmikroskop (Rastermikroskop)
KR102120946B1 (ko) * 2018-11-16 2020-06-10 (주)엠크래프츠 전자빔 자동정렬구조가 구비된 전자현미경
CN110931328B (zh) * 2019-12-06 2022-04-19 中国电子科技集团公司第十二研究所 一种阴极热子组件

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL271319A (de) * 1960-11-14
US3967150A (en) * 1975-01-31 1976-06-29 Varian Associates Grid controlled electron source and method of making same
US4082937A (en) * 1977-05-10 1978-04-04 Evgeny Ivanovich Istomin Cathode assembly of electron beam welding gun
JPS6025857B2 (ja) * 1979-05-17 1985-06-20 電気化学工業株式会社 電子銃
NL8800539A (nl) * 1988-03-03 1989-10-02 Philips Nv Elektronen bundel apparaat.
JPH01260742A (ja) * 1988-04-11 1989-10-18 Mitsubishi Electric Corp 荷電ビーム銃
JP2775071B2 (ja) * 1989-02-22 1998-07-09 日本電信電話株式会社 荷電粒子ビーム発生装置
DE3930203A1 (de) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh Katodenhalter fuer einen elektronenstrahlerzeuger
JPH0573054U (ja) * 1992-03-11 1993-10-05 株式会社小松製作所 掘削刃取付装置
JPH0917365A (ja) * 1995-06-30 1997-01-17 Jeol Ltd 電界放射型電子銃
US5834781A (en) 1996-02-14 1998-11-10 Hitachi, Ltd. Electron source and electron beam-emitting apparatus equipped with same
JP3697371B2 (ja) * 1999-09-07 2005-09-21 株式会社日研工作所 エンドミルチャッキング構造
JP2001023504A (ja) * 1999-07-05 2001-01-26 Hitachi Ltd 陰極線管
US6559407B2 (en) * 2001-04-05 2003-05-06 Ford Global Technologies, Inc. Cathode assembly for an electric arc spray apparatus

Also Published As

Publication number Publication date
DE602005027687D1 (de) 2011-06-09
GB2414856B (en) 2008-11-12
GB0412426D0 (en) 2004-07-07
JP2008502100A (ja) 2008-01-24
TWI414212B (zh) 2013-11-01
EP1751783A1 (de) 2007-02-14
TW200603683A (en) 2006-01-16
CN101019201B (zh) 2010-12-22
US7855373B2 (en) 2010-12-21
EP1751783B1 (de) 2011-04-27
JP4778962B2 (ja) 2011-09-21
IL179664A0 (en) 2007-05-15
GB2414856A (en) 2005-12-07
US20080251736A1 (en) 2008-10-16
IL179664A (en) 2010-12-30
CN101019201A (zh) 2007-08-15
WO2005119723A1 (en) 2005-12-15
KR20070033413A (ko) 2007-03-26

Similar Documents

Publication Publication Date Title
TW200714122A (en) A diamond field emission tip and a method of formation
MY182795A (en) Method for mounting an endpiece for securing a flexible tubular pipe and apparatus for implementing same
TW200802506A (en) Method of making field emission cathode component with vertical carbon nano tube array and product thereof
GB2432866A (en) Expandable tubular
FR3021242B1 (fr) Ensemble support de douilles
ATE464204T1 (de) Gehäuse angepasst zum befestigen einer entnehmbaren medienquelle an einem fahrzeugsitz
PL2134311T3 (pl) Zespoły wielodawkowej fiolki i ich nasadki
GB0408910D0 (en) Device for air cleaning
WO2008127895A3 (en) Methods and systems of selecting functionality of a portable computer
WO2006113881A3 (en) Method of using stroma cells from cord blood to expand and engraft nucleated cells from cord blood
WO2007021864A3 (en) Methods and apparatuses for generating a seal between a conduit and a reservoir well
RS50832B (sr) Agens oleogela sa sadržajem triterpena, oleogel sa sadržajem triterpena i postupak za proizvodnju oleogela sa sadržajem triterpena
AU2011236645A8 (en) An adapter for a light fitting
GB2432605A (en) Expandable tubular
HK1123339A1 (en) Air spring assembly and method
HK1123085A1 (en) Air spring assembly with non-threaded connection
AR066649A1 (es) Reovirus mutantes y metodos de elaboracion y uso de los mismos
WO2008103733A3 (en) Gas ionizer
ATE507573T1 (de) Kanone für geladene teilchen
EP2402116A3 (de) Bohrspitzen- oder Befestigungstreiber
MX2021000877A (es) Ensamble de suspension.
PL1976641T3 (pl) Sposób i urządzenie do układu do dostarczania proszku
EP3882481A3 (de) Mehrteilige drehmomentröhrenanordnung zur verringerung von schwingungen
MX2010002092A (es) Construccion mejorada de soporte de orificio.
ATE431907T1 (de) Hülse und damit versehenes bauteil

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties