Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/956,596external-prioritypatent/US7541062B2/en
Application filed by Us Gov Sec NavyfiledCriticalUs Gov Sec Navy
Application grantedgrantedCritical
Publication of ATE485536T1publicationCriticalpatent/ATE485536T1/de
Substrat ceramique pour appareil de fabrication/inspection de semi-conducteurs, element chauffant en ceramique, dispositif de retenue electrostatique sans attache et substrat pour testeur de tranches