ATE456158T1 - Ein durch einen strom aus majoritätsträgern unterstützter detektor für elektromagnetische strahlung - Google Patents
Ein durch einen strom aus majoritätsträgern unterstützter detektor für elektromagnetische strahlungInfo
- Publication number
- ATE456158T1 ATE456158T1 AT03077744T AT03077744T ATE456158T1 AT E456158 T1 ATE456158 T1 AT E456158T1 AT 03077744 T AT03077744 T AT 03077744T AT 03077744 T AT03077744 T AT 03077744T AT E456158 T1 ATE456158 T1 AT E456158T1
- Authority
- AT
- Austria
- Prior art keywords
- current
- detection region
- detector
- photo
- majority
- Prior art date
Links
- 239000000969 carrier Substances 0.000 title abstract 5
- 230000005670 electromagnetic radiation Effects 0.000 title 1
- 238000001514 detection method Methods 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 2
- 230000005684 electric field Effects 0.000 abstract 1
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/491—Details of non-pulse systems
- G01S7/4912—Receivers
- G01S7/4913—Circuits for detection, sampling, integration or read-out
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
- G01S17/894—3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Computer Networks & Wireless Communication (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Light Receiving Elements (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Measurement Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP03077744A EP1513202B1 (de) | 2003-09-02 | 2003-09-02 | Ein durch einen Strom aus Majoritätsträgern unterstützter Detektor für elektromagnetische Strahlung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE456158T1 true ATE456158T1 (de) | 2010-02-15 |
Family
ID=34130237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT03077744T ATE456158T1 (de) | 2003-09-02 | 2003-09-02 | Ein durch einen strom aus majoritätsträgern unterstützter detektor für elektromagnetische strahlung |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6987268B2 (de) |
| EP (2) | EP2023399B1 (de) |
| AT (1) | ATE456158T1 (de) |
| DE (1) | DE60331060D1 (de) |
| DK (1) | DK1513202T3 (de) |
| ES (1) | ES2339643T3 (de) |
Families Citing this family (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050038504A1 (en) * | 2003-01-22 | 2005-02-17 | Harry Halleriet | Kit for applying drug coating to a medical device in surgeon room |
| JP4814095B2 (ja) * | 2003-09-18 | 2011-11-09 | イーツェー−ハウス ゲーエムベーハー | ３次元距離測定用の光電子センサおよびデバイス |
| ITMI20062352A1 (it) * | 2006-12-06 | 2008-06-07 | Milano Politecnico | Struttura fotosensibile al colore di una radiazione luminosa |
| EP2081004A1 (de) | 2008-01-17 | 2009-07-22 | Vrije Universiteit Brussel | Lichtspektrometer |
| US7615396B1 (en) * | 2008-04-28 | 2009-11-10 | Eugene Ching Lee | Photodiode stack for photo MOS relay using junction isolation technology |
| EP2116864A1 (de) | 2008-05-09 | 2009-11-11 | Vrije Universiteit Brussel | Entfernungsmessung mittels Laufzeitmessung mit Unterdrückung von Hintergrundstrahlung |
| EP2441246A1 (de) | 2009-06-09 | 2012-04-18 | MESA Imaging AG | System für ladungsdomänenelektronensubtraktion bei demodulationspixeln und verfahren dafür |
| GB2474631A (en) * | 2009-10-14 | 2011-04-27 | Optrima Nv | Photonic Mixer |
| EP2521926B1 (de) | 2010-01-06 | 2020-07-29 | Heptagon Micro Optics Pte. Ltd. | Demodulationssensor mit separaten pixel- und speicherarrays |
| WO2011117161A2 (de) | 2010-03-26 | 2011-09-29 | Iee International Electronics & Engineering S.A. | Lichtsensor mit photoempfindlicher halbleiterstruktur |
| US9410800B1 (en) | 2010-08-02 | 2016-08-09 | Heptagon Micro Optics Pte. Ltd. | 3D TOF camera with masked illumination |
| GB2486208A (en) * | 2010-12-06 | 2012-06-13 | Melexis Tessenderlo Nv | Demodulation sensor and method for detection and demodulation of temporarily modulated electromagnetic fields for use in Time of Flight applications. |
| FR2977978A1 (fr) * | 2011-07-12 | 2013-01-18 | St Microelectronics Grenoble 2 | Dispositif de transfert de charges photogenerees haute frequence et applications |
| GB2492848A (en) | 2011-07-15 | 2013-01-16 | Softkinetic Sensors Nv | Optical distance measurement |
| WO2013041949A1 (en) | 2011-09-20 | 2013-03-28 | Mesa Imaging Ag | Time of flight sensor with subframe compression and method |
| US8829408B2 (en) | 2011-09-27 | 2014-09-09 | Mesa Imaging Ag | Sensor pixel array and separated array of storage and accumulation with parallel acquisition and readout wherein each pixel includes storage sites and readout nodes |
| CN103998949B (zh) | 2012-01-10 | 2016-08-24 | 索弗特凯耐提克传感器股份有限公司 | 对飞行时间信号处理的改进或与之相关的改进 |
| WO2013104718A2 (en) * | 2012-01-10 | 2013-07-18 | Softkinetic Sensors Nv | Color and non-visible light e.g. ir sensor, namely a multispectral sensor |
| EP2703836B1 (de) | 2012-08-30 | 2015-06-24 | Softkinetic Sensors N.V. | TOF-Beleuchtungssystem und TOF-Kamera und Betriebsverfahren mit Steuerungsmitteln zur Ansteuerung der in der Szene vorhandenen elektronischen Vorrichtungen |
| DE102012109548B4 (de) * | 2012-10-08 | 2024-06-27 | pmdtechnologies ag | Auslesegate |
| JP5977366B2 (ja) * | 2013-01-10 | 2016-08-24 | ソフトキネティック センサー エヌブイ | カラー不可視光センサ、例えば、ｉｒセンサ、すなわち、マルチスペクトルセンサ |
| EP3792662A1 (de) | 2014-01-13 | 2021-03-17 | Sony Depthsensing Solutions SA/NV | Laufzeitsystem zur verwendung mit einem beleuchtungssystem |
| EP2960952B1 (de) * | 2014-06-27 | 2019-01-02 | Sony Depthsensing Solutions SA/NV | Strahlungsdetektor mit Unterstützung durch einen Stromfluss von Majoritätsladungsträgern |
| EP3227714A4 (de) | 2014-12-02 | 2018-07-18 | Heptagon Micro Optics Pte. Ltd. | Tiefensensormodul und tiefenmessverfahren |
| GB201421512D0 (en) * | 2014-12-03 | 2015-01-14 | Melexis Technologies Nv | A semiconductor pixel unit for simultaneously sensing visible light and near-infrared light, and a semiconductor sensor comprising same |
| US20160225812A1 (en) | 2015-02-03 | 2016-08-04 | Microsoft Technology Licensing, Llc | Cmos depth image sensor with integrated shallow trench isolation structures |
| TWI744196B (zh) | 2015-08-04 | 2021-10-21 | 光程研創股份有限公司 | 製造影像感測陣列之方法 |
| EP3341970B1 (de) | 2015-08-27 | 2020-10-07 | Artilux Inc. | Optischer sensor mit breitem spektrum |
| US10254389B2 (en) | 2015-11-06 | 2019-04-09 | Artilux Corporation | High-speed light sensing apparatus |
| US10886309B2 (en) | 2015-11-06 | 2021-01-05 | Artilux, Inc. | High-speed light sensing apparatus II |
| US10739443B2 (en) | 2015-11-06 | 2020-08-11 | Artilux, Inc. | High-speed light sensing apparatus II |
| US10418407B2 (en) | 2015-11-06 | 2019-09-17 | Artilux, Inc. | High-speed light sensing apparatus III |
| EP3193190B1 (de) | 2016-01-15 | 2023-04-12 | Sony Depthsensing Solutions N.V. | Detektorvorrichtung mit majoritätsstrom und schaltung zur steuerung des stroms |
| EP3193369B1 (de) | 2016-01-15 | 2021-11-17 | Sony Depthsensing Solutions N.V. | Detektorvorrichtung mit majoritätsstrom und isoliermitteln |
| CN107851656B (zh) * | 2016-03-04 | 2022-12-16 | 索尼公司 | 摄像装置和测距系统 |
| KR102391838B1 (ko) | 2016-06-20 | 2022-04-29 | 소니 세미컨덕터 솔루션즈 가부시키가이샤 | 드라이버 회로 및 전자 디바이스 |
| WO2018029372A1 (en) | 2016-08-12 | 2018-02-15 | Softkinetic Sensors N.V. | A demodulator with a carrier generating pinned photodiode |
| BE1025050B1 (fr) | 2016-08-12 | 2018-10-12 | Softkinetic Sensors Nv | Démodulateur doté d’une photodiode pincée génératrice de porteurs et procédé de fonctionnement associé |
| EP3622561B1 (de) * | 2017-05-08 | 2022-06-15 | Vrije Universiteit Brussel | Detektor mit schnell steuerbarer detektion von elektromagnetischer strahlung |
| WO2018206606A1 (en) | 2017-05-08 | 2018-11-15 | Vrije Universiteit Brussel | Detector for fast-gated detection of electromagnetic radiation |
| WO2019002252A1 (en) * | 2017-06-26 | 2019-01-03 | Sony Depthsensing Solutions Sa/Nv | MONOPHOTONIC AVALANCED DIODE AND METHOD FOR OPERATING A MONOPHOTONIC AVALANCED DIODE |
| EP3567848B1 (de) * | 2017-08-09 | 2021-10-27 | Sony Semiconductor Solutions Corporation | Festkörperbilderzeugungsvorrichtung, elektronische vorrichtung und steuerungsverfahren für festkörperbilderzeugungselement |
| US10636831B2 (en) * | 2017-08-30 | 2020-04-28 | Sony Semiconductor Solutions Corporation | Imaging element and imaging apparatus |
| US11482553B2 (en) | 2018-02-23 | 2022-10-25 | Artilux, Inc. | Photo-detecting apparatus with subpixels |
| US11105928B2 (en) | 2018-02-23 | 2021-08-31 | Artilux, Inc. | Light-sensing apparatus and light-sensing method thereof |
| JP7212062B2 (ja) | 2018-04-08 | 2023-01-24 | アーティラックス・インコーポレイテッド | 光検出装置 |
| US11574942B2 (en) | 2018-12-12 | 2023-02-07 | Artilux, Inc. | Semiconductor device with low dark noise |
| US11777049B2 (en) | 2019-08-28 | 2023-10-03 | Artilux, Inc. | Photo-detecting apparatus with low dark current |
| EP3907526B1 (de) | 2020-05-08 | 2024-03-13 | Melexis Technologies NV | Photonische mischvorrichtung |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1548877A (en) * | 1975-06-26 | 1979-07-18 | Mullard Ltd | Semiconductor devices |
| ES2206748T3 (es) | 1996-09-05 | 2004-05-16 | Rudolf Schwarte | Procedimiento y dispositivo para la determinacion de la informacion sobre fases y/o amplitudes de una onda electromagnetica. |
| EP0883187A1 (de) * | 1997-06-04 | 1998-12-09 | Interuniversitair Micro-Elektronica Centrum Vzw | Detektor für elektromagnetische Strahlung, Pixelstruktur mit höher Empfindlichkeit mit Verwendung dieses Detektors und Verfahren zu dessen Herstellung |
| EP0875939A1 (de) | 1997-04-30 | 1998-11-04 | Interuniversitair Micro-Elektronica Centrum Vzw | Räumlich modulierter Detektor für elektromagnetische Strahlung |
| DE19821974B4 (de) | 1998-05-18 | 2008-04-10 | Schwarte, Rudolf, Prof. Dr.-Ing. | Vorrichtung und Verfahren zur Erfassung von Phase und Amplitude elektromagnetischer Wellen |
| WO2002033817A1 (de) * | 2000-10-16 | 2002-04-25 | Rudolf Schwarte | Verfahren und vorrichtung zur erfassung und verarbeitung von signalwellen |
| US6597025B2 (en) * | 2001-03-15 | 2003-07-22 | Koninklijke Philips Electronics N.V. | Light sensitive semiconductor component |
| US6515903B1 (en) * | 2002-01-16 | 2003-02-04 | Advanced Micro Devices, Inc. | Negative pump regulator using MOS capacitor |
-
2003
- 2003-09-02 AT AT03077744T patent/ATE456158T1/de not_active IP Right Cessation
- 2003-09-02 DK DK03077744.5T patent/DK1513202T3/da active
- 2003-09-02 DE DE60331060T patent/DE60331060D1/de not_active Expired - Lifetime
- 2003-09-02 EP EP08167724.7A patent/EP2023399B1/de not_active Expired - Lifetime
- 2003-09-02 ES ES03077744T patent/ES2339643T3/es not_active Expired - Lifetime
- 2003-09-02 EP EP03077744A patent/EP1513202B1/de not_active Expired - Lifetime
-
2004
- 2004-08-30 US US10/929,277 patent/US6987268B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP1513202A1 (de) | 2005-03-09 |
| EP1513202B1 (de) | 2010-01-20 |
| DE60331060D1 (de) | 2010-03-11 |
| EP2023399B1 (de) | 2020-01-08 |
| EP2023399A2 (de) | 2009-02-11 |
| US20050051730A1 (en) | 2005-03-10 |
| DK1513202T3 (da) | 2010-05-10 |
| US6987268B2 (en) | 2006-01-17 |
| EP2023399A3 (de) | 2015-04-22 |
| ES2339643T3 (es) | 2010-05-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |