ATE465137T1 - Verfahren zur herstellung eines beschichteten artikels mit ionenbehandelter unterschicht - Google Patents
Verfahren zur herstellung eines beschichteten artikels mit ionenbehandelter unterschichtInfo
- Publication number
- ATE465137T1 ATE465137T1 AT05762609T AT05762609T ATE465137T1 AT E465137 T1 ATE465137 T1 AT E465137T1 AT 05762609 T AT05762609 T AT 05762609T AT 05762609 T AT05762609 T AT 05762609T AT E465137 T1 ATE465137 T1 AT E465137T1
- Authority
- AT
- Austria
- Prior art keywords
- coated article
- ion
- producing
- ion beam
- back layer
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0055—Other surface treatment of glass not in the form of fibres or filaments by irradiation by ion implantation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
- C03C2218/326—Nitriding
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31—Surface property or characteristic of web, sheet or block
- Y10T428/315—Surface modified glass [e.g., tempered, strengthened, etc.]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/875,497 US7550067B2 (en) | 2004-06-25 | 2004-06-25 | Coated article with ion treated underlayer and corresponding method |
PCT/US2005/022198 WO2006012185A1 (en) | 2004-06-25 | 2005-06-22 | Coated article with ion treated underlayer and corresponding method |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE465137T1 true ATE465137T1 (de) | 2010-05-15 |
Family
ID=34981127
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05762609T ATE465137T1 (de) | 2004-06-25 | 2005-06-22 | Verfahren zur herstellung eines beschichteten artikels mit ionenbehandelter unterschicht |
Country Status (8)
Country | Link |
---|---|
US (2) | US7550067B2 (de) |
EP (1) | EP1758829B1 (de) |
AT (1) | ATE465137T1 (de) |
CA (1) | CA2567048C (de) |
DE (1) | DE602005020784D1 (de) |
ES (1) | ES2344851T3 (de) |
PL (1) | PL1758829T3 (de) |
WO (1) | WO2006012185A1 (de) |
Families Citing this family (46)
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US7311975B2 (en) | 2004-06-25 | 2007-12-25 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Coated article having low-E coating with ion beam treated IR reflecting layer and corresponding method |
US7550067B2 (en) * | 2004-06-25 | 2009-06-23 | Guardian Industries Corp. | Coated article with ion treated underlayer and corresponding method |
US7563347B2 (en) * | 2004-06-25 | 2009-07-21 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Method of forming coated article using sputtering target(s) and ion source(s) and corresponding apparatus |
MX2007014164A (es) | 2005-05-12 | 2008-02-25 | Agc Flat Glass North America | Recubrimiento de baja emisividad con bajo coeficiente de ganancia de calor solar, propiedades quimicas y mecanicas mejoradas y metodo para fabricar el mismo. |
US7964238B2 (en) * | 2007-01-29 | 2011-06-21 | Guardian Industries Corp. | Method of making coated article including ion beam treatment of metal oxide protective film |
US7901781B2 (en) | 2007-11-23 | 2011-03-08 | Agc Flat Glass North America, Inc. | Low emissivity coating with low solar heat gain coefficient, enhanced chemical and mechanical properties and method of making the same |
FR2933394B1 (fr) * | 2008-07-03 | 2011-04-01 | Saint Gobain | Procede de depot de couche mince et produit obtenu |
US10586689B2 (en) * | 2009-07-31 | 2020-03-10 | Guardian Europe S.A.R.L. | Sputtering apparatus including cathode with rotatable targets, and related methods |
US20110127628A1 (en) * | 2009-11-30 | 2011-06-02 | Aptina Imaging Corporation | Ion implantation to change the optical properties of the passivation films in cmos imager devices |
US10000965B2 (en) | 2010-01-16 | 2018-06-19 | Cardinal Cg Company | Insulating glass unit transparent conductive coating technology |
US9862640B2 (en) | 2010-01-16 | 2018-01-09 | Cardinal Cg Company | Tin oxide overcoat indium tin oxide coatings, coated glazings, and production methods |
RU2558063C2 (ru) | 2010-01-16 | 2015-07-27 | КАРДИНАЛ СиДжи КОМПАНИ | Высококачественные низкоэмиссионные покрытия, низкоэмиссионные стеклопакеты и способы их изготовления |
US10000411B2 (en) | 2010-01-16 | 2018-06-19 | Cardinal Cg Company | Insulating glass unit transparent conductivity and low emissivity coating technology |
US10060180B2 (en) | 2010-01-16 | 2018-08-28 | Cardinal Cg Company | Flash-treated indium tin oxide coatings, production methods, and insulating glass unit transparent conductive coating technology |
US11155493B2 (en) | 2010-01-16 | 2021-10-26 | Cardinal Cg Company | Alloy oxide overcoat indium tin oxide coatings, coated glazings, and production methods |
US8541792B2 (en) | 2010-10-15 | 2013-09-24 | Guardian Industries Corp. | Method of treating the surface of a soda lime silica glass substrate, surface-treated glass substrate, and device incorporating the same |
US20120137971A1 (en) * | 2010-12-03 | 2012-06-07 | Vanrian Semiconductor Equipment Associates, Inc. | Hydrophobic property alteration using ion implantation |
US8559100B2 (en) | 2011-10-12 | 2013-10-15 | Guardian Industries Corp. | Coated article with low-E coating having absorbing layer over functional layer designed to increase outside reflectance |
US8592328B2 (en) | 2012-01-20 | 2013-11-26 | Novellus Systems, Inc. | Method for depositing a chlorine-free conformal sin film |
US9038419B2 (en) | 2012-06-08 | 2015-05-26 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Method of making heat treated coated article using carbon based coating and protective film |
CN109081603A (zh) * | 2012-10-03 | 2018-12-25 | 康宁股份有限公司 | 表面改进的玻璃基材 |
US9434640B2 (en) | 2012-12-04 | 2016-09-06 | Guardian Industries Corp. | Method of making heat treated coated article with carbon based coating and protective film |
US9499899B2 (en) | 2013-03-13 | 2016-11-22 | Intermolecular, Inc. | Systems, methods, and apparatus for production coatings of low-emissivity glass including a ternary alloy |
CN103265182A (zh) * | 2013-06-07 | 2013-08-28 | 林嘉佑 | 一种低辐射Low-E玻璃的制造方法 |
CN105336783A (zh) * | 2014-08-12 | 2016-02-17 | 联华电子股份有限公司 | Mos晶体管及用以形成外延结构的半导体制作工艺 |
US9214333B1 (en) * | 2014-09-24 | 2015-12-15 | Lam Research Corporation | Methods and apparatuses for uniform reduction of the in-feature wet etch rate of a silicon nitride film formed by ALD |
US9589790B2 (en) | 2014-11-24 | 2017-03-07 | Lam Research Corporation | Method of depositing ammonia free and chlorine free conformal silicon nitride film |
US9564312B2 (en) | 2014-11-24 | 2017-02-07 | Lam Research Corporation | Selective inhibition in atomic layer deposition of silicon-containing films |
US9502238B2 (en) | 2015-04-03 | 2016-11-22 | Lam Research Corporation | Deposition of conformal films by atomic layer deposition and atomic layer etch |
US9850570B2 (en) * | 2015-07-06 | 2017-12-26 | Intevac, Inc. | Ion implantation for modification of thin film coatings on glass |
US9601693B1 (en) | 2015-09-24 | 2017-03-21 | Lam Research Corporation | Method for encapsulating a chalcogenide material |
US10629435B2 (en) | 2016-07-29 | 2020-04-21 | Lam Research Corporation | Doped ALD films for semiconductor patterning applications |
US10074543B2 (en) | 2016-08-31 | 2018-09-11 | Lam Research Corporation | High dry etch rate materials for semiconductor patterning applications |
US9865455B1 (en) | 2016-09-07 | 2018-01-09 | Lam Research Corporation | Nitride film formed by plasma-enhanced and thermal atomic layer deposition process |
US10454029B2 (en) | 2016-11-11 | 2019-10-22 | Lam Research Corporation | Method for reducing the wet etch rate of a sin film without damaging the underlying substrate |
US10832908B2 (en) | 2016-11-11 | 2020-11-10 | Lam Research Corporation | Self-aligned multi-patterning process flow with ALD gapfill spacer mask |
US10134579B2 (en) | 2016-11-14 | 2018-11-20 | Lam Research Corporation | Method for high modulus ALD SiO2 spacer |
EP3562793A1 (de) * | 2016-12-30 | 2019-11-06 | Corning Incorporated | Beschichtete artikel mit optischen beschichtungen mit druckeigenspannung |
FR3065211A1 (fr) * | 2017-04-12 | 2018-10-19 | Saint-Gobain Glass France | Vitrage reflechissant comprenant une couche mince de nitrure de silicium riche en silicium |
US10269559B2 (en) | 2017-09-13 | 2019-04-23 | Lam Research Corporation | Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer |
TWI821234B (zh) | 2018-01-09 | 2023-11-11 | 美商康寧公司 | 具光改變特徵之塗覆製品及用於製造彼等之方法 |
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US11028012B2 (en) | 2018-10-31 | 2021-06-08 | Cardinal Cg Company | Low solar heat gain coatings, laminated glass assemblies, and methods of producing same |
US11885009B2 (en) | 2019-02-12 | 2024-01-30 | Uchicago Argonne, Llc | Method of making thin films |
US20220011478A1 (en) | 2020-07-09 | 2022-01-13 | Corning Incorporated | Textured region of a substrate to reduce specular reflectance incorporating surface features with an elliptical perimeter or segments thereof, and method of making the same |
CN116180075B (zh) * | 2023-02-17 | 2024-02-23 | 西南交通大学 | 一种低应力强结合高温绝缘涂层的制备方法 |
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FR2699164B1 (fr) * | 1992-12-11 | 1995-02-24 | Saint Gobain Vitrage Int | Procédé de traitement de couches minces à base d'oxyde ou de nitrure métallique. |
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US6359388B1 (en) * | 2000-08-28 | 2002-03-19 | Guardian Industries Corp. | Cold cathode ion beam deposition apparatus with segregated gas flow |
US6665033B2 (en) * | 2000-11-30 | 2003-12-16 | International Business Machines Corporation | Method for forming alignment layer by ion beam surface modification |
US6596399B2 (en) | 2000-12-04 | 2003-07-22 | Guardian Industries Corp. | UV absorbing/reflecting silver oxide layer, and method of making same |
JP4072321B2 (ja) * | 2001-02-02 | 2008-04-09 | 株式会社日立グローバルストレージテクノロジーズ | 磁気記録媒体およびその製造方法、これを用いた磁気記録装置 |
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US6689476B2 (en) * | 2001-06-27 | 2004-02-10 | Guardian Industries Corp. | Hydrophobic coating including oxide of Ni and/or Cr |
EP1273558A1 (de) | 2001-07-02 | 2003-01-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung eines wärmereflektierenden Schichtsystems für transparente Substrate und danach hergestelltes Schichtsystem |
JP2003127056A (ja) * | 2001-08-16 | 2003-05-08 | Seiko Instruments Inc | 端面研磨装置及び研磨方法 |
US6936347B2 (en) * | 2001-10-17 | 2005-08-30 | Guardian Industries Corp. | Coated article with high visible transmission and low emissivity |
US6589658B1 (en) | 2001-11-29 | 2003-07-08 | Guardian Industries Corp. | Coated article with anti-reflective layer(s) system |
US6878403B2 (en) * | 2002-10-04 | 2005-04-12 | Guardian Industries Corp. | Method of ion beam treatment of DLC in order to reduce contact angle |
US6878405B2 (en) * | 2002-10-04 | 2005-04-12 | Guardian Industries Corp. | Method of treating DLC on substrate with oxygen and/or hot water |
TWI370700B (en) * | 2003-03-31 | 2012-08-11 | Dainippon Printing Co Ltd | Protective coat and method for manufacturing thereof |
US7550067B2 (en) * | 2004-06-25 | 2009-06-23 | Guardian Industries Corp. | Coated article with ion treated underlayer and corresponding method |
-
2004
- 2004-06-25 US US10/875,497 patent/US7550067B2/en not_active Expired - Fee Related
-
2005
- 2005-06-22 DE DE602005020784T patent/DE602005020784D1/de active Active
- 2005-06-22 ES ES05762609T patent/ES2344851T3/es active Active
- 2005-06-22 PL PL05762609T patent/PL1758829T3/pl unknown
- 2005-06-22 CA CA2567048A patent/CA2567048C/en not_active Expired - Fee Related
- 2005-06-22 EP EP05762609A patent/EP1758829B1/de not_active Not-in-force
- 2005-06-22 AT AT05762609T patent/ATE465137T1/de not_active IP Right Cessation
- 2005-06-22 WO PCT/US2005/022198 patent/WO2006012185A1/en not_active Application Discontinuation
-
2009
- 2009-05-18 US US12/453,645 patent/US8147972B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1758829A1 (de) | 2007-03-07 |
US7550067B2 (en) | 2009-06-23 |
ES2344851T3 (es) | 2010-09-08 |
US20050287309A1 (en) | 2005-12-29 |
WO2006012185A1 (en) | 2006-02-02 |
EP1758829B1 (de) | 2010-04-21 |
CA2567048A1 (en) | 2006-02-02 |
US20090226714A1 (en) | 2009-09-10 |
PL1758829T3 (pl) | 2010-09-30 |
US8147972B2 (en) | 2012-04-03 |
DE602005020784D1 (de) | 2010-06-02 |
CA2567048C (en) | 2010-12-07 |
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