ATE470886T1 - Damaszen-fotomaske für die extrem-ultraviolett- lithographie (euvl) und herstellungsverfahren - Google Patents
Damaszen-fotomaske für die extrem-ultraviolett- lithographie (euvl) und herstellungsverfahrenInfo
- Publication number
- ATE470886T1 ATE470886T1 AT02742415T AT02742415T ATE470886T1 AT E470886 T1 ATE470886 T1 AT E470886T1 AT 02742415 T AT02742415 T AT 02742415T AT 02742415 T AT02742415 T AT 02742415T AT E470886 T1 ATE470886 T1 AT E470886T1
- Authority
- AT
- Austria
- Prior art keywords
- euvl
- extreme ultraviolet
- damascen
- ultraviolet lithography
- production process
- Prior art date
Links
- 238000001900 extreme ultraviolet lithography Methods 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000006096 absorbing agent Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 230000000153 supplemental effect Effects 0.000 abstract 2
- 238000000206 photolithography Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/919,680 US6593041B2 (en) | 2001-07-31 | 2001-07-31 | Damascene extreme ultraviolet lithography (EUVL) photomask and method of making |
PCT/US2002/022104 WO2003012546A2 (en) | 2001-07-31 | 2002-07-11 | Damascene extreme ultraviolet lithography (euvl) photomask and method of making |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE470886T1 true ATE470886T1 (de) | 2010-06-15 |
Family
ID=25442465
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT02742415T ATE470886T1 (de) | 2001-07-31 | 2002-07-11 | Damaszen-fotomaske für die extrem-ultraviolett- lithographie (euvl) und herstellungsverfahren |
Country Status (8)
Country | Link |
---|---|
US (1) | US6593041B2 (de) |
EP (1) | EP1412817B1 (de) |
CN (1) | CN1695093A (de) |
AT (1) | ATE470886T1 (de) |
AU (1) | AU2002315549A1 (de) |
DE (1) | DE60236663D1 (de) |
TW (1) | TWI289725B (de) |
WO (1) | WO2003012546A2 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6577442B2 (en) * | 2001-09-27 | 2003-06-10 | Intel Corporation | Reflective spectral filtering of high power extreme ultra-violet radiation |
US20040131947A1 (en) * | 2003-01-07 | 2004-07-08 | International Business Machines Corporation | Reflective mask structure and method of formation |
US7420653B2 (en) * | 2003-10-02 | 2008-09-02 | Asml Netherlands B.V. | Lithographic projection apparatus, mirror, method of supplying a protective cap layer, device manufacturing method and device manufactured accordingly |
FR2863772B1 (fr) * | 2003-12-16 | 2006-05-26 | Commissariat Energie Atomique | Procede de reparation d'erreurs de motifs realises dans des couches minces |
US7169514B2 (en) * | 2003-12-31 | 2007-01-30 | Intel Corporation | Extreme ultraviolet mask with molybdenum phase shifter |
KR100604938B1 (ko) * | 2005-05-27 | 2006-07-28 | 삼성전자주식회사 | 극자외선 노광용 반사마스크 및 그 제조방법 |
FR2894346B1 (fr) * | 2005-12-02 | 2012-03-30 | Commissariat Energie Atomique | Masque de photolithographie en extreme ultra-violet, a cavites absorbantes |
US7402469B1 (en) * | 2007-01-12 | 2008-07-22 | Applied Micro Circuits Corporation | System and method for selectivity etching an integrated circuit |
US8361689B2 (en) * | 2007-11-05 | 2013-01-29 | Eastman Kodak Company | Negative charge control agents and their preparation |
US7930657B2 (en) * | 2008-01-23 | 2011-04-19 | Micron Technology, Inc. | Methods of forming photomasks |
KR101358483B1 (ko) * | 2009-04-02 | 2014-03-07 | 도판 인사츠 가부시키가이샤 | 반사형 포토마스크 및 반사형 포토마스크 블랭크 |
TWI467318B (zh) | 2009-12-04 | 2015-01-01 | Asahi Glass Co Ltd | An optical member for EUV microfilm, and a method for manufacturing a substrate with a reflective layer for EUV microfilm |
EP2511943A4 (de) | 2009-12-09 | 2015-09-09 | Asahi Glass Co Ltd | Optisches element zur verwendung in der euv-lithographie |
EP2511944A4 (de) | 2009-12-09 | 2014-09-03 | Asahi Glass Co Ltd | Mit einer reflektierenden schicht ausgestattetes substrat für die euv-lithographie, reflektierender maskenrohling für die euv-lithographie, reflektierende maske für die euv-lithographie und verfahren zur herstellung des mit einer reflektierenden schicht ausgestatteten substrats |
US8764995B2 (en) | 2010-08-17 | 2014-07-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof |
JP5691677B2 (ja) * | 2011-03-10 | 2015-04-01 | 凸版印刷株式会社 | 反射型フォトマスクの位相欠陥修正方法 |
US8492054B2 (en) | 2011-03-25 | 2013-07-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Mechanisms for patterning fine features |
NL2010025A (en) | 2012-01-17 | 2013-07-18 | Asml Netherlands Bv | Lithographic mask, lithographic apparatus and method. |
WO2013156328A2 (en) * | 2012-04-18 | 2013-10-24 | Asml Netherlands B.V. | Mask for lithographic apparatus and methods of inspection |
US8658333B2 (en) * | 2012-06-04 | 2014-02-25 | Nanya Technology Corporation | Reflective mask |
JP2014096483A (ja) * | 2012-11-09 | 2014-05-22 | Toppan Printing Co Ltd | 反射型マスクおよびその製造方法 |
US9069253B2 (en) * | 2013-03-13 | 2015-06-30 | Nanya Technology Corportion | Mask structure |
US9310675B2 (en) | 2013-03-15 | 2016-04-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof |
DE102013108872B4 (de) | 2013-03-15 | 2018-05-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fotomasken für extrem ultraviolettes Licht (EUV) sowie Herstellungsverfahren dieser |
US9575412B2 (en) | 2014-03-31 | 2017-02-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and system for reducing pole imbalance by adjusting exposure intensity |
CN105093817A (zh) * | 2014-05-23 | 2015-11-25 | 中芯国际集成电路制造(上海)有限公司 | 一种光掩模图案的修复方法 |
DE102014216458A1 (de) * | 2014-08-19 | 2016-02-25 | Carl Zeiss Smt Gmbh | Optisches Element mit einer Beschichtung zur Beeinflussung von Heizstrahlung und optische Anordnung |
KR102246876B1 (ko) | 2014-10-22 | 2021-04-30 | 삼성전자 주식회사 | 극자외선 리소그래피 장치용 반사형 마스크 및 그 제조방법 |
US9551924B2 (en) * | 2015-02-12 | 2017-01-24 | International Business Machines Corporation | Structure and method for fixing phase effects on EUV mask |
KR102520797B1 (ko) | 2015-10-15 | 2023-04-12 | 삼성전자주식회사 | 반사형 포토마스크 및 그 제조 방법 |
KR102501192B1 (ko) | 2016-04-25 | 2023-02-21 | 에이에스엠엘 네델란즈 비.브이. | Euv 리소그래피를 위한 멤브레인 |
EP3454120B1 (de) * | 2017-09-09 | 2024-05-01 | IMEC vzw | Verfahren zur herstelling von euv retikeln und retikel für euv-lithographie |
US11143951B2 (en) * | 2018-04-30 | 2021-10-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Pellicle for an EUV lithography mask and a method of manufacturing thereof |
SG11202103911SA (en) * | 2018-10-17 | 2021-05-28 | Astrileux Corp | Photomask having reflective layer with non-reflective regions |
US11171044B1 (en) | 2020-05-08 | 2021-11-09 | International Business Machines Corporation | Planarization controllability for interconnect structures |
US11815804B2 (en) * | 2021-04-22 | 2023-11-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | EUV mask blank and method of making EUV mask blank |
US20230032950A1 (en) * | 2021-07-30 | 2023-02-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Euv photo masks and manufacturing method thereof |
DE102022208658A1 (de) * | 2022-08-22 | 2024-02-22 | Carl Zeiss Smt Gmbh | Zwischenprodukt zur Herstellung eines optischen Elements für eine Projektionsbelichtungsanlage, optisches Element für eine Projektionsbelichtungsanlage, Verfahren zur Herstellung eines Zwischenprodukts und Verfahren zur Herstellung eines optischen Elements |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5935733A (en) * | 1996-04-05 | 1999-08-10 | Intel Corporation | Photolithography mask and method of fabrication |
US5928817A (en) * | 1997-12-22 | 1999-07-27 | Intel Corporation | Method of protecting an EUV mask from damage and contamination |
US5935737A (en) * | 1997-12-22 | 1999-08-10 | Intel Corporation | Method for eliminating final euv mask repairs in the reflector region |
US5958629A (en) * | 1997-12-22 | 1999-09-28 | Intel Corporation | Using thin films as etch stop in EUV mask fabrication process |
FR2797060B1 (fr) * | 1999-07-29 | 2001-09-14 | Commissariat Energie Atomique | Structure pour masque de lithographie en reflexion et procede pour sa realisation |
-
2001
- 2001-07-31 US US09/919,680 patent/US6593041B2/en not_active Expired - Lifetime
-
2002
- 2002-07-11 AT AT02742415T patent/ATE470886T1/de not_active IP Right Cessation
- 2002-07-11 CN CNA028120469A patent/CN1695093A/zh active Pending
- 2002-07-11 EP EP02742415A patent/EP1412817B1/de not_active Expired - Lifetime
- 2002-07-11 AU AU2002315549A patent/AU2002315549A1/en not_active Abandoned
- 2002-07-11 DE DE60236663T patent/DE60236663D1/de not_active Expired - Fee Related
- 2002-07-11 WO PCT/US2002/022104 patent/WO2003012546A2/en not_active Application Discontinuation
- 2002-07-22 TW TW091116239A patent/TWI289725B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
WO2003012546A3 (en) | 2003-12-18 |
CN1695093A (zh) | 2005-11-09 |
DE60236663D1 (de) | 2010-07-22 |
TWI289725B (en) | 2007-11-11 |
WO2003012546A2 (en) | 2003-02-13 |
US20030027053A1 (en) | 2003-02-06 |
US6593041B2 (en) | 2003-07-15 |
EP1412817B1 (de) | 2010-06-09 |
AU2002315549A1 (en) | 2003-02-17 |
EP1412817A2 (de) | 2004-04-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE470886T1 (de) | Damaszen-fotomaske für die extrem-ultraviolett- lithographie (euvl) und herstellungsverfahren | |
SG106672A1 (en) | Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method | |
GB2438113A (en) | Extreme ultraviolet mask with leaky absorber and method for its fabrication | |
WO2005029179A3 (en) | Combined nanoimprinting and photolithography for micro and nano devices fabrication | |
KR100879139B1 (ko) | 위상 반전 마스크 및 이의 제조방법 | |
EP1594005A3 (de) | Verfahren zur Herstellung einer Flexodruckplatte | |
KR100988935B1 (ko) | 롤 임프린트 장치 | |
TW432480B (en) | Optical lithography beyond conventional resolution limits | |
WO2002073699A3 (en) | Nanofabrication | |
ATE368240T1 (de) | Phasenschiebermaske für die euv-lithographie mit glatter oberfläche (damascene-struktur) | |
RU2013112860A (ru) | Маска для ближнепольной литографии и ее изготовление | |
TW200516353A (en) | Method for providing representative feature for use in inspection of photolithography mask and for use in inspection of photo-lithoraphically developed and/or patterned wafer layers, and product of same | |
TW200616101A (en) | Method for manufacturing semiconductor device | |
DE50006662D1 (de) | Objektiv, insbesondere Objektiv für eine Halbleiter-Lithographie-Projektionsbelichtungsanlage und Herstellungsverfahren | |
WO2008036107A3 (en) | Plasma-based euv light source | |
SG130083A1 (en) | A system and method for photolithography in semiconductor manufacturing | |
TW200618062A (en) | Solid immersion lens lithography | |
TW200512546A (en) | Lithographic apparatus, device manufacturing method, and device manufactured thereby | |
EP1443361A3 (de) | Projektionsbelichtungsmaske, Projektionsbelichtungsvorrichtung und Projektionsbelichtungsmethode | |
DE60303173D1 (de) | Katoptrisches Projektionssystem, Belichtungsvorrichtung und Herstellungsprozess mit deren Verwendung | |
WO2006059757A3 (en) | Process for producing resist pattern and conductor pattern | |
ATE306088T1 (de) | Euv optische vorrichtung mit verstärkter mechanischer stabilität und lithographische maske mit dieser vorrichtung | |
TW200629372A (en) | A system and method for lithography in semiconductor manufacturing | |
TW200519530A (en) | Multiple exposure method for forming patterned photoresist layer | |
GB2375403B (en) | Optical proximity correction |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |