DE602004020599D1 - Universelle vakuumskupplung für ein zylindrisches aufnahmeteil - Google Patents

Universelle vakuumskupplung für ein zylindrisches aufnahmeteil

Info

Publication number
DE602004020599D1
DE602004020599D1 DE602004020599T DE602004020599T DE602004020599D1 DE 602004020599 D1 DE602004020599 D1 DE 602004020599D1 DE 602004020599 T DE602004020599 T DE 602004020599T DE 602004020599 T DE602004020599 T DE 602004020599T DE 602004020599 D1 DE602004020599 D1 DE 602004020599D1
Authority
DE
Germany
Prior art keywords
cylindrical target
cylindrical
spindle
recording part
engage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004020599T
Other languages
English (en)
Inventor
Bosscher Wilmert De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soleras Advanced Coatings BV
Original Assignee
Bekaert Advanced Coatings NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bekaert Advanced Coatings NV filed Critical Bekaert Advanced Coatings NV
Publication of DE602004020599D1 publication Critical patent/DE602004020599D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L37/00—Couplings of the quick-acting type
    • F16L37/08—Couplings of the quick-acting type in which the connection between abutting or axially overlapping ends is maintained by locking members
    • F16L37/12—Couplings of the quick-acting type in which the connection between abutting or axially overlapping ends is maintained by locking members using hooks, pawls or other movable or insertable locking members
    • F16L37/14—Joints secured by inserting between mating surfaces an element, e.g. a piece of wire, a pin, a chain
    • F16L37/142—Joints secured by inserting between mating surfaces an element, e.g. a piece of wire, a pin, a chain where the securing element is inserted tangentially
    • F16L37/148—Joints secured by inserting between mating surfaces an element, e.g. a piece of wire, a pin, a chain where the securing element is inserted tangentially the securing element being flexible

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Clamps And Clips (AREA)
  • Mutual Connection Of Rods And Tubes (AREA)
  • Pens And Brushes (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
DE602004020599T 2003-03-25 2004-02-23 Universelle vakuumskupplung für ein zylindrisches aufnahmeteil Expired - Lifetime DE602004020599D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03100767 2003-03-25
PCT/EP2004/050188 WO2004085902A1 (en) 2003-03-25 2004-02-23 Universal vacuum coupling for cylindrical target

Publications (1)

Publication Number Publication Date
DE602004020599D1 true DE602004020599D1 (de) 2009-05-28

Family

ID=33041043

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004020599T Expired - Lifetime DE602004020599D1 (de) 2003-03-25 2004-02-23 Universelle vakuumskupplung für ein zylindrisches aufnahmeteil

Country Status (7)

Country Link
US (1) US20070007129A1 (de)
EP (1) EP1606543B1 (de)
JP (1) JP2006521515A (de)
CN (1) CN1761832A (de)
AT (1) ATE428883T1 (de)
DE (1) DE602004020599D1 (de)
WO (1) WO2004085902A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1799876B1 (de) 2004-10-18 2009-02-18 Bekaert Advanced Coatings Flacher endblock als träger eines drehbaren sputter-targets
DE102004058316A1 (de) * 2004-12-02 2006-06-08 W.C. Heraeus Gmbh Rohrförmiges Sputtertarget
US20060278519A1 (en) * 2005-06-10 2006-12-14 Leszek Malaszewski Adaptable fixation for cylindrical magnetrons
JP2009048823A (ja) * 2007-08-17 2009-03-05 Ihara Science Corp 家庭用燃料電池における配管接続装置
DE102008048785B4 (de) * 2007-09-24 2014-04-17 Von Ardenne Anlagentechnik Gmbh Magnetronanordnung mit abgeschirmter Targethalterung
WO2009059624A1 (en) * 2007-11-09 2009-05-14 Pentair International Sarl Quick-release fitting assembly
JP5520839B2 (ja) * 2008-02-15 2014-06-11 ソレラス・アドヴァンスト・コーティングス・ビーヴイビーエー 多重溝付き真空連結具
WO2009129115A2 (en) * 2008-04-14 2009-10-22 Angstrom Sciences, Inc. Cylindrical magnetron
EP2180502A1 (de) * 2008-10-24 2010-04-28 Applied Materials, Inc. Drehbarer Sputtertarget-Sicherungszylinder, drehbares Sputtertarget, Herstellungsverfahren und Verfahren zur Wiederherstellung eines drehbaren Sputtertargets und Beschichtungsanlage
EP2180500A1 (de) * 2008-10-24 2010-04-28 Applied Materials, Inc. Drehbarer Sputtertarget-Sicherungszylinder, drehbares Sputtertarget, Herstellungsverfahren und Verfahren zur Wiederherstellung eines drehbaren Sputtertargets und Beschichtungsanlage
SG195563A1 (en) * 2008-10-24 2013-12-30 Applied Materials Inc Rotatable sputter target base, rotatable sputter target, coating installation, method of producing a rotatable sputter target, target base connection means, and method of connecting a rotatable target base device for sputtering installations to a target base support
EP2180501A1 (de) * 2008-10-24 2010-04-28 Applied Materials, Inc. Drehbare Sputtertargetbasis, drehbares Sputtertarget, Beschichtungsanlage, Herstellungsverfahren für ein drehbares Sputtertarget, Targetbasis-Verbindungsmittel und Verfahren zum Anschließen einer drehbaren Targetbasisvorrichtung für Sputteranlage an eine Targetbasisstütze
DE102009033111A1 (de) 2009-07-15 2011-02-03 Ksb Aktiengesellschaft Spalttopf
DE102010040267B4 (de) * 2010-09-03 2014-07-17 Von Ardenne Anlagentechnik Gmbh Sputtereinrichtung mit rohrförmigem Target
CN103814151B (zh) 2011-06-27 2016-01-20 梭莱有限公司 Pvd靶材及其铸造方法
CN102253478A (zh) * 2011-07-11 2011-11-23 中国科学院西安光学精密机械研究所 一种90°弯折光学成像系统
GB201200574D0 (en) 2012-01-13 2012-02-29 Gencoa Ltd In-vacuum rotational device
JP6247126B2 (ja) * 2014-03-20 2017-12-13 コスモ工機株式会社 管接続構造
AT14911U1 (de) 2015-05-06 2016-08-15 Plansee Se Rohrtarget

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5096562A (en) * 1989-11-08 1992-03-17 The Boc Group, Inc. Rotating cylindrical magnetron structure for large area coating
US5620577A (en) * 1993-12-30 1997-04-15 Viratec Thin Films, Inc. Spring-loaded mount for a rotatable sputtering cathode
US5591314A (en) * 1995-10-27 1997-01-07 Morgan; Steven V. Apparatus for affixing a rotating cylindrical magnetron target to a spindle
EP0969238A1 (de) * 1998-06-29 2000-01-05 Sinvaco N.V. Vakuumdichte Kupplung für Rohre
DE19958666C2 (de) * 1999-12-06 2003-10-30 Heraeus Gmbh W C Vorrichtung zur lösbaren Verbindung eines zylinderrohrförmigen Targetteiles mit einem Aufnahmeteil
US6375815B1 (en) * 2001-02-17 2002-04-23 David Mark Lynn Cylindrical magnetron target and apparatus for affixing the target to a rotatable spindle assembly

Also Published As

Publication number Publication date
JP2006521515A (ja) 2006-09-21
EP1606543B1 (de) 2009-04-15
ATE428883T1 (de) 2009-05-15
EP1606543A1 (de) 2005-12-21
CN1761832A (zh) 2006-04-19
US20070007129A1 (en) 2007-01-11
WO2004085902A1 (en) 2004-10-07

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Legal Events

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