ATE456862T1 - Bolometer mit zwei bandbreiten - Google Patents

Bolometer mit zwei bandbreiten

Info

Publication number
ATE456862T1
ATE456862T1 AT98935799T AT98935799T ATE456862T1 AT E456862 T1 ATE456862 T1 AT E456862T1 AT 98935799 T AT98935799 T AT 98935799T AT 98935799 T AT98935799 T AT 98935799T AT E456862 T1 ATE456862 T1 AT E456862T1
Authority
AT
Austria
Prior art keywords
pixel
visible light
layer
infrared radiation
absorbing layer
Prior art date
Application number
AT98935799T
Other languages
English (en)
Inventor
Barrett Cole
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Application granted granted Critical
Publication of ATE456862T1 publication Critical patent/ATE456862T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14643—Photodiode arrays; MOS imagers
    • H01L27/14645—Colour imagers
    • H01L27/14647—Multicolour imagers having a stacked pixel-element structure, e.g. npn, npnpn or MQW elements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Radiation Pyrometers (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Electrotherapy Devices (AREA)
AT98935799T 1997-07-25 1998-07-22 Bolometer mit zwei bandbreiten ATE456862T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/900,251 US6097031A (en) 1997-07-25 1997-07-25 Dual bandwith bolometer
PCT/US1998/014925 WO1999005723A1 (en) 1997-07-25 1998-07-22 A dual bandwidth bolometer

Publications (1)

Publication Number Publication Date
ATE456862T1 true ATE456862T1 (de) 2010-02-15

Family

ID=25412235

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98935799T ATE456862T1 (de) 1997-07-25 1998-07-22 Bolometer mit zwei bandbreiten

Country Status (7)

Country Link
US (1) US6097031A (de)
EP (1) EP1005704B1 (de)
JP (1) JP2002521646A (de)
AT (1) ATE456862T1 (de)
CA (1) CA2295662C (de)
DE (1) DE69841477D1 (de)
WO (1) WO1999005723A1 (de)

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FR2811139B1 (fr) * 2000-06-29 2003-10-17 Centre Nat Rech Scient Dispositif optoelectronique a filtrage de longueur d'onde integre
DE10058861A1 (de) * 2000-11-27 2002-06-13 Siemens Ag Infrarotsensor für hochauflösende Infrarot-Detektoranordnungen und Verfahren zu seiner Herstellung
DE10058864B4 (de) * 2000-11-27 2009-06-25 Pyreos Ltd. Mikromechanikstruktur für integrierte Sensoranordnungen und Verfahren zur Herstellung einer Mikromechanikstruktur
US6541772B2 (en) 2000-12-26 2003-04-01 Honeywell International Inc. Microbolometer operating system
US7365326B2 (en) * 2000-12-26 2008-04-29 Honeywell International Inc. Camera having distortion correction
US6559447B2 (en) 2000-12-26 2003-05-06 Honeywell International Inc. Lightweight infrared camera
US7057256B2 (en) 2001-05-25 2006-06-06 President & Fellows Of Harvard College Silicon-based visible and near-infrared optoelectric devices
US7442629B2 (en) 2004-09-24 2008-10-28 President & Fellows Of Harvard College Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate
US7075079B2 (en) * 2001-06-27 2006-07-11 Wood Roland A Sensor for dual wavelength bands
US6770882B2 (en) * 2002-01-14 2004-08-03 Multispectral Imaging, Inc. Micromachined pyro-optical structure
US7196790B2 (en) * 2002-03-18 2007-03-27 Honeywell International Inc. Multiple wavelength spectrometer
US7531363B2 (en) * 2003-12-30 2009-05-12 Honeywell International Inc. Particle detection using fluorescence
JP2006047085A (ja) * 2004-08-04 2006-02-16 Denso Corp 赤外線センサ装置およびその製造方法
US8059344B2 (en) * 2005-06-07 2011-11-15 Honeywell International Inc. Multi-band lens
DE102006003718B4 (de) * 2006-01-26 2008-07-17 Atmel Germany Gmbh Mikro-elektro-mechanisches Bauelement und Fertigungsprozess für integrierte mikro-elektro-mechanische Bauelemente
WO2008108784A2 (en) * 2006-05-23 2008-09-12 Regents Of The Uninersity Of Minnesota Tunable finesse infrared cavity thermal detectors
US7629582B2 (en) * 2006-10-24 2009-12-08 Raytheon Company Dual band imager with visible or SWIR detectors combined with uncooled LWIR detectors
WO2008073261A2 (en) * 2006-12-08 2008-06-19 Regents Of The University Of Minnesota Detection beyond the standard radiation noise limit using reduced emissivity and optical cavity coupling
US7622717B2 (en) * 2007-08-22 2009-11-24 Drs Sensors & Targeting Systems, Inc. Pixel structure having an umbrella type absorber with one or more recesses or channels sized to increase radiation absorption
US8058615B2 (en) * 2008-02-29 2011-11-15 Sionyx, Inc. Wide spectral range hybrid image detector
WO2010033142A1 (en) 2008-05-30 2010-03-25 Regents Of The University Of Minnesota Detection beyond the standard radiation noise limit using spectrally selective absorption
FR2941329B1 (fr) * 2009-01-19 2011-03-04 Ulis Detecteur bispectral.
KR102234065B1 (ko) * 2009-09-17 2021-03-31 사이오닉스, 엘엘씨 감광성 이미징 장치 및 이와 관련된 방법
US9673243B2 (en) 2009-09-17 2017-06-06 Sionyx, Llc Photosensitive imaging devices and associated methods
US9911781B2 (en) 2009-09-17 2018-03-06 Sionyx, Llc Photosensitive imaging devices and associated methods
CN101713688B (zh) * 2009-12-11 2011-02-09 中国电子科技集团公司第十三研究所 一种mems非制冷双波段红外探测器及其制备方法
CN101813790B (zh) * 2010-04-08 2012-10-10 西安电子科技大学 双波段探测器对红外小目标的距离估计方法
US8692198B2 (en) 2010-04-21 2014-04-08 Sionyx, Inc. Photosensitive imaging devices and associated methods
US8314769B2 (en) 2010-04-28 2012-11-20 Honeywell International Inc. High performance detection pixel
US20120146172A1 (en) 2010-06-18 2012-06-14 Sionyx, Inc. High Speed Photosensitive Devices and Associated Methods
US9250135B2 (en) 2011-03-16 2016-02-02 Honeywell International Inc. MWIR sensor for flame detection
US9496308B2 (en) 2011-06-09 2016-11-15 Sionyx, Llc Process module for increasing the response of backside illuminated photosensitive imagers and associated methods
JP2014525091A (ja) 2011-07-13 2014-09-25 サイオニクス、インク． 生体撮像装置および関連方法
US9064764B2 (en) 2012-03-22 2015-06-23 Sionyx, Inc. Pixel isolation elements, devices, and associated methods
JP5988020B2 (ja) * 2012-03-26 2016-09-07 日本電気株式会社 固体撮像素子及びその製造方法
CN103592032A (zh) * 2012-08-14 2014-02-19 中国科学院微电子研究所 一种非制冷红外成像焦平面阵列探测器
JP6466346B2 (ja) 2013-02-15 2019-02-06 サイオニクス、エルエルシー アンチブルーミング特性を有するハイダイナミックレンジｃｍｏｓ画像センサおよび関連づけられた方法
US9939251B2 (en) 2013-03-15 2018-04-10 Sionyx, Llc Three dimensional imaging utilizing stacked imager devices and associated methods
US9209345B2 (en) 2013-06-29 2015-12-08 Sionyx, Inc. Shallow trench textured regions and associated methods
CN114761773A (zh) * 2019-05-21 2022-07-15 触控解决方案股份有限公司 芯片级封装中的组合式近红外和中红外传感器

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Also Published As

Publication number Publication date
CA2295662A1 (en) 1999-02-04
DE69841477D1 (de) 2010-03-18
CA2295662C (en) 2008-11-18
JP2002521646A (ja) 2002-07-16
EP1005704B1 (de) 2010-01-27
US6097031A (en) 2000-08-01
EP1005704A1 (de) 2000-06-07
WO1999005723A1 (en) 1999-02-04

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