ATE491226T1 - Verfahren zur übertragung einer schicht auf ein flüssiges material - Google Patents
Verfahren zur übertragung einer schicht auf ein flüssiges materialInfo
- Publication number
- ATE491226T1 ATE491226T1 AT08786871T AT08786871T ATE491226T1 AT E491226 T1 ATE491226 T1 AT E491226T1 AT 08786871 T AT08786871 T AT 08786871T AT 08786871 T AT08786871 T AT 08786871T AT E491226 T1 ATE491226 T1 AT E491226T1
- Authority
- AT
- Austria
- Prior art keywords
- layer
- transferring
- liquid material
- support
- onto
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 239000011344 liquid material Substances 0.000 title 1
- 239000007788 liquid Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000003486 chemical etching Methods 0.000 abstract 1
- 230000010070 molecular adhesion Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
- H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Recrystallisation Techniques (AREA)
- Laminated Bodies (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Saccharide Compounds (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Decoration By Transfer Pictures (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0756983A FR2919958B1 (fr) | 2007-08-07 | 2007-08-07 | Procede de report d'une couche sur un materiau liquide |
PCT/EP2008/060261 WO2009019265A2 (fr) | 2007-08-07 | 2008-08-05 | Procede de report d'une couche sur un materiau liquide |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE491226T1 true ATE491226T1 (de) | 2010-12-15 |
Family
ID=39092047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT08786871T ATE491226T1 (de) | 2007-08-07 | 2008-08-05 | Verfahren zur übertragung einer schicht auf ein flüssiges material |
Country Status (7)
Country | Link |
---|---|
US (1) | US8039370B2 (de) |
EP (1) | EP2174346B1 (de) |
JP (1) | JP2010535651A (de) |
AT (1) | ATE491226T1 (de) |
DE (1) | DE602008003933D1 (de) |
FR (1) | FR2919958B1 (de) |
WO (1) | WO2009019265A2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2960340B1 (fr) * | 2010-05-21 | 2012-06-29 | Commissariat Energie Atomique | Procede de realisation d'un support de substrat |
FR3041812A1 (fr) * | 2015-09-30 | 2017-03-31 | Commissariat Energie Atomique | Procede de formation d’une portion semiconductrice par croissance epitaxiale sur une portion contrainte |
FR3041811B1 (fr) * | 2015-09-30 | 2017-10-27 | Commissariat Energie Atomique | Procede de realisation d’une structure semiconductrice comportant une portion contrainte |
CN112599468B (zh) * | 2020-12-31 | 2022-10-14 | 福建江夏学院 | 一种基于溶剂处理制备二硫化钼薄层及其薄膜晶体管的方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0441270B1 (de) * | 1990-02-07 | 1995-11-15 | Harris Corporation | Löten von Wafern unter Verwendung von eingeschlossenem oxydierendem Dampf |
US6214733B1 (en) * | 1999-11-17 | 2001-04-10 | Elo Technologies, Inc. | Process for lift off and handling of thin film materials |
US6746777B1 (en) * | 2000-05-31 | 2004-06-08 | Applied Optoelectronics, Inc. | Alternative substrates for epitaxial growth |
FR2895562B1 (fr) * | 2005-12-27 | 2008-03-28 | Commissariat Energie Atomique | Procede de relaxation d'une couche mince contrainte |
-
2007
- 2007-08-07 FR FR0756983A patent/FR2919958B1/fr not_active Expired - Fee Related
-
2008
- 2008-08-05 WO PCT/EP2008/060261 patent/WO2009019265A2/fr active Application Filing
- 2008-08-05 JP JP2010519449A patent/JP2010535651A/ja active Pending
- 2008-08-05 DE DE602008003933T patent/DE602008003933D1/de active Active
- 2008-08-05 EP EP08786871A patent/EP2174346B1/de not_active Not-in-force
- 2008-08-05 US US12/672,001 patent/US8039370B2/en not_active Expired - Fee Related
- 2008-08-05 AT AT08786871T patent/ATE491226T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
FR2919958A1 (fr) | 2009-02-13 |
WO2009019265A3 (fr) | 2009-05-22 |
EP2174346B1 (de) | 2010-12-08 |
JP2010535651A (ja) | 2010-11-25 |
DE602008003933D1 (de) | 2011-01-20 |
US8039370B2 (en) | 2011-10-18 |
EP2174346A2 (de) | 2010-04-14 |
WO2009019265A2 (fr) | 2009-02-12 |
FR2919958B1 (fr) | 2009-12-18 |
US20110177676A1 (en) | 2011-07-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |