ATE475879T1 - Vorrichtung und verfahren zur bestimmung der porosität - Google Patents

Vorrichtung und verfahren zur bestimmung der porosität

Info

Publication number
ATE475879T1
ATE475879T1 AT99946042T AT99946042T ATE475879T1 AT E475879 T1 ATE475879 T1 AT E475879T1 AT 99946042 T AT99946042 T AT 99946042T AT 99946042 T AT99946042 T AT 99946042T AT E475879 T1 ATE475879 T1 AT E475879T1
Authority
AT
Austria
Prior art keywords
porosity
chamber
film
substrate
thin film
Prior art date
Application number
AT99946042T
Other languages
English (en)
Inventor
Mikhail Rodionovich Baklanov
Fedor Nikolaevich Dultsev
Konstantin Petrovich Mogilnikov
Karen Maex
Original Assignee
Imec
Ct For Advanced Technologies T
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec, Ct For Advanced Technologies T filed Critical Imec
Application granted granted Critical
Publication of ATE475879T1 publication Critical patent/ATE475879T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G01N2015/0846—Investigating permeability, pore-volume, or surface area of porous materials by use of radiation, e.g. transmitted or reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Formation Of Insulating Films (AREA)
AT99946042T 1998-08-28 1999-08-27 Vorrichtung und verfahren zur bestimmung der porosität ATE475879T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9824798P 1998-08-28 1998-08-28
PCT/EP1999/006299 WO2000012999A1 (en) 1998-08-28 1999-08-27 Apparatus and method for determining porosity

Publications (1)

Publication Number Publication Date
ATE475879T1 true ATE475879T1 (de) 2010-08-15

Family

ID=22268341

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99946042T ATE475879T1 (de) 1998-08-28 1999-08-27 Vorrichtung und verfahren zur bestimmung der porosität

Country Status (7)

Country Link
US (2) US6319736B1 (de)
EP (1) EP1032816B1 (de)
JP (2) JP4869478B2 (de)
AT (1) ATE475879T1 (de)
AU (1) AU5855799A (de)
DE (1) DE69942632D1 (de)
WO (1) WO2000012999A1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1172847A3 (de) 2000-07-10 2004-07-28 Interuniversitair Micro-Elektronica Centrum Vzw Methode, eine poröse Siliziumoxidschicht herzustellen
US7042570B2 (en) * 2002-01-25 2006-05-09 The Regents Of The University Of California Porous thin film time-varying reflectivity analysis of samples
US7016028B2 (en) 2002-06-07 2006-03-21 Interuniversitair Microelektronica Centrum (Imec) Method and apparatus for defect detection
EP1369682A3 (de) * 2002-06-07 2004-12-01 Interuniversitair Microelektronica Centrum Vzw Verfahren zum Nachweis der Integrität von Schichten auf Wafer-Ebene
JP4528279B2 (ja) * 2005-05-12 2010-08-18 アイメック 多孔性材料の親水性の定量化のための方法
EP1722213B1 (de) * 2005-05-12 2019-10-16 IMEC vzw Verfahren zur Quantifizierung der hydrophilen Eigenschaften poröser Materialien
FR2886015B1 (fr) * 2005-05-18 2007-07-13 Commissariat Energie Atomique Procede de mesure de la porosite par ellipsometrie et dispositif mettant en oeuvre un tel procede
US7363161B2 (en) * 2005-06-03 2008-04-22 Baker Hughes Incorporated Pore-scale geometric models for interpretation of downhole formation evaluation data
GB0516477D0 (en) * 2005-08-11 2005-09-14 Optical Reference Systems Ltd Apparatus for measuring semiconductor physical characteristics
ATE475078T1 (de) * 2005-12-22 2010-08-15 Imec Verfahren zur bestimmung der lösungsmitteldurchlässigkeit von filmen
US7808657B2 (en) * 2007-06-28 2010-10-05 International Business Machines Corporation Wafer and stage alignment using photonic devices
JP5120927B2 (ja) * 2007-08-08 2013-01-16 独立行政法人産業技術総合研究所 薄膜の物性評価方法および評価装置
JP5555908B2 (ja) * 2007-08-08 2014-07-23 独立行政法人産業技術総合研究所 光学的測定室
US7907264B1 (en) * 2007-09-07 2011-03-15 Kla-Tencor Corporation Measurement of thin film porosity
RU2374625C1 (ru) * 2008-05-05 2009-11-27 Институт физики полупроводников Сибирского отделения Российской академии наук Устройство для определения пористых характеристик тонких слоев (варианты)
FR2948192B1 (fr) * 2009-07-20 2011-07-22 Commissariat Energie Atomique Procede de caracterisation optique
WO2011137454A1 (en) * 2010-04-30 2011-11-03 The Regents Of The University Of Colorado, A Body Corporate Determination of pore size in porous materials by evaporative mass loss
US9007593B2 (en) * 2010-07-20 2015-04-14 The Regents Of The University Of California Temperature response sensing and classification of analytes with porous optical films
US9546943B1 (en) * 2015-03-21 2017-01-17 J.A. Woollam Co., Inc System and method for investigating change in optical properties of a porous effective substrate surface as a function of a sequence of solvent partial pressures at atmospheric pressure
US10281263B2 (en) 2016-05-02 2019-05-07 Kla-Tencor Corporation Critical dimension measurements with gaseous adsorption
US10145674B2 (en) 2016-05-02 2018-12-04 Kla-Tencor Corporation Measurement of semiconductor structures with capillary condensation
US10041873B2 (en) 2016-05-02 2018-08-07 Kla-Tencor Corporation Porosity measurement of semiconductor structures
CN107552258B (zh) * 2016-07-01 2019-06-07 江苏鲁汶仪器有限公司 气体喷射装置
CN106990255B (zh) * 2017-04-07 2018-08-28 鲁汶仪器有限公司（比利时） 样品分析系统
WO2019100070A1 (en) * 2017-11-20 2019-05-23 Energy Everywhere, Inc. Method and system for pervoskite solar cell with scaffold structure
CN109164030A (zh) * 2018-10-17 2019-01-08 西南交通大学 一种用于观测岩石吸水渗透过程的实验装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3976450A (en) * 1973-01-02 1976-08-24 Roland Marcote Gas sample preparation system and method
US4246775A (en) * 1979-06-08 1981-01-27 Philip Morris Incorporated Porosity measuring apparatus and perforating system using same
US4304122A (en) * 1980-05-06 1981-12-08 E. I. Du Pont De Nemours And Company Deep well simulator
US4389878A (en) * 1981-05-01 1983-06-28 The Dow Chemical Company Dynamic gas transmission measuring apparatus
IT1138019B (it) * 1981-07-09 1986-09-10 Erba Strumentazione Procedimento e apparecchiatura per l'effettuazione di analisi porosimetriche
GB8313635D0 (en) * 1983-05-17 1983-06-22 Whatman Reeve Angel Plc Porosimeter
US4531404A (en) * 1983-12-29 1985-07-30 Mobil Oil Corporation Flow cell assembly
US5002399A (en) 1987-07-23 1991-03-26 Mufit Akinc Thermoporosimeter
DE4003619A1 (de) * 1990-02-07 1991-08-14 Bosch Gmbh Robert Mikroventil
US5342580A (en) * 1990-04-17 1994-08-30 Alan Brenner Apparatus and method for measuring the amount of gas adsorbed on or desorbed from a solid and reactions of a gas with a solid
JPH0579973A (ja) * 1991-09-20 1993-03-30 Olympus Optical Co Ltd 金属微粒子の光学定数測定方法
JPH0693972A (ja) * 1992-09-11 1994-04-05 Seiko Epson Corp マイクロポンプ及びその製造方法
JPH08304204A (ja) * 1995-05-12 1996-11-22 Mitsubishi Cable Ind Ltd ダイヤフラムユニットの作製方法及びそのダイヤフラムユニットを用いた圧力センサ
SE9504417D0 (sv) 1995-12-11 1995-12-11 Siemens Elema Ab Metod för att bestämma koncentrationen av en specifik gas och en analysapparat
US6245690B1 (en) * 1998-11-04 2001-06-12 Applied Materials, Inc. Method of improving moisture resistance of low dielectric constant films

Also Published As

Publication number Publication date
EP1032816A1 (de) 2000-09-06
AU5855799A (en) 2000-03-21
JP2011237411A (ja) 2011-11-24
DE69942632D1 (de) 2010-09-09
JP2002523773A (ja) 2002-07-30
US6319736B1 (en) 2001-11-20
US20010054306A1 (en) 2001-12-27
WO2000012999A1 (en) 2000-03-09
JP4869478B2 (ja) 2012-02-08
US6435008B2 (en) 2002-08-20
EP1032816B1 (de) 2010-07-28

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