ATE456862T1 - Bolometer mit zwei bandbreiten - Google Patents
Bolometer mit zwei bandbreitenInfo
- Publication number
- ATE456862T1 ATE456862T1 AT98935799T AT98935799T ATE456862T1 AT E456862 T1 ATE456862 T1 AT E456862T1 AT 98935799 T AT98935799 T AT 98935799T AT 98935799 T AT98935799 T AT 98935799T AT E456862 T1 ATE456862 T1 AT E456862T1
- Authority
- AT
- Austria
- Prior art keywords
- pixel
- visible light
- layer
- infrared radiation
- absorbing layer
- Prior art date
Links
- 230000005855 radiation Effects 0.000 abstract 3
- 238000001514 detection method Methods 0.000 abstract 1
- 230000009977 dual effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14645—Colour imagers
- H01L27/14647—Multicolour imagers having a stacked pixel-element structure, e.g. npn, npnpn or MQW elements
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Radiation Pyrometers (AREA)
- Electrotherapy Devices (AREA)
- Spectrometry And Color Measurement (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/900,251 US6097031A (en) | 1997-07-25 | 1997-07-25 | Dual bandwith bolometer |
PCT/US1998/014925 WO1999005723A1 (en) | 1997-07-25 | 1998-07-22 | A dual bandwidth bolometer |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE456862T1 true ATE456862T1 (de) | 2010-02-15 |
Family
ID=25412235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT98935799T ATE456862T1 (de) | 1997-07-25 | 1998-07-22 | Bolometer mit zwei bandbreiten |
Country Status (7)
Country | Link |
---|---|
US (1) | US6097031A (de) |
EP (1) | EP1005704B1 (de) |
JP (1) | JP2002521646A (de) |
AT (1) | ATE456862T1 (de) |
CA (1) | CA2295662C (de) |
DE (1) | DE69841477D1 (de) |
WO (1) | WO1999005723A1 (de) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2781927B1 (fr) * | 1998-07-28 | 2001-10-05 | Commissariat Energie Atomique | Dispositif de detection de rayonnements multispectraux infrarouge/visible |
FR2811139B1 (fr) * | 2000-06-29 | 2003-10-17 | Centre Nat Rech Scient | Dispositif optoelectronique a filtrage de longueur d'onde integre |
DE10058861A1 (de) * | 2000-11-27 | 2002-06-13 | Siemens Ag | Infrarotsensor für hochauflösende Infrarot-Detektoranordnungen und Verfahren zu seiner Herstellung |
DE10058864B4 (de) * | 2000-11-27 | 2009-06-25 | Pyreos Ltd. | Mikromechanikstruktur für integrierte Sensoranordnungen und Verfahren zur Herstellung einer Mikromechanikstruktur |
US6559447B2 (en) | 2000-12-26 | 2003-05-06 | Honeywell International Inc. | Lightweight infrared camera |
US6541772B2 (en) | 2000-12-26 | 2003-04-01 | Honeywell International Inc. | Microbolometer operating system |
US7365326B2 (en) * | 2000-12-26 | 2008-04-29 | Honeywell International Inc. | Camera having distortion correction |
US7057256B2 (en) | 2001-05-25 | 2006-06-06 | President & Fellows Of Harvard College | Silicon-based visible and near-infrared optoelectric devices |
US7442629B2 (en) | 2004-09-24 | 2008-10-28 | President & Fellows Of Harvard College | Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate |
US7075079B2 (en) * | 2001-06-27 | 2006-07-11 | Wood Roland A | Sensor for dual wavelength bands |
US6770882B2 (en) * | 2002-01-14 | 2004-08-03 | Multispectral Imaging, Inc. | Micromachined pyro-optical structure |
US7196790B2 (en) * | 2002-03-18 | 2007-03-27 | Honeywell International Inc. | Multiple wavelength spectrometer |
US7531363B2 (en) * | 2003-12-30 | 2009-05-12 | Honeywell International Inc. | Particle detection using fluorescence |
JP2006047085A (ja) * | 2004-08-04 | 2006-02-16 | Denso Corp | 赤外線センサ装置およびその製造方法 |
US8059344B2 (en) * | 2005-06-07 | 2011-11-15 | Honeywell International Inc. | Multi-band lens |
DE102006003718B4 (de) * | 2006-01-26 | 2008-07-17 | Atmel Germany Gmbh | Mikro-elektro-mechanisches Bauelement und Fertigungsprozess für integrierte mikro-elektro-mechanische Bauelemente |
WO2008108784A2 (en) * | 2006-05-23 | 2008-09-12 | Regents Of The Uninersity Of Minnesota | Tunable finesse infrared cavity thermal detectors |
US7629582B2 (en) * | 2006-10-24 | 2009-12-08 | Raytheon Company | Dual band imager with visible or SWIR detectors combined with uncooled LWIR detectors |
JP2010512507A (ja) * | 2006-12-08 | 2010-04-22 | リージェンツ オブ ザ ユニバーシティ オブ ミネソタ | 放射率の低減と光空洞カップリングを使用した、標準的な放射雑音限界を超える検出 |
US7622717B2 (en) * | 2007-08-22 | 2009-11-24 | Drs Sensors & Targeting Systems, Inc. | Pixel structure having an umbrella type absorber with one or more recesses or channels sized to increase radiation absorption |
US8058615B2 (en) * | 2008-02-29 | 2011-11-15 | Sionyx, Inc. | Wide spectral range hybrid image detector |
WO2010033142A1 (en) | 2008-05-30 | 2010-03-25 | Regents Of The University Of Minnesota | Detection beyond the standard radiation noise limit using spectrally selective absorption |
FR2941329B1 (fr) * | 2009-01-19 | 2011-03-04 | Ulis | Detecteur bispectral. |
KR102095669B1 (ko) * | 2009-09-17 | 2020-04-01 | 사이오닉스, 엘엘씨 | 감광성 이미징 장치 및 이와 관련된 방법 |
US9673243B2 (en) | 2009-09-17 | 2017-06-06 | Sionyx, Llc | Photosensitive imaging devices and associated methods |
US9911781B2 (en) | 2009-09-17 | 2018-03-06 | Sionyx, Llc | Photosensitive imaging devices and associated methods |
CN101713688B (zh) * | 2009-12-11 | 2011-02-09 | 中国电子科技集团公司第十三研究所 | 一种mems非制冷双波段红外探测器及其制备方法 |
CN101813790B (zh) * | 2010-04-08 | 2012-10-10 | 西安电子科技大学 | 双波段探测器对红外小目标的距离估计方法 |
US8692198B2 (en) | 2010-04-21 | 2014-04-08 | Sionyx, Inc. | Photosensitive imaging devices and associated methods |
US8314769B2 (en) | 2010-04-28 | 2012-11-20 | Honeywell International Inc. | High performance detection pixel |
CN103081128B (zh) | 2010-06-18 | 2016-11-02 | 西奥尼克斯公司 | 高速光敏设备及相关方法 |
US9250135B2 (en) | 2011-03-16 | 2016-02-02 | Honeywell International Inc. | MWIR sensor for flame detection |
US9496308B2 (en) | 2011-06-09 | 2016-11-15 | Sionyx, Llc | Process module for increasing the response of backside illuminated photosensitive imagers and associated methods |
JP2014525091A (ja) | 2011-07-13 | 2014-09-25 | サイオニクス、インク. | 生体撮像装置および関連方法 |
US9064764B2 (en) | 2012-03-22 | 2015-06-23 | Sionyx, Inc. | Pixel isolation elements, devices, and associated methods |
JP5988020B2 (ja) * | 2012-03-26 | 2016-09-07 | 日本電気株式会社 | 固体撮像素子及びその製造方法 |
CN103592032A (zh) * | 2012-08-14 | 2014-02-19 | 中国科学院微电子研究所 | 一种非制冷红外成像焦平面阵列探测器 |
KR20150130303A (ko) | 2013-02-15 | 2015-11-23 | 사이오닉스, 아이엔씨. | 안티 블루밍 특성 및 관련 방법을 가지는 높은 동적 범위의 cmos 이미지 센서 |
WO2014151093A1 (en) | 2013-03-15 | 2014-09-25 | Sionyx, Inc. | Three dimensional imaging utilizing stacked imager devices and associated methods |
US9209345B2 (en) | 2013-06-29 | 2015-12-08 | Sionyx, Inc. | Shallow trench textured regions and associated methods |
EP3973260A4 (de) * | 2019-05-21 | 2023-12-20 | Nextinput, Inc. | Kombinierter nah- und mittelinfrarotsensor in einem gehäuse in chipgrösse |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3962578A (en) * | 1975-02-28 | 1976-06-08 | Aeronutronic Ford Corporation | Two-color photoelectric detectors having an integral filter |
JPS60130274A (ja) * | 1983-12-19 | 1985-07-11 | Toshiba Corp | 固体撮像装置 |
US4754139A (en) * | 1986-04-10 | 1988-06-28 | Aerojet-General Corporation | Uncooled high resolution infrared imaging plane |
US5300915A (en) * | 1986-07-16 | 1994-04-05 | Honeywell Inc. | Thermal sensor |
US4752694A (en) * | 1987-01-12 | 1988-06-21 | Honeywell Inc. | Array uniformity correction |
US5021663B1 (en) * | 1988-08-12 | 1997-07-01 | Texas Instruments Inc | Infrared detector |
US5286976A (en) * | 1988-11-07 | 1994-02-15 | Honeywell Inc. | Microstructure design for high IR sensitivity |
US4948976A (en) * | 1989-02-09 | 1990-08-14 | Servo Corporation Of America | Multi-wavelength band infrared detector |
GB2248964A (en) * | 1990-10-17 | 1992-04-22 | Philips Electronic Associated | Plural-wavelength infrared detector devices |
DE69211153T2 (de) * | 1991-11-04 | 1996-12-05 | Honeywell Inc | Dunnfilmpyroelektrische bildmatrix |
JP3132197B2 (ja) * | 1992-10-29 | 2001-02-05 | 日本電気株式会社 | 熱型赤外線センサ |
US5691838A (en) * | 1994-06-16 | 1997-11-25 | Kureha Kagaku Kogyo Kabushiki Kaisha | Infrared-blocking optical fiber |
US5777328A (en) * | 1995-07-21 | 1998-07-07 | Texas Instruments Incorporated | Ramped foot support |
EP0861504A1 (de) * | 1995-11-15 | 1998-09-02 | Lockheed-Martin IR Imaging Systems | Doppelband-mehrlagen-mikrobrückensensor |
-
1997
- 1997-07-25 US US08/900,251 patent/US6097031A/en not_active Expired - Lifetime
-
1998
- 1998-07-22 AT AT98935799T patent/ATE456862T1/de not_active IP Right Cessation
- 1998-07-22 CA CA002295662A patent/CA2295662C/en not_active Expired - Lifetime
- 1998-07-22 EP EP98935799A patent/EP1005704B1/de not_active Expired - Lifetime
- 1998-07-22 DE DE69841477T patent/DE69841477D1/de not_active Expired - Fee Related
- 1998-07-22 WO PCT/US1998/014925 patent/WO1999005723A1/en active Application Filing
- 1998-07-22 JP JP2000504607A patent/JP2002521646A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
CA2295662C (en) | 2008-11-18 |
CA2295662A1 (en) | 1999-02-04 |
EP1005704B1 (de) | 2010-01-27 |
US6097031A (en) | 2000-08-01 |
WO1999005723A1 (en) | 1999-02-04 |
EP1005704A1 (de) | 2000-06-07 |
DE69841477D1 (de) | 2010-03-18 |
JP2002521646A (ja) | 2002-07-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE456862T1 (de) | Bolometer mit zwei bandbreiten | |
CN100576574C (zh) | 固体摄像元件、光检测器和使用它的认证装置 | |
US20200380237A1 (en) | Biometric imaging device and method for manufacturing the biometric imaging device | |
CN103677448B (zh) | 基于光栅结构的光波导式触摸屏 | |
CN110426891B (zh) | 一种显示面板及显示装置 | |
CA2249131A1 (en) | High resolution radiation imager | |
JPH11506381A (ja) | 指紋センサ装置 | |
RU2010110582A (ru) | Компоновка отражателя и коллиматора света для улучшенного накопления света в сцинтилляционных детекторах | |
EP0318510A1 (de) | Gewebtes tarnmaterial gegen elektromagnetische strahlen. | |
TWI496058B (zh) | 光學式觸控裝置 | |
KR950015537A (ko) | 방사선 검출기 | |
US6655675B2 (en) | X-ray detector offering an improved light yield | |
CN108399392B (zh) | 指纹识别结构和显示装置 | |
CN101375140B (zh) | 红外线吸收体及热型红外线检测器 | |
CN106595876A (zh) | 集成有效元与光学参考元的像素以及微测辐射热计 | |
US11018273B2 (en) | Photosensitive reflector, laser induced touch device and laser touch detection method | |
CN106949978A (zh) | 一种热成像传感器像素单元及其阵列 | |
KR20120027427A (ko) | 고-종횡비 광학 터치 패널에 사용되는 적외선 재귀반사 장치, 이를 제조하는 방법 및 이러한 장치를 사용하는 고-종횡비 터치 패널 | |
KR20010006151A (ko) | 적외선 검출 소자, 이 적외선 검출 소자를 이용한 적외선 센서 유닛 및 적외선 검출 장치 | |
US5017786A (en) | V2 O3 protection for IR detector arrays against intense thermal radiation | |
WO2018205124A1 (zh) | 显示模组 | |
JP2563962Y2 (ja) | 日射センサ | |
CN102650549B (zh) | 点格分光镜调制的基于fpa的非制冷热成像光学系统 | |
CN102650551B (zh) | 基于fpa非制冷热成像系统的点格分光镜光学读出方法 | |
JP2594966B2 (ja) | 放射線検出素子ブロック及びその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |