TW200716783A - Apparatus for fabrication of carbon nanotubes - Google Patents

Apparatus for fabrication of carbon nanotubes

Info

Publication number
TW200716783A
TW200716783A TW094137884A TW94137884A TW200716783A TW 200716783 A TW200716783 A TW 200716783A TW 094137884 A TW094137884 A TW 094137884A TW 94137884 A TW94137884 A TW 94137884A TW 200716783 A TW200716783 A TW 200716783A
Authority
TW
Taiwan
Prior art keywords
gas
fabrication
carbon nanotubes
gas inlet
inlet
Prior art date
Application number
TW094137884A
Other languages
Chinese (zh)
Other versions
TWI386516B (en
Inventor
Bor-Yuan Hsiao
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW94137884A priority Critical patent/TWI386516B/en
Publication of TW200716783A publication Critical patent/TW200716783A/en
Application granted granted Critical
Publication of TWI386516B publication Critical patent/TWI386516B/en

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  • Carbon And Carbon Compounds (AREA)

Abstract

This invention relates to an apparatus for fabrication of carbon nanotubes. The apparatus includes a reactor chamber having a first gas inlet and a first gas outlet; and a gas conducting device set into the reactor chamber. The gas conducting device includes a gas transporting pipeline, a second gas inlet and an opposite second gas outlet. The gas transporting is hermetically connected between the first gas inlet and the second gas inlet, and is for supplying a reactive gas for fabrication of carbon nanotubes. The second gas inlet is vertical to a substrate for fabrication of carbon nanotubes, and is connected with the first gas outlet.
TW94137884A 2005-10-28 2005-10-28 Apparatus for fabrication of carbon nanotubes TWI386516B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94137884A TWI386516B (en) 2005-10-28 2005-10-28 Apparatus for fabrication of carbon nanotubes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94137884A TWI386516B (en) 2005-10-28 2005-10-28 Apparatus for fabrication of carbon nanotubes

Publications (2)

Publication Number Publication Date
TW200716783A true TW200716783A (en) 2007-05-01
TWI386516B TWI386516B (en) 2013-02-21

Family

ID=48222411

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94137884A TWI386516B (en) 2005-10-28 2005-10-28 Apparatus for fabrication of carbon nanotubes

Country Status (1)

Country Link
TW (1) TWI386516B (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4123989A (en) * 1977-09-12 1978-11-07 Mobil Tyco Solar Energy Corp. Manufacture of silicon on the inside of a tube
AU2003217530A1 (en) * 2002-04-01 2003-10-13 Ans Inc Apparatus and method for depositing organic matter of vapor phase
JP4347295B2 (en) * 2003-04-18 2009-10-21 株式会社日立国際電気 Semiconductor manufacturing apparatus and semiconductor device manufacturing method

Also Published As

Publication number Publication date
TWI386516B (en) 2013-02-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees