ATE487807T1 - Plasmareaktor - Google Patents
PlasmareaktorInfo
- Publication number
- ATE487807T1 ATE487807T1 AT06779552T AT06779552T ATE487807T1 AT E487807 T1 ATE487807 T1 AT E487807T1 AT 06779552 T AT06779552 T AT 06779552T AT 06779552 T AT06779552 T AT 06779552T AT E487807 T1 ATE487807 T1 AT E487807T1
- Authority
- AT
- Austria
- Prior art keywords
- resonant cavity
- plasma reactor
- gas
- plasma
- gas outlet
- Prior art date
Links
- 150000002500 ions Chemical class 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/007—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by irradiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/122—Incoherent waves
- B01J19/126—Microwaves
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/806—Microwaves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0809—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0869—Feeding or evacuating the reactor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0871—Heating or cooling of the reactor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0873—Materials to be treated
- B01J2219/0875—Gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0873—Materials to be treated
- B01J2219/0881—Two or more materials
- B01J2219/0883—Gas-gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1209—Features relating to the reactor or vessel
- B01J2219/1221—Features relating to the reactor or vessel the reactor per se
- B01J2219/1224—Form of the reactor
- B01J2219/1227—Reactors comprising tubes with open ends
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1209—Features relating to the reactor or vessel
- B01J2219/1221—Features relating to the reactor or vessel the reactor per se
- B01J2219/1239—Means for feeding and evacuation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1209—Features relating to the reactor or vessel
- B01J2219/1221—Features relating to the reactor or vessel the reactor per se
- B01J2219/1242—Materials of construction
- B01J2219/1245—Parts of the reactor being microwave absorbing, dielectric
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1248—Features relating to the microwave cavity
- B01J2219/1266—Microwave deflecting parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1248—Features relating to the microwave cavity
- B01J2219/1269—Microwave guides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1248—Features relating to the microwave cavity
- B01J2219/1272—Materials of construction
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Toxicology (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Treating Waste Gases (AREA)
- Plasma Technology (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0521830.0A GB0521830D0 (en) | 2005-10-26 | 2005-10-26 | Plasma reactor |
PCT/GB2006/003578 WO2007048994A1 (en) | 2005-10-26 | 2006-09-26 | Plasma reactor |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE487807T1 true ATE487807T1 (de) | 2010-11-15 |
Family
ID=35515752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT06779552T ATE487807T1 (de) | 2005-10-26 | 2006-09-26 | Plasmareaktor |
Country Status (10)
Country | Link |
---|---|
US (1) | US8168128B2 (de) |
EP (1) | EP1937870B1 (de) |
JP (1) | JP5379482B2 (de) |
KR (1) | KR20080060255A (de) |
CN (1) | CN101297062B (de) |
AT (1) | ATE487807T1 (de) |
DE (1) | DE602006018173D1 (de) |
GB (1) | GB0521830D0 (de) |
TW (1) | TWI442836B (de) |
WO (1) | WO2007048994A1 (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0522088D0 (en) * | 2005-10-28 | 2005-12-07 | Boc Group Plc | Plasma abatement device |
US8863495B2 (en) | 2007-07-12 | 2014-10-21 | Imagineering, Inc. | Ignition/chemical reaction promotion/flame holding device, speed-type internal combustion engine, and furnace |
WO2009008519A1 (ja) * | 2007-07-12 | 2009-01-15 | Imagineering, Inc. | ガス処理装置、ガス処理システム及びガス処理方法、並びにそれを用いた排気ガス処理システム及び内燃機関 |
CN101888860B (zh) * | 2007-11-06 | 2013-07-17 | 克里奥医药有限公司 | 羟基产生等离子体灭菌设备 |
JP5374691B2 (ja) | 2008-03-14 | 2013-12-25 | イマジニアリング株式会社 | 複数放電のプラズマ装置 |
CN101496992B (zh) * | 2009-01-15 | 2011-09-07 | 大连海事大学 | 去除全氟碳化物气体的系统和方法 |
FR2952786B1 (fr) * | 2009-11-17 | 2012-06-08 | Centre Nat Rech Scient | Torche a plasma et procede de stabilisation d'une torche a plasma |
US9500362B2 (en) | 2010-01-21 | 2016-11-22 | Powerdyne, Inc. | Generating steam from carbonaceous material |
EP2892984A4 (de) | 2012-09-05 | 2016-05-11 | Powerdyne Inc | System zur erzeugung von brennstoffmateralien mit fischer-tropsch-katalysatoren und plasmaquellen |
BR112015004834A2 (pt) | 2012-09-05 | 2017-07-04 | Powerdyne Inc | método para produzir combustível |
US9765270B2 (en) | 2012-09-05 | 2017-09-19 | Powerdyne, Inc. | Fuel generation using high-voltage electric fields methods |
US9410452B2 (en) | 2012-09-05 | 2016-08-09 | Powerdyne, Inc. | Fuel generation using high-voltage electric fields methods |
WO2014039706A1 (en) | 2012-09-05 | 2014-03-13 | Powerdyne, Inc. | Methods for power generation from h2o, co2, o2 and a carbon feed stock |
KR20150052257A (ko) | 2012-09-05 | 2015-05-13 | 파워다인, 인코포레이티드 | 플라즈마 소스들을 사용하여 수소가스를 발생시키기 위한 방법 |
WO2014039723A1 (en) | 2012-09-05 | 2014-03-13 | Powerdyne, Inc. | Method for sequestering heavy metal particulates using h2o, co2, o2, and a source of particulates |
CN103657370B (zh) * | 2012-09-07 | 2015-09-30 | 韩国能量技术研究院 | 利用微波等离子体的硫化氢及硫化羰去除装置及方法 |
US9427821B2 (en) | 2013-03-15 | 2016-08-30 | Agilent Technologies, Inc. | Integrated magnetron plasma torch, and related methods |
US10987735B2 (en) | 2015-12-16 | 2021-04-27 | 6K Inc. | Spheroidal titanium metallic powders with custom microstructures |
CN108883407A (zh) | 2015-12-16 | 2018-11-23 | 阿马斯坦技术有限责任公司 | 球状脱氢金属和金属合金颗粒 |
JP2019029333A (ja) * | 2017-07-26 | 2019-02-21 | 東芝メモリ株式会社 | プラズマ処理装置および半導体装置の製造方法 |
CA3104080A1 (en) | 2018-06-19 | 2019-12-26 | 6K Inc. | Process for producing spheroidized powder from feedstock materials |
CA3134579A1 (en) | 2019-04-30 | 2020-11-05 | Gregory Wrobel | Lithium lanthanum zirconium oxide (llzo) powder |
AU2020264446A1 (en) | 2019-04-30 | 2021-11-18 | 6K Inc. | Mechanically alloyed powder feedstock |
AU2020400980A1 (en) | 2019-11-18 | 2022-03-31 | 6K Inc. | Unique feedstocks for spherical powders and methods of manufacturing |
US11590568B2 (en) | 2019-12-19 | 2023-02-28 | 6K Inc. | Process for producing spheroidized powder from feedstock materials |
CA3180426A1 (en) | 2020-06-25 | 2021-12-30 | Richard K. Holman | Microcomposite alloy structure |
US11963287B2 (en) | 2020-09-24 | 2024-04-16 | 6K Inc. | Systems, devices, and methods for starting plasma |
AU2021371051A1 (en) | 2020-10-30 | 2023-03-30 | 6K Inc. | Systems and methods for synthesis of spheroidized metal powders |
AU2022246797A1 (en) | 2021-03-31 | 2023-10-05 | 6K Inc. | Systems and methods for additive manufacturing of metal nitride ceramics |
US12040162B2 (en) | 2022-06-09 | 2024-07-16 | 6K Inc. | Plasma apparatus and methods for processing feed material utilizing an upstream swirl module and composite gas flows |
US12094688B2 (en) | 2022-08-25 | 2024-09-17 | 6K Inc. | Plasma apparatus and methods for processing feed material utilizing a powder ingress preventor (PIP) |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9126179D0 (en) * | 1991-12-10 | 1992-02-12 | Atomic Energy Authority Uk | The removal of organic materials from process gas streams |
GB9224745D0 (en) | 1992-11-26 | 1993-01-13 | Atomic Energy Authority Uk | Microwave plasma generator |
ZA976292B (en) * | 1996-07-29 | 1998-02-03 | Aeci Ltd | Process for decomposing a polymer to its monomer or monomers. |
EP1318922B1 (de) * | 2000-09-11 | 2004-11-03 | Dow Global Technologies Inc. | Herstellungsverfahren eines reifenstützkörpers |
FR2815888B1 (fr) * | 2000-10-27 | 2003-05-30 | Air Liquide | Dispositif de traitement de gaz par plasma |
US6620394B2 (en) | 2001-06-15 | 2003-09-16 | Han Sup Uhm | Emission control for perfluorocompound gases by microwave plasma torch |
US6806439B2 (en) * | 2003-01-13 | 2004-10-19 | Han Sup Uhm | Elimination of airborne chemical and biological warfare agents |
GB0309932D0 (en) * | 2003-04-30 | 2003-06-04 | Boc Group Plc | Apparatus and method for forming a plasma |
GB0403797D0 (en) * | 2004-02-20 | 2004-03-24 | Boc Group Plc | Gas abatement |
-
2005
- 2005-10-26 GB GBGB0521830.0A patent/GB0521830D0/en not_active Ceased
-
2006
- 2006-09-26 DE DE602006018173T patent/DE602006018173D1/de active Active
- 2006-09-26 KR KR1020087009869A patent/KR20080060255A/ko active Search and Examination
- 2006-09-26 US US12/084,189 patent/US8168128B2/en not_active Expired - Fee Related
- 2006-09-26 JP JP2008537168A patent/JP5379482B2/ja not_active Expired - Fee Related
- 2006-09-26 CN CN2006800399496A patent/CN101297062B/zh not_active Expired - Fee Related
- 2006-09-26 WO PCT/GB2006/003578 patent/WO2007048994A1/en active Application Filing
- 2006-09-26 EP EP06779552A patent/EP1937870B1/de not_active Not-in-force
- 2006-09-26 AT AT06779552T patent/ATE487807T1/de not_active IP Right Cessation
- 2006-10-05 TW TW095137023A patent/TWI442836B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP5379482B2 (ja) | 2013-12-25 |
US8168128B2 (en) | 2012-05-01 |
WO2007048994A1 (en) | 2007-05-03 |
KR20080060255A (ko) | 2008-07-01 |
TW200731880A (en) | 2007-08-16 |
DE602006018173D1 (de) | 2010-12-23 |
US20090165953A1 (en) | 2009-07-02 |
EP1937870B1 (de) | 2010-11-10 |
CN101297062B (zh) | 2011-04-27 |
TWI442836B (zh) | 2014-06-21 |
GB0521830D0 (en) | 2005-12-07 |
JP2009513329A (ja) | 2009-04-02 |
EP1937870A1 (de) | 2008-07-02 |
CN101297062A (zh) | 2008-10-29 |
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