ATE428883T1 - Universelle vakuumskupplung für ein zylindrisches aufnahmeteil - Google Patents
Universelle vakuumskupplung für ein zylindrisches aufnahmeteilInfo
- Publication number
- ATE428883T1 ATE428883T1 AT04713555T AT04713555T ATE428883T1 AT E428883 T1 ATE428883 T1 AT E428883T1 AT 04713555 T AT04713555 T AT 04713555T AT 04713555 T AT04713555 T AT 04713555T AT E428883 T1 ATE428883 T1 AT E428883T1
- Authority
- AT
- Austria
- Prior art keywords
- cylindrical target
- spindle
- support part
- cylindrical support
- cylindrical
- Prior art date
Links
- 230000008878 coupling Effects 0.000 title abstract 2
- 238000010168 coupling process Methods 0.000 title abstract 2
- 238000005859 coupling reaction Methods 0.000 title abstract 2
- 238000007789 sealing Methods 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L37/00—Couplings of the quick-acting type
- F16L37/08—Couplings of the quick-acting type in which the connection between abutting or axially overlapping ends is maintained by locking members
- F16L37/12—Couplings of the quick-acting type in which the connection between abutting or axially overlapping ends is maintained by locking members using hooks, pawls or other movable or insertable locking members
- F16L37/14—Joints secured by inserting between mating surfaces an element, e.g. a piece of wire, a pin, a chain
- F16L37/142—Joints secured by inserting between mating surfaces an element, e.g. a piece of wire, a pin, a chain where the securing element is inserted tangentially
- F16L37/148—Joints secured by inserting between mating surfaces an element, e.g. a piece of wire, a pin, a chain where the securing element is inserted tangentially the securing element being flexible
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Clamps And Clips (AREA)
- Mutual Connection Of Rods And Tubes (AREA)
- Pens And Brushes (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03100767 | 2003-03-25 | ||
PCT/EP2004/050188 WO2004085902A1 (en) | 2003-03-25 | 2004-02-23 | Universal vacuum coupling for cylindrical target |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE428883T1 true ATE428883T1 (de) | 2009-05-15 |
Family
ID=33041043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04713555T ATE428883T1 (de) | 2003-03-25 | 2004-02-23 | Universelle vakuumskupplung für ein zylindrisches aufnahmeteil |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070007129A1 (de) |
EP (1) | EP1606543B1 (de) |
JP (1) | JP2006521515A (de) |
CN (1) | CN1761832A (de) |
AT (1) | ATE428883T1 (de) |
DE (1) | DE602004020599D1 (de) |
WO (1) | WO2004085902A1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006097152A1 (en) | 2004-10-18 | 2006-09-21 | Bekaert Advanced Coatings | Flat end-block for carrying a rotatable sputtering target |
DE102004058316A1 (de) * | 2004-12-02 | 2006-06-08 | W.C. Heraeus Gmbh | Rohrförmiges Sputtertarget |
US20060278519A1 (en) * | 2005-06-10 | 2006-12-14 | Leszek Malaszewski | Adaptable fixation for cylindrical magnetrons |
JP2009048823A (ja) * | 2007-08-17 | 2009-03-05 | Ihara Science Corp | 家庭用燃料電池における配管接続装置 |
US20090078572A1 (en) * | 2007-09-24 | 2009-03-26 | Von Ardenne Anlagentechnik Gmbh | Magnetron end-block with shielded target mounting assembly |
WO2009059624A1 (en) * | 2007-11-09 | 2009-05-14 | Pentair International Sarl | Quick-release fitting assembly |
ES2375235T3 (es) * | 2008-02-15 | 2012-02-28 | Bekaert Advanced Coatings Nv. | Acoplamiento a vacío con múltiples surcos. |
US8500972B2 (en) * | 2008-04-14 | 2013-08-06 | Angstrom Sciences, Inc. | Cylindrical magnetron |
WO2010046486A1 (en) * | 2008-10-24 | 2010-04-29 | Applied Materials, Inc. | Rotatable sputter target backing cylinder, rotatable sputter target, method of producing a rotatable sputter target, and coating installation |
WO2010046485A1 (en) * | 2008-10-24 | 2010-04-29 | Applied Materials, Inc. | Rotatable sputter target base, rotatable sputter target, coating installation, method of producing a rotatable sputter target, target base connection means, and method of connecting a rotatable target base device for sputtering installations to a target base support |
EP2180500A1 (de) * | 2008-10-24 | 2010-04-28 | Applied Materials, Inc. | Drehbarer Sputtertarget-Sicherungszylinder, drehbares Sputtertarget, Herstellungsverfahren und Verfahren zur Wiederherstellung eines drehbaren Sputtertargets und Beschichtungsanlage |
EP2180501A1 (de) * | 2008-10-24 | 2010-04-28 | Applied Materials, Inc. | Drehbare Sputtertargetbasis, drehbares Sputtertarget, Beschichtungsanlage, Herstellungsverfahren für ein drehbares Sputtertarget, Targetbasis-Verbindungsmittel und Verfahren zum Anschließen einer drehbaren Targetbasisvorrichtung für Sputteranlage an eine Targetbasisstütze |
DE102009033111A1 (de) | 2009-07-15 | 2011-02-03 | Ksb Aktiengesellschaft | Spalttopf |
DE102010040267B4 (de) | 2010-09-03 | 2014-07-17 | Von Ardenne Anlagentechnik Gmbh | Sputtereinrichtung mit rohrförmigem Target |
CN103814151B (zh) | 2011-06-27 | 2016-01-20 | 梭莱有限公司 | Pvd靶材及其铸造方法 |
CN102253478A (zh) * | 2011-07-11 | 2011-11-23 | 中国科学院西安光学精密机械研究所 | 一种90°弯折光学成像系统 |
GB201200574D0 (en) | 2012-01-13 | 2012-02-29 | Gencoa Ltd | In-vacuum rotational device |
JP6247126B2 (ja) * | 2014-03-20 | 2017-12-13 | コスモ工機株式会社 | 管接続構造 |
AT14911U1 (de) | 2015-05-06 | 2016-08-15 | Plansee Se | Rohrtarget |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5096562A (en) * | 1989-11-08 | 1992-03-17 | The Boc Group, Inc. | Rotating cylindrical magnetron structure for large area coating |
US5620577A (en) * | 1993-12-30 | 1997-04-15 | Viratec Thin Films, Inc. | Spring-loaded mount for a rotatable sputtering cathode |
US5591314A (en) * | 1995-10-27 | 1997-01-07 | Morgan; Steven V. | Apparatus for affixing a rotating cylindrical magnetron target to a spindle |
EP0969238A1 (de) * | 1998-06-29 | 2000-01-05 | Sinvaco N.V. | Vakuumdichte Kupplung für Rohre |
DE19958666C2 (de) * | 1999-12-06 | 2003-10-30 | Heraeus Gmbh W C | Vorrichtung zur lösbaren Verbindung eines zylinderrohrförmigen Targetteiles mit einem Aufnahmeteil |
US6375815B1 (en) * | 2001-02-17 | 2002-04-23 | David Mark Lynn | Cylindrical magnetron target and apparatus for affixing the target to a rotatable spindle assembly |
-
2004
- 2004-02-23 DE DE602004020599T patent/DE602004020599D1/de not_active Expired - Lifetime
- 2004-02-23 US US10/550,515 patent/US20070007129A1/en not_active Abandoned
- 2004-02-23 EP EP04713555A patent/EP1606543B1/de not_active Expired - Lifetime
- 2004-02-23 AT AT04713555T patent/ATE428883T1/de not_active IP Right Cessation
- 2004-02-23 CN CN200480007007.0A patent/CN1761832A/zh active Pending
- 2004-02-23 WO PCT/EP2004/050188 patent/WO2004085902A1/en active Application Filing
- 2004-02-23 JP JP2006505429A patent/JP2006521515A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2004085902A1 (en) | 2004-10-07 |
CN1761832A (zh) | 2006-04-19 |
JP2006521515A (ja) | 2006-09-21 |
US20070007129A1 (en) | 2007-01-11 |
DE602004020599D1 (de) | 2009-05-28 |
EP1606543B1 (de) | 2009-04-15 |
EP1606543A1 (de) | 2005-12-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |