ATE506597T1 - Pneumatischer sensor mit erhöhter druckempfindlichkeit durch düsenoberflächenrauhigkeit - Google Patents

Pneumatischer sensor mit erhöhter druckempfindlichkeit durch düsenoberflächenrauhigkeit

Info

Publication number
ATE506597T1
ATE506597T1 AT08159163T AT08159163T ATE506597T1 AT E506597 T1 ATE506597 T1 AT E506597T1 AT 08159163 T AT08159163 T AT 08159163T AT 08159163 T AT08159163 T AT 08159163T AT E506597 T1 ATE506597 T1 AT E506597T1
Authority
AT
Austria
Prior art keywords
gas
nozzle
surface roughness
increased pressure
nozzle surface
Prior art date
Application number
AT08159163T
Other languages
English (en)
Inventor
Herman Vogel
Original Assignee
Asml Holding Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Holding Nv filed Critical Asml Holding Nv
Application granted granted Critical
Publication of ATE506597T1 publication Critical patent/ATE506597T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/12—Measuring arrangements characterised by the use of fluids for measuring distance or clearance between spaced objects or spaced apertures
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06C—FINISHING, DRESSING, TENTERING OR STRETCHING TEXTILE FABRICS
    • D06C13/00—Shearing, clipping or cropping surfaces of textile fabrics; Pile cutting; Trimming seamed edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/02—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Fluid Pressure (AREA)
AT08159163T 2007-06-27 2008-06-27 Pneumatischer sensor mit erhöhter druckempfindlichkeit durch düsenoberflächenrauhigkeit ATE506597T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/769,421 US7578168B2 (en) 2007-06-27 2007-06-27 Increasing gas gauge pressure sensitivity using nozzle-face surface roughness

Publications (1)

Publication Number Publication Date
ATE506597T1 true ATE506597T1 (de) 2011-05-15

Family

ID=39705297

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08159163T ATE506597T1 (de) 2007-06-27 2008-06-27 Pneumatischer sensor mit erhöhter druckempfindlichkeit durch düsenoberflächenrauhigkeit

Country Status (9)

Country Link
US (1) US7578168B2 (de)
EP (1) EP2009391B1 (de)
JP (1) JP5155031B2 (de)
KR (1) KR100994542B1 (de)
CN (1) CN101334273B (de)
AT (1) ATE506597T1 (de)
DE (1) DE602008006298D1 (de)
SG (1) SG148932A1 (de)
TW (1) TWI385367B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102282430B (zh) * 2009-02-03 2014-08-20 益科博能源科技有限公司 一种二维聚光器太阳能聚集系统和方法
CN101586949B (zh) * 2009-05-20 2012-10-17 大连现代辅机开发制造有限公司 定位销切换、检测方法及装置
KR101321322B1 (ko) * 2011-04-22 2013-10-23 시바우라 메카트로닉스 가부시끼가이샤 기판 반송 장치 및 반송 방법
GB2509323B (en) * 2012-12-28 2015-01-07 Glide Talk Ltd Reduced latency server-mediated audio-video communication
CN105352456A (zh) * 2015-11-10 2016-02-24 常州市西夏墅企业创新发展中心 一种厚度测量装置
JP6883325B2 (ja) * 2017-08-09 2021-06-09 アドバンス電気工業株式会社 液マイクロメータ
WO2020064240A1 (en) * 2018-09-27 2020-04-02 Asml Netherlands B.V. A level sensor and a lithographic apparatus incorporating a level sensor
WO2020094369A1 (en) 2018-11-05 2020-05-14 Asml Holding N.V. Apparatus for and method of measuring distortion of a patterning device in a photolithographic apparatus

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Also Published As

Publication number Publication date
EP2009391B1 (de) 2011-04-20
KR100994542B1 (ko) 2010-11-15
TWI385367B (zh) 2013-02-11
US7578168B2 (en) 2009-08-25
JP5155031B2 (ja) 2013-02-27
JP2009008677A (ja) 2009-01-15
SG148932A1 (en) 2009-01-29
CN101334273B (zh) 2012-12-19
US20090000353A1 (en) 2009-01-01
EP2009391A1 (de) 2008-12-31
CN101334273A (zh) 2008-12-31
KR20080114616A (ko) 2008-12-31
TW200912268A (en) 2009-03-16
DE602008006298D1 (de) 2011-06-01

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