TW200716783A - Apparatus for fabrication of carbon nanotubes - Google Patents
Apparatus for fabrication of carbon nanotubesInfo
- Publication number
- TW200716783A TW200716783A TW094137884A TW94137884A TW200716783A TW 200716783 A TW200716783 A TW 200716783A TW 094137884 A TW094137884 A TW 094137884A TW 94137884 A TW94137884 A TW 94137884A TW 200716783 A TW200716783 A TW 200716783A
- Authority
- TW
- Taiwan
- Prior art keywords
- gas
- fabrication
- carbon nanotubes
- gas inlet
- inlet
- Prior art date
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
Abstract
This invention relates to an apparatus for fabrication of carbon nanotubes. The apparatus includes a reactor chamber having a first gas inlet and a first gas outlet; and a gas conducting device set into the reactor chamber. The gas conducting device includes a gas transporting pipeline, a second gas inlet and an opposite second gas outlet. The gas transporting is hermetically connected between the first gas inlet and the second gas inlet, and is for supplying a reactive gas for fabrication of carbon nanotubes. The second gas inlet is vertical to a substrate for fabrication of carbon nanotubes, and is connected with the first gas outlet.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94137884A TWI386516B (en) | 2005-10-28 | 2005-10-28 | Apparatus for fabrication of carbon nanotubes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94137884A TWI386516B (en) | 2005-10-28 | 2005-10-28 | Apparatus for fabrication of carbon nanotubes |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200716783A true TW200716783A (en) | 2007-05-01 |
TWI386516B TWI386516B (en) | 2013-02-21 |
Family
ID=48222411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94137884A TWI386516B (en) | 2005-10-28 | 2005-10-28 | Apparatus for fabrication of carbon nanotubes |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI386516B (en) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4123989A (en) * | 1977-09-12 | 1978-11-07 | Mobil Tyco Solar Energy Corp. | Manufacture of silicon on the inside of a tube |
AU2003217530A1 (en) * | 2002-04-01 | 2003-10-13 | Ans Inc | Apparatus and method for depositing organic matter of vapor phase |
JP4347295B2 (en) * | 2003-04-18 | 2009-10-21 | 株式会社日立国際電気 | Semiconductor manufacturing apparatus and semiconductor device manufacturing method |
-
2005
- 2005-10-28 TW TW94137884A patent/TWI386516B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI386516B (en) | 2013-02-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |