ATE479131T1 - Halogenierte antireflexionsbeschichtungen - Google Patents

Halogenierte antireflexionsbeschichtungen

Info

Publication number
ATE479131T1
ATE479131T1 AT08015849T AT08015849T ATE479131T1 AT E479131 T1 ATE479131 T1 AT E479131T1 AT 08015849 T AT08015849 T AT 08015849T AT 08015849 T AT08015849 T AT 08015849T AT E479131 T1 ATE479131 T1 AT E479131T1
Authority
AT
Austria
Prior art keywords
polymer
polymer binder
functional groups
preferred
reflection coatings
Prior art date
Application number
AT08015849T
Other languages
English (en)
Inventor
Tomoyuki Enomoto
Ken-Ichi Mizusawa
Shin-Ya Arase
Rama Puligadda
Original Assignee
Brewer Science Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brewer Science Inc filed Critical Brewer Science Inc
Application granted granted Critical
Publication of ATE479131T1 publication Critical patent/ATE479131T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/22—Esters containing halogen
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D133/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Coating compositions based on derivatives of such polymers
    • C09D133/04—Homopolymers or copolymers of esters
    • C09D133/14—Homopolymers or copolymers of esters of esters containing halogen, nitrogen, sulfur or oxygen atoms in addition to the carboxy oxygen
    • C09D133/16—Homopolymers or copolymers of esters containing halogen atoms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Laminated Bodies (AREA)
  • Paints Or Removers (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
AT08015849T 2002-02-11 2002-02-11 Halogenierte antireflexionsbeschichtungen ATE479131T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP02713620A EP1474724B1 (de) 2002-02-11 2002-02-11 Halogenierte antireflexbeschichtungen
PCT/US2002/004690 WO2003075093A1 (en) 2002-02-11 2002-02-11 Halogenated anti-reflective coatings

Publications (1)

Publication Number Publication Date
ATE479131T1 true ATE479131T1 (de) 2010-09-15

Family

ID=27787358

Family Applications (2)

Application Number Title Priority Date Filing Date
AT08015849T ATE479131T1 (de) 2002-02-11 2002-02-11 Halogenierte antireflexionsbeschichtungen
AT02713620T ATE466310T1 (de) 2002-02-11 2002-02-11 Halogenierte antireflexbeschichtungen

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT02713620T ATE466310T1 (de) 2002-02-11 2002-02-11 Halogenierte antireflexbeschichtungen

Country Status (7)

Country Link
EP (2) EP2000852B1 (de)
JP (1) JP4215647B2 (de)
KR (1) KR100885094B1 (de)
AT (2) ATE479131T1 (de)
AU (1) AU2002245460A1 (de)
DE (2) DE60237484D1 (de)
WO (1) WO2003075093A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004101794A (ja) * 2002-09-09 2004-04-02 Toray Ind Inc 半導体装置用平坦化組成物
WO2012053600A1 (ja) * 2010-10-22 2012-04-26 日産化学工業株式会社 フッ素系添加剤を有するシリコン含有レジスト下層膜形成組成物
US9541829B2 (en) 2013-07-24 2017-01-10 Orthogonal, Inc. Cross-linkable fluorinated photopolymer
CN106662808A (zh) 2014-02-07 2017-05-10 正交公司 可交联的氟化光聚合物
JP6706891B2 (ja) * 2014-09-16 2020-06-10 住友化学株式会社 レジスト組成物及びレジストパターンの製造方法
TWI662370B (zh) 2015-11-30 2019-06-11 南韓商羅門哈斯電子材料韓國公司 與外塗佈光致抗蝕劑一起使用之塗料組合物
WO2023026934A1 (ja) 2021-08-27 2023-03-02 日産化学株式会社 レジスト下層膜形成組成物
CN118215887A (zh) 2021-09-13 2024-06-18 日产化学株式会社 抗蚀剂下层膜形成用组合物
CN114702620B (zh) * 2022-01-19 2023-07-14 复旦大学 一种溴系共聚物以及一种阻燃剂

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2541527A1 (de) * 1974-09-17 1976-03-25 Nat Res Dev Hydrogelbildendes polymeres
US4061829A (en) 1976-04-26 1977-12-06 Bell Telephone Laboratories, Incorporated Negative resist for X-ray and electron beam lithography and method of using same
JPS5893003A (ja) * 1981-11-27 1983-06-02 Mitsubishi Rayon Co Ltd 光伝送性繊維
JPS62156105A (ja) 1985-06-20 1987-07-11 Mitsubishi Rayon Co Ltd メタクリルイミド含有重合体
JP2811725B2 (ja) * 1989-03-23 1998-10-15 株式会社総合歯科医寮研究所 義歯の製作方法及び義歯製作用光重合型積層レジンシート
JP2856932B2 (ja) 1991-02-13 1999-02-10 セイコー化成株式会社 被覆用組成物
JPH05150197A (ja) * 1991-12-02 1993-06-18 Seiko Epson Corp ソフトコンタクトレンズ
US5919599A (en) * 1997-09-30 1999-07-06 Brewer Science, Inc. Thermosetting anti-reflective coatings at deep ultraviolet

Also Published As

Publication number Publication date
ATE466310T1 (de) 2010-05-15
JP2005526270A (ja) 2005-09-02
DE60237484D1 (de) 2010-10-07
EP1474724A4 (de) 2008-06-18
EP1474724B1 (de) 2010-04-28
EP1474724A1 (de) 2004-11-10
KR20040089612A (ko) 2004-10-21
DE60236210D1 (de) 2010-06-10
JP4215647B2 (ja) 2009-01-28
WO2003075093A1 (en) 2003-09-12
EP2000852A1 (de) 2008-12-10
EP2000852B1 (de) 2010-08-25
KR100885094B1 (ko) 2009-02-20
AU2002245460A1 (en) 2003-09-16

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Legal Events

Date Code Title Description
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